8/27/2012	12:00:14 AM	Main Vac valve closed
8/27/2012	12:00:33 AM	Main Vac valve opened
8/27/2012	12:02:28 AM	Recipe started at 12:02 AM
8/27/2012	12:02:28 AM	Helium valve closed
8/27/2012	12:02:28 AM	H2 valve closed
8/27/2012	12:02:28 AM	BCl3 valve closed
8/27/2012	12:02:28 AM	PH3 valve closed
8/27/2012	12:02:28 AM	SiCl4 pre valve closed
8/27/2012	12:02:28 AM	SiCl4 post valve closed
8/27/2012	12:02:28 AM	Main Vac valve closed
8/27/2012	12:02:28 AM	Bypass valve closed
8/27/2012	12:02:28 AM	Bubbler valve closed
8/27/2012	12:02:28 AM	Helium MFC set to  0.000000
8/27/2012	12:02:28 AM	H2 MFC set to  0.000000
8/27/2012	12:02:28 AM	BCl3 MFC set to  0.000000
8/27/2012	12:02:28 AM	PH3 MFC set to  0.000000
8/27/2012	12:02:28 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:02:28 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:02:28 AM	Tube furnace set to 0
8/27/2012	12:02:31 AM	Helium valve closed
8/27/2012	12:02:31 AM	BCl3 valve closed
8/27/2012	12:02:31 AM	PH3 valve closed
8/27/2012	12:02:31 AM	SiCl4 pre valve closed
8/27/2012	12:02:31 AM	SiCl4 post valve closed
8/27/2012	12:02:31 AM	Main Vac valve closed
8/27/2012	12:02:31 AM	Bypass valve closed
8/27/2012	12:02:31 AM	Bubbler valve closed
8/27/2012	12:02:31 AM	H2 valve opened
8/27/2012	12:02:31 AM	Helium MFC set to  0.000000
8/27/2012	12:02:31 AM	H2 MFC set to  500.000000
8/27/2012	12:02:31 AM	BCl3 MFC set to  0.000000
8/27/2012	12:02:31 AM	PH3 MFC set to  0.000000
8/27/2012	12:02:31 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:02:31 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:02:31 AM	Tube furnace set to 0
8/27/2012	12:03:46 AM	Helium valve closed
8/27/2012	12:03:46 AM	BCl3 valve closed
8/27/2012	12:03:46 AM	PH3 valve closed
8/27/2012	12:03:46 AM	SiCl4 pre valve closed
8/27/2012	12:03:46 AM	SiCl4 post valve closed
8/27/2012	12:03:46 AM	Main Vac valve closed
8/27/2012	12:03:46 AM	Bypass valve closed
8/27/2012	12:03:46 AM	H2 valve opened
8/27/2012	12:03:46 AM	Bubbler valve opened
8/27/2012	12:03:46 AM	Helium MFC set to  0.000000
8/27/2012	12:03:46 AM	H2 MFC set to  500.000000
8/27/2012	12:03:46 AM	BCl3 MFC set to  0.000000
8/27/2012	12:03:46 AM	PH3 MFC set to  0.000000
8/27/2012	12:03:46 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:03:46 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:03:46 AM	Tube furnace set to 0
8/27/2012	12:03:47 AM	Helium valve closed
8/27/2012	12:03:47 AM	BCl3 valve closed
8/27/2012	12:03:47 AM	PH3 valve closed
8/27/2012	12:03:47 AM	SiCl4 pre valve closed
8/27/2012	12:03:47 AM	SiCl4 post valve closed
8/27/2012	12:03:47 AM	Main Vac valve closed
8/27/2012	12:03:47 AM	Bypass valve closed
8/27/2012	12:03:47 AM	H2 valve opened
8/27/2012	12:03:48 AM	Bubbler valve opened
8/27/2012	12:03:48 AM	Helium MFC set to  0.000000
8/27/2012	12:03:48 AM	H2 MFC set to  450.000000
8/27/2012	12:03:48 AM	BCl3 MFC set to  0.000000
8/27/2012	12:03:48 AM	PH3 MFC set to  0.000000
8/27/2012	12:03:48 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:03:48 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:03:48 AM	Tube furnace set to 1000
8/27/2012	12:28:48 AM	Helium valve closed
8/27/2012	12:28:48 AM	PH3 valve closed
8/27/2012	12:28:48 AM	Main Vac valve closed
8/27/2012	12:28:48 AM	Bypass valve closed
8/27/2012	12:28:48 AM	H2 valve opened
8/27/2012	12:28:48 AM	BCl3 valve opened
8/27/2012	12:28:48 AM	SiCl4 pre valve opened
8/27/2012	12:28:48 AM	SiCl4 post valve opened
8/27/2012	12:28:48 AM	Bubbler valve opened
8/27/2012	12:28:48 AM	Helium MFC set to  0.000000
8/27/2012	12:28:48 AM	H2 MFC set to  450.000000
8/27/2012	12:28:48 AM	BCl3 MFC set to  1.500000
8/27/2012	12:28:48 AM	PH3 MFC set to  0.000000
8/27/2012	12:28:48 AM	SiCl4 MFC set to  50.000000
8/27/2012	12:28:48 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:28:48 AM	Tube furnace set to 1000
8/27/2012	12:33:48 AM	Helium valve closed
8/27/2012	12:33:48 AM	BCl3 valve closed
8/27/2012	12:33:48 AM	PH3 valve closed
8/27/2012	12:33:48 AM	SiCl4 pre valve closed
8/27/2012	12:33:48 AM	SiCl4 post valve closed
8/27/2012	12:33:48 AM	Main Vac valve closed
8/27/2012	12:33:48 AM	Bypass valve closed
8/27/2012	12:33:48 AM	H2 valve opened
8/27/2012	12:33:48 AM	Bubbler valve opened
8/27/2012	12:33:48 AM	Helium MFC set to  0.000000
8/27/2012	12:33:48 AM	H2 MFC set to  500.000000
8/27/2012	12:33:48 AM	BCl3 MFC set to  0.000000
8/27/2012	12:33:48 AM	PH3 MFC set to  0.000000
8/27/2012	12:33:48 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:33:48 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:33:48 AM	Tube furnace set to 750
8/27/2012	12:38:48 AM	H2 valve closed
8/27/2012	12:38:48 AM	BCl3 valve closed
8/27/2012	12:38:48 AM	PH3 valve closed
8/27/2012	12:38:48 AM	SiCl4 pre valve closed
8/27/2012	12:38:48 AM	SiCl4 post valve closed
8/27/2012	12:38:48 AM	Main Vac valve closed
8/27/2012	12:38:48 AM	Bypass valve closed
8/27/2012	12:38:48 AM	Helium valve opened
8/27/2012	12:38:48 AM	Bubbler valve opened
8/27/2012	12:38:48 AM	Helium MFC set to  500.000000
8/27/2012	12:38:48 AM	H2 MFC set to  0.000000
8/27/2012	12:38:48 AM	BCl3 MFC set to  0.000000
8/27/2012	12:38:48 AM	PH3 MFC set to  0.000000
8/27/2012	12:38:48 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:38:48 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:38:48 AM	Tube furnace set to 0
8/27/2012	12:51:35 AM	Helium valve closed
8/27/2012	12:51:35 AM	H2 valve closed
8/27/2012	12:51:35 AM	BCl3 valve closed
8/27/2012	12:51:35 AM	PH3 valve closed
8/27/2012	12:51:35 AM	SiCl4 pre valve closed
8/27/2012	12:51:35 AM	SiCl4 post valve closed
8/27/2012	12:51:35 AM	Main Vac valve closed
8/27/2012	12:51:35 AM	Bypass valve closed
8/27/2012	12:51:35 AM	Bubbler valve closed
8/27/2012	12:51:35 AM	Helium MFC set to  0.000000
8/27/2012	12:51:35 AM	H2 MFC set to  0.000000
8/27/2012	12:51:35 AM	BCl3 MFC set to  0.000000
8/27/2012	12:51:35 AM	PH3 MFC set to  0.000000
8/27/2012	12:51:35 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:51:35 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:51:35 AM	Tube furnace set to 0
8/27/2012	12:51:36 AM	Run finished at 12:51 AM
8/27/2012	12:51:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	12:51:58 AM	Recipe started at 12:51 AM
8/27/2012	12:51:58 AM	Helium valve closed
8/27/2012	12:51:58 AM	H2 valve closed
8/27/2012	12:51:58 AM	BCl3 valve closed
8/27/2012	12:51:58 AM	PH3 valve closed
8/27/2012	12:51:58 AM	SiCl4 pre valve closed
8/27/2012	12:51:58 AM	SiCl4 post valve closed
8/27/2012	12:51:58 AM	Main Vac valve closed
8/27/2012	12:51:58 AM	Bypass valve closed
8/27/2012	12:51:58 AM	Bubbler valve closed
8/27/2012	12:51:58 AM	Helium MFC set to  0.000000
8/27/2012	12:51:58 AM	H2 MFC set to  0.000000
8/27/2012	12:51:58 AM	BCl3 MFC set to  0.000000
8/27/2012	12:51:58 AM	PH3 MFC set to  0.000000
8/27/2012	12:51:58 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:51:58 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:51:58 AM	Tube furnace set to 0
8/27/2012	12:52:01 AM	H2 valve closed
8/27/2012	12:52:01 AM	BCl3 valve closed
8/27/2012	12:52:01 AM	PH3 valve closed
8/27/2012	12:52:01 AM	SiCl4 pre valve closed
8/27/2012	12:52:01 AM	SiCl4 post valve closed
8/27/2012	12:52:01 AM	Main Vac valve closed
8/27/2012	12:52:01 AM	Bypass valve closed
8/27/2012	12:52:01 AM	Bubbler valve closed
8/27/2012	12:52:01 AM	Helium valve opened
8/27/2012	12:52:01 AM	Helium MFC set to  500.000000
8/27/2012	12:52:01 AM	H2 MFC set to  0.000000
8/27/2012	12:52:01 AM	BCl3 MFC set to  0.000000
8/27/2012	12:52:01 AM	PH3 MFC set to  0.000000
8/27/2012	12:52:01 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:52:01 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:52:01 AM	Tube furnace set to 0
8/27/2012	12:52:02 AM	Helium valve closed
8/27/2012	12:52:02 AM	H2 valve closed
8/27/2012	12:52:02 AM	BCl3 valve closed
8/27/2012	12:52:02 AM	PH3 valve closed
8/27/2012	12:52:02 AM	SiCl4 pre valve closed
8/27/2012	12:52:02 AM	SiCl4 post valve closed
8/27/2012	12:52:02 AM	Main Vac valve closed
8/27/2012	12:52:02 AM	Bypass valve closed
8/27/2012	12:52:02 AM	Bubbler valve closed
8/27/2012	12:52:02 AM	Helium MFC set to  0.000000
8/27/2012	12:52:02 AM	H2 MFC set to  0.000000
8/27/2012	12:52:02 AM	BCl3 MFC set to  0.000000
8/27/2012	12:52:02 AM	PH3 MFC set to  0.000000
8/27/2012	12:52:02 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:52:02 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:52:02 AM	Tube furnace set to 0
8/27/2012	12:52:03 AM	Run finished at 12:52 AM
8/27/2012	12:52:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	12:57:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	12:57:41 AM	Recipe started at 12:57 AM
8/27/2012	12:57:41 AM	Helium valve closed
8/27/2012	12:57:41 AM	H2 valve closed
8/27/2012	12:57:41 AM	BCl3 valve closed
8/27/2012	12:57:41 AM	PH3 valve closed
8/27/2012	12:57:41 AM	SiCl4 pre valve closed
8/27/2012	12:57:41 AM	SiCl4 post valve closed
8/27/2012	12:57:41 AM	Main Vac valve closed
8/27/2012	12:57:41 AM	Bubbler valve closed
8/27/2012	12:57:41 AM	Bypass valve opened
8/27/2012	12:57:41 AM	Helium MFC set to  0.000000
8/27/2012	12:57:41 AM	H2 MFC set to  0.000000
8/27/2012	12:57:41 AM	BCl3 MFC set to  0.000000
8/27/2012	12:57:41 AM	PH3 MFC set to  0.000000
8/27/2012	12:57:41 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:57:41 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:57:41 AM	Tube furnace set to 0
8/27/2012	12:58:54 AM	Helium valve closed
8/27/2012	12:58:54 AM	H2 valve closed
8/27/2012	12:58:54 AM	BCl3 valve closed
8/27/2012	12:58:54 AM	PH3 valve closed
8/27/2012	12:58:54 AM	SiCl4 pre valve closed
8/27/2012	12:58:54 AM	SiCl4 post valve closed
8/27/2012	12:58:54 AM	Main Vac valve closed
8/27/2012	12:58:54 AM	Bubbler valve closed
8/27/2012	12:58:54 AM	Bypass valve opened
8/27/2012	12:58:54 AM	Helium MFC set to  0.000000
8/27/2012	12:58:54 AM	H2 MFC set to  0.000000
8/27/2012	12:58:54 AM	BCl3 MFC set to  0.000000
8/27/2012	12:58:54 AM	PH3 MFC set to  0.000000
8/27/2012	12:58:54 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:58:54 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:58:54 AM	Tube furnace set to 0
8/27/2012	12:59:54 AM	Helium valve closed
8/27/2012	12:59:54 AM	H2 valve closed
8/27/2012	12:59:54 AM	BCl3 valve closed
8/27/2012	12:59:54 AM	PH3 valve closed
8/27/2012	12:59:54 AM	SiCl4 pre valve closed
8/27/2012	12:59:54 AM	SiCl4 post valve closed
8/27/2012	12:59:54 AM	Bypass valve closed
8/27/2012	12:59:54 AM	Bubbler valve closed
8/27/2012	12:59:54 AM	Main Vac valve opened
8/27/2012	12:59:54 AM	Helium MFC set to  0.000000
8/27/2012	12:59:54 AM	H2 MFC set to  0.000000
8/27/2012	12:59:54 AM	BCl3 MFC set to  0.000000
8/27/2012	12:59:54 AM	PH3 MFC set to  0.000000
8/27/2012	12:59:54 AM	SiCl4 MFC set to  0.000000
8/27/2012	12:59:54 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:59:54 AM	Tube furnace set to 0
8/27/2012	12:59:55 AM	Run finished at 12:59 AM
8/27/2012	12:59:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	7:42:57 AM	Main Vac valve closed
8/27/2012	7:43:11 AM	Main Vac valve opened
8/27/2012	7:43:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/27/2012	7:44:04 AM	Recipe started at 7:43 AM
8/27/2012	7:44:04 AM	Helium valve closed
8/27/2012	7:44:04 AM	H2 valve closed
8/27/2012	7:44:04 AM	BCl3 valve closed
8/27/2012	7:44:04 AM	PH3 valve closed
8/27/2012	7:44:04 AM	SiCl4 pre valve closed
8/27/2012	7:44:04 AM	SiCl4 post valve closed
8/27/2012	7:44:04 AM	Main Vac valve closed
8/27/2012	7:44:04 AM	Bubbler valve closed
8/27/2012	7:44:04 AM	Bypass valve opened
8/27/2012	7:44:04 AM	Helium MFC set to  0.000000
8/27/2012	7:44:04 AM	H2 MFC set to  0.000000
8/27/2012	7:44:04 AM	BCl3 MFC set to  0.000000
8/27/2012	7:44:04 AM	PH3 MFC set to  0.000000
8/27/2012	7:44:04 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:44:04 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:44:04 AM	Tube furnace set to 0
8/27/2012	7:44:04 AM	Helium valve closed
8/27/2012	7:44:04 AM	H2 valve closed
8/27/2012	7:44:04 AM	BCl3 valve closed
8/27/2012	7:44:04 AM	PH3 valve closed
8/27/2012	7:44:04 AM	SiCl4 pre valve closed
8/27/2012	7:44:04 AM	SiCl4 post valve closed
8/27/2012	7:44:04 AM	Main Vac valve closed
8/27/2012	7:44:04 AM	Bubbler valve closed
8/27/2012	7:44:04 AM	Bypass valve opened
8/27/2012	7:44:04 AM	Helium MFC set to  0.000000
8/27/2012	7:44:04 AM	H2 MFC set to  0.000000
8/27/2012	7:44:04 AM	BCl3 MFC set to  0.000000
8/27/2012	7:44:04 AM	PH3 MFC set to  0.000000
8/27/2012	7:44:04 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:44:04 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:44:04 AM	Tube furnace set to 0
8/27/2012	7:44:12 AM	Helium valve closed
8/27/2012	7:44:12 AM	H2 valve closed
8/27/2012	7:44:12 AM	BCl3 valve closed
8/27/2012	7:44:12 AM	PH3 valve closed
8/27/2012	7:44:12 AM	SiCl4 pre valve closed
8/27/2012	7:44:12 AM	SiCl4 post valve closed
8/27/2012	7:44:12 AM	Bypass valve closed
8/27/2012	7:44:12 AM	Bubbler valve closed
8/27/2012	7:44:12 AM	Main Vac valve opened
8/27/2012	7:44:12 AM	Helium MFC set to  0.000000
8/27/2012	7:44:12 AM	H2 MFC set to  0.000000
8/27/2012	7:44:12 AM	BCl3 MFC set to  0.000000
8/27/2012	7:44:12 AM	PH3 MFC set to  0.000000
8/27/2012	7:44:12 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:44:12 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:44:12 AM	Tube furnace set to 0
8/27/2012	7:44:42 AM	H2 valve closed
8/27/2012	7:44:42 AM	BCl3 valve closed
8/27/2012	7:44:42 AM	PH3 valve closed
8/27/2012	7:44:42 AM	SiCl4 pre valve closed
8/27/2012	7:44:42 AM	SiCl4 post valve closed
8/27/2012	7:44:42 AM	Bypass valve closed
8/27/2012	7:44:42 AM	Bubbler valve closed
8/27/2012	7:44:42 AM	Helium valve opened
8/27/2012	7:44:42 AM	Main Vac valve opened
8/27/2012	7:44:42 AM	Helium MFC set to  20.000000
8/27/2012	7:44:42 AM	H2 MFC set to  0.000000
8/27/2012	7:44:42 AM	BCl3 MFC set to  0.000000
8/27/2012	7:44:42 AM	PH3 MFC set to  0.000000
8/27/2012	7:44:42 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:44:42 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:44:42 AM	Tube furnace set to 0
8/27/2012	7:45:12 AM	Helium valve closed
8/27/2012	7:45:12 AM	H2 valve closed
8/27/2012	7:45:12 AM	BCl3 valve closed
8/27/2012	7:45:12 AM	PH3 valve closed
8/27/2012	7:45:12 AM	SiCl4 pre valve closed
8/27/2012	7:45:12 AM	SiCl4 post valve closed
8/27/2012	7:45:12 AM	Bypass valve closed
8/27/2012	7:45:12 AM	Bubbler valve closed
8/27/2012	7:45:12 AM	Main Vac valve opened
8/27/2012	7:45:12 AM	Helium MFC set to  0.000000
8/27/2012	7:45:12 AM	H2 MFC set to  0.000000
8/27/2012	7:45:12 AM	BCl3 MFC set to  0.000000
8/27/2012	7:45:12 AM	PH3 MFC set to  0.000000
8/27/2012	7:45:12 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:45:12 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:45:12 AM	Tube furnace set to 0
8/27/2012	7:45:42 AM	H2 valve closed
8/27/2012	7:45:42 AM	BCl3 valve closed
8/27/2012	7:45:42 AM	PH3 valve closed
8/27/2012	7:45:42 AM	SiCl4 pre valve closed
8/27/2012	7:45:42 AM	SiCl4 post valve closed
8/27/2012	7:45:42 AM	Bypass valve closed
8/27/2012	7:45:42 AM	Bubbler valve closed
8/27/2012	7:45:42 AM	Helium valve opened
8/27/2012	7:45:42 AM	Main Vac valve opened
8/27/2012	7:45:42 AM	Helium MFC set to  20.000000
8/27/2012	7:45:42 AM	H2 MFC set to  0.000000
8/27/2012	7:45:42 AM	BCl3 MFC set to  0.000000
8/27/2012	7:45:42 AM	PH3 MFC set to  0.000000
8/27/2012	7:45:42 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:45:42 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:45:43 AM	Tube furnace set to 0
8/27/2012	7:46:13 AM	Helium valve closed
8/27/2012	7:46:13 AM	H2 valve closed
8/27/2012	7:46:13 AM	BCl3 valve closed
8/27/2012	7:46:13 AM	PH3 valve closed
8/27/2012	7:46:13 AM	SiCl4 pre valve closed
8/27/2012	7:46:13 AM	SiCl4 post valve closed
8/27/2012	7:46:13 AM	Bypass valve closed
8/27/2012	7:46:13 AM	Bubbler valve closed
8/27/2012	7:46:13 AM	Main Vac valve opened
8/27/2012	7:46:13 AM	Helium MFC set to  0.000000
8/27/2012	7:46:13 AM	H2 MFC set to  0.000000
8/27/2012	7:46:13 AM	BCl3 MFC set to  0.000000
8/27/2012	7:46:13 AM	PH3 MFC set to  0.000000
8/27/2012	7:46:13 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:46:13 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:46:13 AM	Tube furnace set to 0
8/27/2012	7:46:43 AM	H2 valve closed
8/27/2012	7:46:43 AM	BCl3 valve closed
8/27/2012	7:46:43 AM	PH3 valve closed
8/27/2012	7:46:43 AM	SiCl4 pre valve closed
8/27/2012	7:46:43 AM	SiCl4 post valve closed
8/27/2012	7:46:43 AM	Bypass valve closed
8/27/2012	7:46:43 AM	Bubbler valve closed
8/27/2012	7:46:43 AM	Helium valve opened
8/27/2012	7:46:43 AM	Main Vac valve opened
8/27/2012	7:46:43 AM	Helium MFC set to  20.000000
8/27/2012	7:46:43 AM	H2 MFC set to  0.000000
8/27/2012	7:46:43 AM	BCl3 MFC set to  0.000000
8/27/2012	7:46:43 AM	PH3 MFC set to  0.000000
8/27/2012	7:46:43 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:46:43 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:46:43 AM	Tube furnace set to 0
8/27/2012	7:47:13 AM	Helium valve closed
8/27/2012	7:47:13 AM	H2 valve closed
8/27/2012	7:47:13 AM	BCl3 valve closed
8/27/2012	7:47:13 AM	PH3 valve closed
8/27/2012	7:47:13 AM	SiCl4 pre valve closed
8/27/2012	7:47:13 AM	SiCl4 post valve closed
8/27/2012	7:47:13 AM	Bypass valve closed
8/27/2012	7:47:13 AM	Bubbler valve closed
8/27/2012	7:47:13 AM	Main Vac valve opened
8/27/2012	7:47:13 AM	Helium MFC set to  0.000000
8/27/2012	7:47:13 AM	H2 MFC set to  0.000000
8/27/2012	7:47:13 AM	BCl3 MFC set to  0.000000
8/27/2012	7:47:13 AM	PH3 MFC set to  0.000000
8/27/2012	7:47:13 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:47:13 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:47:13 AM	Tube furnace set to 0
8/27/2012	7:47:43 AM	H2 valve closed
8/27/2012	7:47:43 AM	BCl3 valve closed
8/27/2012	7:47:43 AM	PH3 valve closed
8/27/2012	7:47:43 AM	SiCl4 pre valve closed
8/27/2012	7:47:43 AM	SiCl4 post valve closed
8/27/2012	7:47:43 AM	Bypass valve closed
8/27/2012	7:47:43 AM	Bubbler valve closed
8/27/2012	7:47:43 AM	Helium valve opened
8/27/2012	7:47:43 AM	Main Vac valve opened
8/27/2012	7:47:43 AM	Helium MFC set to  20.000000
8/27/2012	7:47:43 AM	H2 MFC set to  0.000000
8/27/2012	7:47:43 AM	BCl3 MFC set to  0.000000
8/27/2012	7:47:43 AM	PH3 MFC set to  0.000000
8/27/2012	7:47:43 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:47:43 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:47:44 AM	Tube furnace set to 0
8/27/2012	7:48:14 AM	Helium valve closed
8/27/2012	7:48:14 AM	H2 valve closed
8/27/2012	7:48:14 AM	BCl3 valve closed
8/27/2012	7:48:14 AM	PH3 valve closed
8/27/2012	7:48:14 AM	SiCl4 pre valve closed
8/27/2012	7:48:14 AM	SiCl4 post valve closed
8/27/2012	7:48:14 AM	Bypass valve closed
8/27/2012	7:48:14 AM	Bubbler valve closed
8/27/2012	7:48:14 AM	Main Vac valve opened
8/27/2012	7:48:14 AM	Helium MFC set to  0.000000
8/27/2012	7:48:14 AM	H2 MFC set to  0.000000
8/27/2012	7:48:14 AM	BCl3 MFC set to  0.000000
8/27/2012	7:48:14 AM	PH3 MFC set to  0.000000
8/27/2012	7:48:14 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:48:14 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:48:14 AM	Tube furnace set to 0
8/27/2012	7:48:44 AM	H2 valve closed
8/27/2012	7:48:44 AM	BCl3 valve closed
8/27/2012	7:48:44 AM	PH3 valve closed
8/27/2012	7:48:44 AM	SiCl4 pre valve closed
8/27/2012	7:48:44 AM	SiCl4 post valve closed
8/27/2012	7:48:44 AM	Bypass valve closed
8/27/2012	7:48:44 AM	Bubbler valve closed
8/27/2012	7:48:44 AM	Helium valve opened
8/27/2012	7:48:44 AM	Main Vac valve opened
8/27/2012	7:48:44 AM	Helium MFC set to  20.000000
8/27/2012	7:48:44 AM	H2 MFC set to  0.000000
8/27/2012	7:48:44 AM	BCl3 MFC set to  0.000000
8/27/2012	7:48:44 AM	PH3 MFC set to  0.000000
8/27/2012	7:48:44 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:48:44 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:48:44 AM	Tube furnace set to 0
8/27/2012	7:49:14 AM	Helium valve closed
8/27/2012	7:49:14 AM	H2 valve closed
8/27/2012	7:49:14 AM	BCl3 valve closed
8/27/2012	7:49:14 AM	PH3 valve closed
8/27/2012	7:49:14 AM	SiCl4 pre valve closed
8/27/2012	7:49:14 AM	SiCl4 post valve closed
8/27/2012	7:49:14 AM	Bypass valve closed
8/27/2012	7:49:14 AM	Bubbler valve closed
8/27/2012	7:49:14 AM	Main Vac valve opened
8/27/2012	7:49:14 AM	Helium MFC set to  0.000000
8/27/2012	7:49:14 AM	H2 MFC set to  0.000000
8/27/2012	7:49:14 AM	BCl3 MFC set to  0.000000
8/27/2012	7:49:14 AM	PH3 MFC set to  0.000000
8/27/2012	7:49:14 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:49:14 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:49:14 AM	Tube furnace set to 0
8/27/2012	7:49:44 AM	H2 valve closed
8/27/2012	7:49:44 AM	BCl3 valve closed
8/27/2012	7:49:44 AM	PH3 valve closed
8/27/2012	7:49:44 AM	SiCl4 pre valve closed
8/27/2012	7:49:44 AM	SiCl4 post valve closed
8/27/2012	7:49:44 AM	Bypass valve closed
8/27/2012	7:49:44 AM	Bubbler valve closed
8/27/2012	7:49:44 AM	Helium valve opened
8/27/2012	7:49:44 AM	Main Vac valve opened
8/27/2012	7:49:44 AM	Helium MFC set to  20.000000
8/27/2012	7:49:44 AM	H2 MFC set to  0.000000
8/27/2012	7:49:44 AM	BCl3 MFC set to  0.000000
8/27/2012	7:49:44 AM	PH3 MFC set to  0.000000
8/27/2012	7:49:44 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:49:44 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:49:45 AM	Tube furnace set to 0
8/27/2012	7:50:15 AM	Helium valve closed
8/27/2012	7:50:15 AM	H2 valve closed
8/27/2012	7:50:15 AM	BCl3 valve closed
8/27/2012	7:50:15 AM	PH3 valve closed
8/27/2012	7:50:15 AM	SiCl4 pre valve closed
8/27/2012	7:50:15 AM	SiCl4 post valve closed
8/27/2012	7:50:15 AM	Bypass valve closed
8/27/2012	7:50:15 AM	Bubbler valve closed
8/27/2012	7:50:15 AM	Main Vac valve opened
8/27/2012	7:50:15 AM	Helium MFC set to  0.000000
8/27/2012	7:50:15 AM	H2 MFC set to  0.000000
8/27/2012	7:50:15 AM	BCl3 MFC set to  0.000000
8/27/2012	7:50:15 AM	PH3 MFC set to  0.000000
8/27/2012	7:50:15 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:50:15 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:50:15 AM	Tube furnace set to 0
8/27/2012	7:50:45 AM	H2 valve closed
8/27/2012	7:50:45 AM	BCl3 valve closed
8/27/2012	7:50:45 AM	PH3 valve closed
8/27/2012	7:50:45 AM	SiCl4 pre valve closed
8/27/2012	7:50:45 AM	SiCl4 post valve closed
8/27/2012	7:50:45 AM	Bypass valve closed
8/27/2012	7:50:45 AM	Bubbler valve closed
8/27/2012	7:50:45 AM	Helium valve opened
8/27/2012	7:50:45 AM	Main Vac valve opened
8/27/2012	7:50:45 AM	Helium MFC set to  20.000000
8/27/2012	7:50:45 AM	H2 MFC set to  0.000000
8/27/2012	7:50:45 AM	BCl3 MFC set to  0.000000
8/27/2012	7:50:45 AM	PH3 MFC set to  0.000000
8/27/2012	7:50:45 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:50:45 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:50:45 AM	Tube furnace set to 0
8/27/2012	7:51:15 AM	Helium valve closed
8/27/2012	7:51:15 AM	H2 valve closed
8/27/2012	7:51:15 AM	BCl3 valve closed
8/27/2012	7:51:15 AM	PH3 valve closed
8/27/2012	7:51:15 AM	SiCl4 pre valve closed
8/27/2012	7:51:15 AM	SiCl4 post valve closed
8/27/2012	7:51:15 AM	Bypass valve closed
8/27/2012	7:51:15 AM	Bubbler valve closed
8/27/2012	7:51:15 AM	Main Vac valve opened
8/27/2012	7:51:15 AM	Helium MFC set to  0.000000
8/27/2012	7:51:15 AM	H2 MFC set to  0.000000
8/27/2012	7:51:15 AM	BCl3 MFC set to  0.000000
8/27/2012	7:51:15 AM	PH3 MFC set to  0.000000
8/27/2012	7:51:15 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:51:15 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:51:15 AM	Tube furnace set to 0
8/27/2012	7:51:45 AM	H2 valve closed
8/27/2012	7:51:45 AM	BCl3 valve closed
8/27/2012	7:51:45 AM	PH3 valve closed
8/27/2012	7:51:45 AM	SiCl4 pre valve closed
8/27/2012	7:51:45 AM	SiCl4 post valve closed
8/27/2012	7:51:45 AM	Bypass valve closed
8/27/2012	7:51:45 AM	Bubbler valve closed
8/27/2012	7:51:45 AM	Helium valve opened
8/27/2012	7:51:45 AM	Main Vac valve opened
8/27/2012	7:51:45 AM	Helium MFC set to  20.000000
8/27/2012	7:51:45 AM	H2 MFC set to  0.000000
8/27/2012	7:51:45 AM	BCl3 MFC set to  0.000000
8/27/2012	7:51:45 AM	PH3 MFC set to  0.000000
8/27/2012	7:51:45 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:51:45 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:51:46 AM	Tube furnace set to 0
8/27/2012	7:52:16 AM	Helium valve closed
8/27/2012	7:52:16 AM	H2 valve closed
8/27/2012	7:52:16 AM	BCl3 valve closed
8/27/2012	7:52:16 AM	PH3 valve closed
8/27/2012	7:52:16 AM	SiCl4 pre valve closed
8/27/2012	7:52:16 AM	SiCl4 post valve closed
8/27/2012	7:52:16 AM	Bypass valve closed
8/27/2012	7:52:16 AM	Bubbler valve closed
8/27/2012	7:52:16 AM	Main Vac valve opened
8/27/2012	7:52:16 AM	Helium MFC set to  0.000000
8/27/2012	7:52:16 AM	H2 MFC set to  0.000000
8/27/2012	7:52:16 AM	BCl3 MFC set to  0.000000
8/27/2012	7:52:16 AM	PH3 MFC set to  0.000000
8/27/2012	7:52:16 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:52:16 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:52:16 AM	Tube furnace set to 0
8/27/2012	7:52:46 AM	H2 valve closed
8/27/2012	7:52:46 AM	BCl3 valve closed
8/27/2012	7:52:46 AM	PH3 valve closed
8/27/2012	7:52:46 AM	SiCl4 pre valve closed
8/27/2012	7:52:46 AM	SiCl4 post valve closed
8/27/2012	7:52:46 AM	Bypass valve closed
8/27/2012	7:52:46 AM	Bubbler valve closed
8/27/2012	7:52:46 AM	Helium valve opened
8/27/2012	7:52:46 AM	Main Vac valve opened
8/27/2012	7:52:46 AM	Helium MFC set to  20.000000
8/27/2012	7:52:46 AM	H2 MFC set to  0.000000
8/27/2012	7:52:46 AM	BCl3 MFC set to  0.000000
8/27/2012	7:52:46 AM	PH3 MFC set to  0.000000
8/27/2012	7:52:46 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:52:46 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:52:46 AM	Tube furnace set to 0
8/27/2012	7:53:16 AM	Helium valve closed
8/27/2012	7:53:16 AM	H2 valve closed
8/27/2012	7:53:16 AM	BCl3 valve closed
8/27/2012	7:53:16 AM	PH3 valve closed
8/27/2012	7:53:16 AM	SiCl4 pre valve closed
8/27/2012	7:53:16 AM	SiCl4 post valve closed
8/27/2012	7:53:16 AM	Bypass valve closed
8/27/2012	7:53:16 AM	Bubbler valve closed
8/27/2012	7:53:16 AM	Main Vac valve opened
8/27/2012	7:53:16 AM	Helium MFC set to  0.000000
8/27/2012	7:53:16 AM	H2 MFC set to  0.000000
8/27/2012	7:53:16 AM	BCl3 MFC set to  0.000000
8/27/2012	7:53:16 AM	PH3 MFC set to  0.000000
8/27/2012	7:53:16 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:53:16 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:53:16 AM	Tube furnace set to 0
8/27/2012	7:53:46 AM	H2 valve closed
8/27/2012	7:53:46 AM	BCl3 valve closed
8/27/2012	7:53:46 AM	PH3 valve closed
8/27/2012	7:53:46 AM	SiCl4 pre valve closed
8/27/2012	7:53:46 AM	SiCl4 post valve closed
8/27/2012	7:53:46 AM	Bypass valve closed
8/27/2012	7:53:46 AM	Bubbler valve closed
8/27/2012	7:53:46 AM	Helium valve opened
8/27/2012	7:53:46 AM	Main Vac valve opened
8/27/2012	7:53:46 AM	Helium MFC set to  20.000000
8/27/2012	7:53:46 AM	H2 MFC set to  0.000000
8/27/2012	7:53:46 AM	BCl3 MFC set to  0.000000
8/27/2012	7:53:46 AM	PH3 MFC set to  0.000000
8/27/2012	7:53:46 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:53:46 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:53:47 AM	Tube furnace set to 0
8/27/2012	7:54:17 AM	Helium valve closed
8/27/2012	7:54:17 AM	H2 valve closed
8/27/2012	7:54:17 AM	BCl3 valve closed
8/27/2012	7:54:17 AM	PH3 valve closed
8/27/2012	7:54:17 AM	SiCl4 pre valve closed
8/27/2012	7:54:17 AM	SiCl4 post valve closed
8/27/2012	7:54:17 AM	Bypass valve closed
8/27/2012	7:54:17 AM	Bubbler valve closed
8/27/2012	7:54:17 AM	Main Vac valve opened
8/27/2012	7:54:17 AM	Helium MFC set to  0.000000
8/27/2012	7:54:17 AM	H2 MFC set to  0.000000
8/27/2012	7:54:17 AM	BCl3 MFC set to  0.000000
8/27/2012	7:54:17 AM	PH3 MFC set to  0.000000
8/27/2012	7:54:17 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:54:17 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:54:17 AM	Tube furnace set to 0
8/27/2012	7:54:18 AM	Run finished at 7:54 AM
8/27/2012	7:54:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/27/2012	7:55:15 AM	Recipe started at 7:55 AM
8/27/2012	7:55:15 AM	Helium valve closed
8/27/2012	7:55:15 AM	H2 valve closed
8/27/2012	7:55:15 AM	BCl3 valve closed
8/27/2012	7:55:15 AM	PH3 valve closed
8/27/2012	7:55:15 AM	SiCl4 pre valve closed
8/27/2012	7:55:15 AM	SiCl4 post valve closed
8/27/2012	7:55:15 AM	Main Vac valve closed
8/27/2012	7:55:15 AM	Bypass valve closed
8/27/2012	7:55:15 AM	Bubbler valve closed
8/27/2012	7:55:15 AM	Helium MFC set to  0.000000
8/27/2012	7:55:15 AM	H2 MFC set to  0.000000
8/27/2012	7:55:15 AM	BCl3 MFC set to  0.000000
8/27/2012	7:55:15 AM	PH3 MFC set to  0.000000
8/27/2012	7:55:15 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:55:15 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:55:15 AM	Tube furnace set to 0
8/27/2012	7:55:18 AM	Helium valve closed
8/27/2012	7:55:18 AM	BCl3 valve closed
8/27/2012	7:55:18 AM	PH3 valve closed
8/27/2012	7:55:18 AM	SiCl4 pre valve closed
8/27/2012	7:55:18 AM	SiCl4 post valve closed
8/27/2012	7:55:18 AM	Main Vac valve closed
8/27/2012	7:55:18 AM	Bypass valve closed
8/27/2012	7:55:18 AM	Bubbler valve closed
8/27/2012	7:55:18 AM	H2 valve opened
8/27/2012	7:55:18 AM	Helium MFC set to  0.000000
8/27/2012	7:55:18 AM	H2 MFC set to  500.000000
8/27/2012	7:55:18 AM	BCl3 MFC set to  0.000000
8/27/2012	7:55:18 AM	PH3 MFC set to  0.000000
8/27/2012	7:55:18 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:55:18 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:55:18 AM	Tube furnace set to 0
8/27/2012	7:56:34 AM	Helium valve closed
8/27/2012	7:56:34 AM	BCl3 valve closed
8/27/2012	7:56:34 AM	PH3 valve closed
8/27/2012	7:56:34 AM	SiCl4 pre valve closed
8/27/2012	7:56:34 AM	SiCl4 post valve closed
8/27/2012	7:56:34 AM	Main Vac valve closed
8/27/2012	7:56:34 AM	Bypass valve closed
8/27/2012	7:56:34 AM	H2 valve opened
8/27/2012	7:56:34 AM	Bubbler valve opened
8/27/2012	7:56:34 AM	Helium MFC set to  0.000000
8/27/2012	7:56:34 AM	H2 MFC set to  500.000000
8/27/2012	7:56:34 AM	BCl3 MFC set to  0.000000
8/27/2012	7:56:34 AM	PH3 MFC set to  0.000000
8/27/2012	7:56:34 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:56:34 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:56:35 AM	Tube furnace set to 0
8/27/2012	7:56:36 AM	Helium valve closed
8/27/2012	7:56:36 AM	BCl3 valve closed
8/27/2012	7:56:36 AM	PH3 valve closed
8/27/2012	7:56:36 AM	SiCl4 pre valve closed
8/27/2012	7:56:36 AM	SiCl4 post valve closed
8/27/2012	7:56:36 AM	Main Vac valve closed
8/27/2012	7:56:36 AM	Bypass valve closed
8/27/2012	7:56:36 AM	H2 valve opened
8/27/2012	7:56:36 AM	Bubbler valve opened
8/27/2012	7:56:36 AM	Helium MFC set to  0.000000
8/27/2012	7:56:36 AM	H2 MFC set to  450.000000
8/27/2012	7:56:36 AM	BCl3 MFC set to  0.000000
8/27/2012	7:56:36 AM	PH3 MFC set to  0.000000
8/27/2012	7:56:36 AM	SiCl4 MFC set to  0.000000
8/27/2012	7:56:36 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:56:36 AM	Tube furnace set to 1000
8/27/2012	8:21:36 AM	Helium valve closed
8/27/2012	8:21:36 AM	PH3 valve closed
8/27/2012	8:21:36 AM	Main Vac valve closed
8/27/2012	8:21:36 AM	Bypass valve closed
8/27/2012	8:21:36 AM	H2 valve opened
8/27/2012	8:21:36 AM	BCl3 valve opened
8/27/2012	8:21:36 AM	SiCl4 pre valve opened
8/27/2012	8:21:36 AM	SiCl4 post valve opened
8/27/2012	8:21:36 AM	Bubbler valve opened
8/27/2012	8:21:36 AM	Helium MFC set to  0.000000
8/27/2012	8:21:36 AM	H2 MFC set to  450.000000
8/27/2012	8:21:36 AM	BCl3 MFC set to  1.500000
8/27/2012	8:21:36 AM	PH3 MFC set to  0.000000
8/27/2012	8:21:36 AM	SiCl4 MFC set to  50.000000
8/27/2012	8:21:36 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:21:36 AM	Tube furnace set to 1000
8/27/2012	8:26:36 AM	Helium valve closed
8/27/2012	8:26:36 AM	BCl3 valve closed
8/27/2012	8:26:36 AM	PH3 valve closed
8/27/2012	8:26:36 AM	SiCl4 pre valve closed
8/27/2012	8:26:36 AM	SiCl4 post valve closed
8/27/2012	8:26:36 AM	Main Vac valve closed
8/27/2012	8:26:36 AM	Bypass valve closed
8/27/2012	8:26:36 AM	H2 valve opened
8/27/2012	8:26:36 AM	Bubbler valve opened
8/27/2012	8:26:36 AM	Helium MFC set to  0.000000
8/27/2012	8:26:36 AM	H2 MFC set to  500.000000
8/27/2012	8:26:36 AM	BCl3 MFC set to  0.000000
8/27/2012	8:26:36 AM	PH3 MFC set to  0.000000
8/27/2012	8:26:36 AM	SiCl4 MFC set to  0.000000
8/27/2012	8:26:36 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:26:36 AM	Tube furnace set to 750
8/27/2012	8:31:36 AM	H2 valve closed
8/27/2012	8:31:36 AM	BCl3 valve closed
8/27/2012	8:31:36 AM	PH3 valve closed
8/27/2012	8:31:36 AM	SiCl4 pre valve closed
8/27/2012	8:31:36 AM	SiCl4 post valve closed
8/27/2012	8:31:36 AM	Main Vac valve closed
8/27/2012	8:31:36 AM	Bypass valve closed
8/27/2012	8:31:36 AM	Helium valve opened
8/27/2012	8:31:36 AM	Bubbler valve opened
8/27/2012	8:31:36 AM	Helium MFC set to  500.000000
8/27/2012	8:31:36 AM	H2 MFC set to  0.000000
8/27/2012	8:31:36 AM	BCl3 MFC set to  0.000000
8/27/2012	8:31:36 AM	PH3 MFC set to  0.000000
8/27/2012	8:31:36 AM	SiCl4 MFC set to  0.000000
8/27/2012	8:31:36 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:31:37 AM	Tube furnace set to 0
8/27/2012	8:51:37 AM	Helium valve closed
8/27/2012	8:51:37 AM	H2 valve closed
8/27/2012	8:51:37 AM	BCl3 valve closed
8/27/2012	8:51:37 AM	PH3 valve closed
8/27/2012	8:51:37 AM	SiCl4 pre valve closed
8/27/2012	8:51:37 AM	SiCl4 post valve closed
8/27/2012	8:51:37 AM	Main Vac valve closed
8/27/2012	8:51:37 AM	Bypass valve closed
8/27/2012	8:51:37 AM	Bubbler valve closed
8/27/2012	8:51:37 AM	Helium MFC set to  0.000000
8/27/2012	8:51:37 AM	H2 MFC set to  0.000000
8/27/2012	8:51:37 AM	BCl3 MFC set to  0.000000
8/27/2012	8:51:37 AM	PH3 MFC set to  0.000000
8/27/2012	8:51:37 AM	SiCl4 MFC set to  0.000000
8/27/2012	8:51:37 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:51:37 AM	Tube furnace set to 0
8/27/2012	8:51:38 AM	Run finished at 8:51 AM
8/27/2012	9:23:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	9:23:20 AM	Recipe started at 9:23 AM
8/27/2012	9:23:20 AM	Helium valve closed
8/27/2012	9:23:20 AM	H2 valve closed
8/27/2012	9:23:20 AM	BCl3 valve closed
8/27/2012	9:23:20 AM	PH3 valve closed
8/27/2012	9:23:20 AM	SiCl4 pre valve closed
8/27/2012	9:23:20 AM	SiCl4 post valve closed
8/27/2012	9:23:20 AM	Main Vac valve closed
8/27/2012	9:23:20 AM	Bypass valve closed
8/27/2012	9:23:20 AM	Bubbler valve closed
8/27/2012	9:23:20 AM	Helium MFC set to  0.000000
8/27/2012	9:23:20 AM	H2 MFC set to  0.000000
8/27/2012	9:23:20 AM	BCl3 MFC set to  0.000000
8/27/2012	9:23:20 AM	PH3 MFC set to  0.000000
8/27/2012	9:23:20 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:23:20 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:23:20 AM	Tube furnace set to 0
8/27/2012	9:23:23 AM	H2 valve closed
8/27/2012	9:23:23 AM	BCl3 valve closed
8/27/2012	9:23:23 AM	PH3 valve closed
8/27/2012	9:23:23 AM	SiCl4 pre valve closed
8/27/2012	9:23:23 AM	SiCl4 post valve closed
8/27/2012	9:23:23 AM	Main Vac valve closed
8/27/2012	9:23:23 AM	Bypass valve closed
8/27/2012	9:23:23 AM	Bubbler valve closed
8/27/2012	9:23:23 AM	Helium valve opened
8/27/2012	9:23:23 AM	Helium MFC set to  500.000000
8/27/2012	9:23:23 AM	H2 MFC set to  0.000000
8/27/2012	9:23:23 AM	BCl3 MFC set to  0.000000
8/27/2012	9:23:23 AM	PH3 MFC set to  0.000000
8/27/2012	9:23:23 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:23:23 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:23:23 AM	Tube furnace set to 0
8/27/2012	9:23:24 AM	Helium valve closed
8/27/2012	9:23:24 AM	H2 valve closed
8/27/2012	9:23:24 AM	BCl3 valve closed
8/27/2012	9:23:24 AM	PH3 valve closed
8/27/2012	9:23:24 AM	SiCl4 pre valve closed
8/27/2012	9:23:24 AM	SiCl4 post valve closed
8/27/2012	9:23:24 AM	Main Vac valve closed
8/27/2012	9:23:24 AM	Bypass valve closed
8/27/2012	9:23:24 AM	Bubbler valve closed
8/27/2012	9:23:24 AM	Helium MFC set to  0.000000
8/27/2012	9:23:24 AM	H2 MFC set to  0.000000
8/27/2012	9:23:24 AM	BCl3 MFC set to  0.000000
8/27/2012	9:23:24 AM	PH3 MFC set to  0.000000
8/27/2012	9:23:24 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:23:24 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:23:25 AM	Tube furnace set to 0
8/27/2012	9:23:26 AM	Run finished at 9:23 AM
8/27/2012	9:23:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	9:28:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	9:28:57 AM	Recipe started at 9:28 AM
8/27/2012	9:28:57 AM	Helium valve closed
8/27/2012	9:28:57 AM	H2 valve closed
8/27/2012	9:28:57 AM	BCl3 valve closed
8/27/2012	9:28:57 AM	PH3 valve closed
8/27/2012	9:28:57 AM	SiCl4 pre valve closed
8/27/2012	9:28:57 AM	SiCl4 post valve closed
8/27/2012	9:28:57 AM	Main Vac valve closed
8/27/2012	9:28:57 AM	Bubbler valve closed
8/27/2012	9:28:57 AM	Bypass valve opened
8/27/2012	9:28:57 AM	Helium MFC set to  0.000000
8/27/2012	9:28:57 AM	H2 MFC set to  0.000000
8/27/2012	9:28:57 AM	BCl3 MFC set to  0.000000
8/27/2012	9:28:57 AM	PH3 MFC set to  0.000000
8/27/2012	9:28:57 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:28:57 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:28:57 AM	Tube furnace set to 0
8/27/2012	9:30:10 AM	Helium valve closed
8/27/2012	9:30:10 AM	H2 valve closed
8/27/2012	9:30:10 AM	BCl3 valve closed
8/27/2012	9:30:10 AM	PH3 valve closed
8/27/2012	9:30:10 AM	SiCl4 pre valve closed
8/27/2012	9:30:10 AM	SiCl4 post valve closed
8/27/2012	9:30:10 AM	Main Vac valve closed
8/27/2012	9:30:10 AM	Bubbler valve closed
8/27/2012	9:30:10 AM	Bypass valve opened
8/27/2012	9:30:10 AM	Helium MFC set to  0.000000
8/27/2012	9:30:10 AM	H2 MFC set to  0.000000
8/27/2012	9:30:10 AM	BCl3 MFC set to  0.000000
8/27/2012	9:30:10 AM	PH3 MFC set to  0.000000
8/27/2012	9:30:10 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:30:10 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:30:10 AM	Tube furnace set to 0
8/27/2012	9:31:10 AM	Helium valve closed
8/27/2012	9:31:10 AM	H2 valve closed
8/27/2012	9:31:10 AM	BCl3 valve closed
8/27/2012	9:31:10 AM	PH3 valve closed
8/27/2012	9:31:10 AM	SiCl4 pre valve closed
8/27/2012	9:31:10 AM	SiCl4 post valve closed
8/27/2012	9:31:10 AM	Bypass valve closed
8/27/2012	9:31:10 AM	Bubbler valve closed
8/27/2012	9:31:10 AM	Main Vac valve opened
8/27/2012	9:31:10 AM	Helium MFC set to  0.000000
8/27/2012	9:31:10 AM	H2 MFC set to  0.000000
8/27/2012	9:31:10 AM	BCl3 MFC set to  0.000000
8/27/2012	9:31:10 AM	PH3 MFC set to  0.000000
8/27/2012	9:31:10 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:31:10 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:31:11 AM	Tube furnace set to 0
8/27/2012	9:31:12 AM	Run finished at 9:31 AM
8/27/2012	9:31:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	9:47:10 AM	Recipe started at 9:47 AM
8/27/2012	9:47:10 AM	Helium valve closed
8/27/2012	9:47:11 AM	H2 valve closed
8/27/2012	9:47:11 AM	BCl3 valve closed
8/27/2012	9:47:11 AM	PH3 valve closed
8/27/2012	9:47:11 AM	SiCl4 pre valve closed
8/27/2012	9:47:11 AM	SiCl4 post valve closed
8/27/2012	9:47:11 AM	Bypass valve closed
8/27/2012	9:47:11 AM	Bubbler valve closed
8/27/2012	9:47:11 AM	Main Vac valve opened
8/27/2012	9:47:11 AM	Helium MFC set to  0.000000
8/27/2012	9:47:11 AM	H2 MFC set to  0.000000
8/27/2012	9:47:11 AM	BCl3 MFC set to  0.000000
8/27/2012	9:47:11 AM	PH3 MFC set to  0.000000
8/27/2012	9:47:11 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:47:11 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:47:11 AM	Tube furnace set to 150
8/27/2012	9:47:41 AM	H2 valve closed
8/27/2012	9:47:41 AM	BCl3 valve closed
8/27/2012	9:47:41 AM	PH3 valve closed
8/27/2012	9:47:41 AM	SiCl4 pre valve closed
8/27/2012	9:47:41 AM	SiCl4 post valve closed
8/27/2012	9:47:41 AM	Bypass valve closed
8/27/2012	9:47:41 AM	Bubbler valve closed
8/27/2012	9:47:41 AM	Helium valve opened
8/27/2012	9:47:41 AM	Main Vac valve opened
8/27/2012	9:47:41 AM	Helium MFC set to  20.000000
8/27/2012	9:47:41 AM	H2 MFC set to  0.000000
8/27/2012	9:47:41 AM	BCl3 MFC set to  0.000000
8/27/2012	9:47:41 AM	PH3 MFC set to  0.000000
8/27/2012	9:47:41 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:47:41 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:47:41 AM	Tube furnace set to 150
8/27/2012	9:48:11 AM	Helium valve closed
8/27/2012	9:48:11 AM	H2 valve closed
8/27/2012	9:48:11 AM	BCl3 valve closed
8/27/2012	9:48:11 AM	PH3 valve closed
8/27/2012	9:48:11 AM	SiCl4 pre valve closed
8/27/2012	9:48:11 AM	SiCl4 post valve closed
8/27/2012	9:48:11 AM	Bypass valve closed
8/27/2012	9:48:11 AM	Bubbler valve closed
8/27/2012	9:48:11 AM	Main Vac valve opened
8/27/2012	9:48:11 AM	Helium MFC set to  0.000000
8/27/2012	9:48:11 AM	H2 MFC set to  0.000000
8/27/2012	9:48:11 AM	BCl3 MFC set to  0.000000
8/27/2012	9:48:11 AM	PH3 MFC set to  0.000000
8/27/2012	9:48:11 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:48:11 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:48:11 AM	Tube furnace set to 150
8/27/2012	9:48:41 AM	H2 valve closed
8/27/2012	9:48:41 AM	BCl3 valve closed
8/27/2012	9:48:41 AM	PH3 valve closed
8/27/2012	9:48:41 AM	SiCl4 pre valve closed
8/27/2012	9:48:41 AM	SiCl4 post valve closed
8/27/2012	9:48:41 AM	Bypass valve closed
8/27/2012	9:48:41 AM	Bubbler valve closed
8/27/2012	9:48:41 AM	Helium valve opened
8/27/2012	9:48:41 AM	Main Vac valve opened
8/27/2012	9:48:41 AM	Helium MFC set to  20.000000
8/27/2012	9:48:41 AM	H2 MFC set to  0.000000
8/27/2012	9:48:41 AM	BCl3 MFC set to  0.000000
8/27/2012	9:48:41 AM	PH3 MFC set to  0.000000
8/27/2012	9:48:41 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:48:41 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:48:41 AM	Tube furnace set to 150
8/27/2012	9:49:12 AM	Helium valve closed
8/27/2012	9:49:12 AM	H2 valve closed
8/27/2012	9:49:12 AM	BCl3 valve closed
8/27/2012	9:49:12 AM	PH3 valve closed
8/27/2012	9:49:12 AM	SiCl4 pre valve closed
8/27/2012	9:49:12 AM	SiCl4 post valve closed
8/27/2012	9:49:12 AM	Bypass valve closed
8/27/2012	9:49:12 AM	Bubbler valve closed
8/27/2012	9:49:12 AM	Main Vac valve opened
8/27/2012	9:49:12 AM	Helium MFC set to  0.000000
8/27/2012	9:49:12 AM	H2 MFC set to  0.000000
8/27/2012	9:49:12 AM	BCl3 MFC set to  0.000000
8/27/2012	9:49:12 AM	PH3 MFC set to  0.000000
8/27/2012	9:49:12 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:49:12 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:49:12 AM	Tube furnace set to 150
8/27/2012	9:49:42 AM	H2 valve closed
8/27/2012	9:49:42 AM	BCl3 valve closed
8/27/2012	9:49:42 AM	PH3 valve closed
8/27/2012	9:49:42 AM	SiCl4 pre valve closed
8/27/2012	9:49:42 AM	SiCl4 post valve closed
8/27/2012	9:49:42 AM	Bypass valve closed
8/27/2012	9:49:42 AM	Bubbler valve closed
8/27/2012	9:49:42 AM	Helium valve opened
8/27/2012	9:49:42 AM	Main Vac valve opened
8/27/2012	9:49:42 AM	Helium MFC set to  20.000000
8/27/2012	9:49:42 AM	H2 MFC set to  0.000000
8/27/2012	9:49:42 AM	BCl3 MFC set to  0.000000
8/27/2012	9:49:42 AM	PH3 MFC set to  0.000000
8/27/2012	9:49:42 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:49:42 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:49:42 AM	Tube furnace set to 150
8/27/2012	9:50:12 AM	Helium valve closed
8/27/2012	9:50:12 AM	H2 valve closed
8/27/2012	9:50:12 AM	BCl3 valve closed
8/27/2012	9:50:12 AM	PH3 valve closed
8/27/2012	9:50:12 AM	SiCl4 pre valve closed
8/27/2012	9:50:12 AM	SiCl4 post valve closed
8/27/2012	9:50:12 AM	Bypass valve closed
8/27/2012	9:50:12 AM	Bubbler valve closed
8/27/2012	9:50:12 AM	Main Vac valve opened
8/27/2012	9:50:12 AM	Helium MFC set to  0.000000
8/27/2012	9:50:12 AM	H2 MFC set to  0.000000
8/27/2012	9:50:12 AM	BCl3 MFC set to  0.000000
8/27/2012	9:50:12 AM	PH3 MFC set to  0.000000
8/27/2012	9:50:12 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:50:12 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:50:12 AM	Tube furnace set to 150
8/27/2012	9:50:42 AM	H2 valve closed
8/27/2012	9:50:42 AM	BCl3 valve closed
8/27/2012	9:50:42 AM	PH3 valve closed
8/27/2012	9:50:42 AM	SiCl4 pre valve closed
8/27/2012	9:50:42 AM	SiCl4 post valve closed
8/27/2012	9:50:42 AM	Bypass valve closed
8/27/2012	9:50:42 AM	Bubbler valve closed
8/27/2012	9:50:42 AM	Helium valve opened
8/27/2012	9:50:42 AM	Main Vac valve opened
8/27/2012	9:50:42 AM	Helium MFC set to  20.000000
8/27/2012	9:50:42 AM	H2 MFC set to  0.000000
8/27/2012	9:50:42 AM	BCl3 MFC set to  0.000000
8/27/2012	9:50:42 AM	PH3 MFC set to  0.000000
8/27/2012	9:50:42 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:50:42 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:50:42 AM	Tube furnace set to 150
8/27/2012	9:51:12 AM	Helium valve closed
8/27/2012	9:51:12 AM	H2 valve closed
8/27/2012	9:51:12 AM	BCl3 valve closed
8/27/2012	9:51:13 AM	PH3 valve closed
8/27/2012	9:51:13 AM	SiCl4 pre valve closed
8/27/2012	9:51:13 AM	SiCl4 post valve closed
8/27/2012	9:51:13 AM	Bypass valve closed
8/27/2012	9:51:13 AM	Bubbler valve closed
8/27/2012	9:51:13 AM	Main Vac valve opened
8/27/2012	9:51:13 AM	Helium MFC set to  0.000000
8/27/2012	9:51:13 AM	H2 MFC set to  0.000000
8/27/2012	9:51:13 AM	BCl3 MFC set to  0.000000
8/27/2012	9:51:13 AM	PH3 MFC set to  0.000000
8/27/2012	9:51:13 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:51:13 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:51:13 AM	Tube furnace set to 150
8/27/2012	9:51:43 AM	H2 valve closed
8/27/2012	9:51:43 AM	BCl3 valve closed
8/27/2012	9:51:43 AM	PH3 valve closed
8/27/2012	9:51:43 AM	SiCl4 pre valve closed
8/27/2012	9:51:43 AM	SiCl4 post valve closed
8/27/2012	9:51:43 AM	Bypass valve closed
8/27/2012	9:51:43 AM	Bubbler valve closed
8/27/2012	9:51:43 AM	Helium valve opened
8/27/2012	9:51:43 AM	Main Vac valve opened
8/27/2012	9:51:43 AM	Helium MFC set to  20.000000
8/27/2012	9:51:43 AM	H2 MFC set to  0.000000
8/27/2012	9:51:43 AM	BCl3 MFC set to  0.000000
8/27/2012	9:51:43 AM	PH3 MFC set to  0.000000
8/27/2012	9:51:43 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:51:43 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:51:43 AM	Tube furnace set to 150
8/27/2012	9:52:13 AM	Helium valve closed
8/27/2012	9:52:13 AM	H2 valve closed
8/27/2012	9:52:13 AM	BCl3 valve closed
8/27/2012	9:52:13 AM	PH3 valve closed
8/27/2012	9:52:13 AM	SiCl4 pre valve closed
8/27/2012	9:52:13 AM	SiCl4 post valve closed
8/27/2012	9:52:13 AM	Bypass valve closed
8/27/2012	9:52:13 AM	Bubbler valve closed
8/27/2012	9:52:13 AM	Main Vac valve opened
8/27/2012	9:52:13 AM	Helium MFC set to  0.000000
8/27/2012	9:52:13 AM	H2 MFC set to  0.000000
8/27/2012	9:52:13 AM	BCl3 MFC set to  0.000000
8/27/2012	9:52:13 AM	PH3 MFC set to  0.000000
8/27/2012	9:52:13 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:52:13 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:52:13 AM	Tube furnace set to 150
8/27/2012	9:52:43 AM	H2 valve closed
8/27/2012	9:52:43 AM	BCl3 valve closed
8/27/2012	9:52:43 AM	PH3 valve closed
8/27/2012	9:52:43 AM	SiCl4 pre valve closed
8/27/2012	9:52:43 AM	SiCl4 post valve closed
8/27/2012	9:52:43 AM	Bypass valve closed
8/27/2012	9:52:43 AM	Bubbler valve closed
8/27/2012	9:52:43 AM	Helium valve opened
8/27/2012	9:52:43 AM	Main Vac valve opened
8/27/2012	9:52:43 AM	Helium MFC set to  20.000000
8/27/2012	9:52:43 AM	H2 MFC set to  0.000000
8/27/2012	9:52:43 AM	BCl3 MFC set to  0.000000
8/27/2012	9:52:43 AM	PH3 MFC set to  0.000000
8/27/2012	9:52:43 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:52:43 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:52:43 AM	Tube furnace set to 150
8/27/2012	9:53:13 AM	Helium valve closed
8/27/2012	9:53:13 AM	H2 valve closed
8/27/2012	9:53:13 AM	BCl3 valve closed
8/27/2012	9:53:13 AM	PH3 valve closed
8/27/2012	9:53:14 AM	SiCl4 pre valve closed
8/27/2012	9:53:14 AM	SiCl4 post valve closed
8/27/2012	9:53:14 AM	Bypass valve closed
8/27/2012	9:53:14 AM	Bubbler valve closed
8/27/2012	9:53:14 AM	Main Vac valve opened
8/27/2012	9:53:14 AM	Helium MFC set to  0.000000
8/27/2012	9:53:14 AM	H2 MFC set to  0.000000
8/27/2012	9:53:14 AM	BCl3 MFC set to  0.000000
8/27/2012	9:53:14 AM	PH3 MFC set to  0.000000
8/27/2012	9:53:14 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:53:14 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:53:14 AM	Tube furnace set to 150
8/27/2012	9:53:44 AM	H2 valve closed
8/27/2012	9:53:44 AM	BCl3 valve closed
8/27/2012	9:53:44 AM	PH3 valve closed
8/27/2012	9:53:44 AM	SiCl4 pre valve closed
8/27/2012	9:53:44 AM	SiCl4 post valve closed
8/27/2012	9:53:44 AM	Bypass valve closed
8/27/2012	9:53:44 AM	Bubbler valve closed
8/27/2012	9:53:44 AM	Helium valve opened
8/27/2012	9:53:44 AM	Main Vac valve opened
8/27/2012	9:53:44 AM	Helium MFC set to  20.000000
8/27/2012	9:53:44 AM	H2 MFC set to  0.000000
8/27/2012	9:53:44 AM	BCl3 MFC set to  0.000000
8/27/2012	9:53:44 AM	PH3 MFC set to  0.000000
8/27/2012	9:53:44 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:53:44 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:53:44 AM	Tube furnace set to 150
8/27/2012	9:54:14 AM	Helium valve closed
8/27/2012	9:54:14 AM	H2 valve closed
8/27/2012	9:54:14 AM	BCl3 valve closed
8/27/2012	9:54:14 AM	PH3 valve closed
8/27/2012	9:54:14 AM	SiCl4 pre valve closed
8/27/2012	9:54:14 AM	SiCl4 post valve closed
8/27/2012	9:54:14 AM	Bypass valve closed
8/27/2012	9:54:14 AM	Bubbler valve closed
8/27/2012	9:54:14 AM	Main Vac valve opened
8/27/2012	9:54:14 AM	Helium MFC set to  0.000000
8/27/2012	9:54:14 AM	H2 MFC set to  0.000000
8/27/2012	9:54:14 AM	BCl3 MFC set to  0.000000
8/27/2012	9:54:14 AM	PH3 MFC set to  0.000000
8/27/2012	9:54:14 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:54:14 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:54:14 AM	Tube furnace set to 150
8/27/2012	9:54:44 AM	H2 valve closed
8/27/2012	9:54:44 AM	BCl3 valve closed
8/27/2012	9:54:44 AM	PH3 valve closed
8/27/2012	9:54:44 AM	SiCl4 pre valve closed
8/27/2012	9:54:44 AM	SiCl4 post valve closed
8/27/2012	9:54:44 AM	Bypass valve closed
8/27/2012	9:54:44 AM	Bubbler valve closed
8/27/2012	9:54:44 AM	Helium valve opened
8/27/2012	9:54:44 AM	Main Vac valve opened
8/27/2012	9:54:44 AM	Helium MFC set to  20.000000
8/27/2012	9:54:44 AM	H2 MFC set to  0.000000
8/27/2012	9:54:44 AM	BCl3 MFC set to  0.000000
8/27/2012	9:54:44 AM	PH3 MFC set to  0.000000
8/27/2012	9:54:44 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:54:44 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:54:44 AM	Tube furnace set to 150
8/27/2012	9:55:14 AM	Helium valve closed
8/27/2012	9:55:14 AM	H2 valve closed
8/27/2012	9:55:14 AM	BCl3 valve closed
8/27/2012	9:55:14 AM	PH3 valve closed
8/27/2012	9:55:14 AM	SiCl4 pre valve closed
8/27/2012	9:55:14 AM	SiCl4 post valve closed
8/27/2012	9:55:14 AM	Bypass valve closed
8/27/2012	9:55:14 AM	Bubbler valve closed
8/27/2012	9:55:15 AM	Main Vac valve opened
8/27/2012	9:55:15 AM	Helium MFC set to  0.000000
8/27/2012	9:55:15 AM	H2 MFC set to  0.000000
8/27/2012	9:55:15 AM	BCl3 MFC set to  0.000000
8/27/2012	9:55:15 AM	PH3 MFC set to  0.000000
8/27/2012	9:55:15 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:55:15 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:55:15 AM	Tube furnace set to 150
8/27/2012	9:55:45 AM	H2 valve closed
8/27/2012	9:55:45 AM	BCl3 valve closed
8/27/2012	9:55:45 AM	PH3 valve closed
8/27/2012	9:55:45 AM	SiCl4 pre valve closed
8/27/2012	9:55:45 AM	SiCl4 post valve closed
8/27/2012	9:55:45 AM	Bypass valve closed
8/27/2012	9:55:45 AM	Bubbler valve closed
8/27/2012	9:55:45 AM	Helium valve opened
8/27/2012	9:55:45 AM	Main Vac valve opened
8/27/2012	9:55:45 AM	Helium MFC set to  20.000000
8/27/2012	9:55:45 AM	H2 MFC set to  0.000000
8/27/2012	9:55:45 AM	BCl3 MFC set to  0.000000
8/27/2012	9:55:45 AM	PH3 MFC set to  0.000000
8/27/2012	9:55:45 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:55:45 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:55:45 AM	Tube furnace set to 150
8/27/2012	9:56:15 AM	Helium valve closed
8/27/2012	9:56:15 AM	H2 valve closed
8/27/2012	9:56:15 AM	BCl3 valve closed
8/27/2012	9:56:15 AM	PH3 valve closed
8/27/2012	9:56:15 AM	SiCl4 pre valve closed
8/27/2012	9:56:15 AM	SiCl4 post valve closed
8/27/2012	9:56:15 AM	Bypass valve closed
8/27/2012	9:56:15 AM	Bubbler valve closed
8/27/2012	9:56:15 AM	Main Vac valve opened
8/27/2012	9:56:15 AM	Helium MFC set to  0.000000
8/27/2012	9:56:15 AM	H2 MFC set to  0.000000
8/27/2012	9:56:15 AM	BCl3 MFC set to  0.000000
8/27/2012	9:56:15 AM	PH3 MFC set to  0.000000
8/27/2012	9:56:15 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:56:15 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:56:15 AM	Tube furnace set to 150
8/27/2012	9:56:45 AM	H2 valve closed
8/27/2012	9:56:45 AM	BCl3 valve closed
8/27/2012	9:56:45 AM	PH3 valve closed
8/27/2012	9:56:45 AM	SiCl4 pre valve closed
8/27/2012	9:56:45 AM	SiCl4 post valve closed
8/27/2012	9:56:45 AM	Bypass valve closed
8/27/2012	9:56:45 AM	Bubbler valve closed
8/27/2012	9:56:45 AM	Helium valve opened
8/27/2012	9:56:45 AM	Main Vac valve opened
8/27/2012	9:56:45 AM	Helium MFC set to  20.000000
8/27/2012	9:56:45 AM	H2 MFC set to  0.000000
8/27/2012	9:56:45 AM	BCl3 MFC set to  0.000000
8/27/2012	9:56:45 AM	PH3 MFC set to  0.000000
8/27/2012	9:56:45 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:56:45 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:56:45 AM	Tube furnace set to 150
8/27/2012	9:57:15 AM	Helium valve closed
8/27/2012	9:57:15 AM	H2 valve closed
8/27/2012	9:57:15 AM	BCl3 valve closed
8/27/2012	9:57:15 AM	PH3 valve closed
8/27/2012	9:57:15 AM	SiCl4 pre valve closed
8/27/2012	9:57:16 AM	SiCl4 post valve closed
8/27/2012	9:57:16 AM	Bypass valve closed
8/27/2012	9:57:16 AM	Bubbler valve closed
8/27/2012	9:57:16 AM	Main Vac valve opened
8/27/2012	9:57:16 AM	Helium MFC set to  0.000000
8/27/2012	9:57:16 AM	H2 MFC set to  0.000000
8/27/2012	9:57:16 AM	BCl3 MFC set to  0.000000
8/27/2012	9:57:16 AM	PH3 MFC set to  0.000000
8/27/2012	9:57:16 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:57:16 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:57:16 AM	Tube furnace set to 150
8/27/2012	9:57:17 AM	Run finished at 9:57 AM
8/27/2012	9:57:41 AM	Recipe started at 9:57 AM
8/27/2012	9:57:41 AM	Helium valve closed
8/27/2012	9:57:41 AM	H2 valve closed
8/27/2012	9:57:41 AM	BCl3 valve closed
8/27/2012	9:57:41 AM	PH3 valve closed
8/27/2012	9:57:41 AM	SiCl4 pre valve closed
8/27/2012	9:57:41 AM	SiCl4 post valve closed
8/27/2012	9:57:41 AM	Bypass valve closed
8/27/2012	9:57:41 AM	Bubbler valve closed
8/27/2012	9:57:41 AM	Main Vac valve opened
8/27/2012	9:57:41 AM	Helium MFC set to  0.000000
8/27/2012	9:57:41 AM	H2 MFC set to  0.000000
8/27/2012	9:57:41 AM	BCl3 MFC set to  0.000000
8/27/2012	9:57:41 AM	PH3 MFC set to  0.000000
8/27/2012	9:57:41 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:57:41 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:57:41 AM	Tube furnace set to 150
8/27/2012	9:57:52 AM	H2 valve closed
8/27/2012	9:57:52 AM	BCl3 valve closed
8/27/2012	9:57:52 AM	PH3 valve closed
8/27/2012	9:57:52 AM	SiCl4 pre valve closed
8/27/2012	9:57:52 AM	SiCl4 post valve closed
8/27/2012	9:57:52 AM	Bypass valve closed
8/27/2012	9:57:52 AM	Bubbler valve closed
8/27/2012	9:57:52 AM	Helium valve opened
8/27/2012	9:57:52 AM	Main Vac valve opened
8/27/2012	9:57:52 AM	Helium MFC set to  20.000000
8/27/2012	9:57:52 AM	H2 MFC set to  0.000000
8/27/2012	9:57:52 AM	BCl3 MFC set to  0.000000
8/27/2012	9:57:52 AM	PH3 MFC set to  0.000000
8/27/2012	9:57:52 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:57:52 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:57:52 AM	Tube furnace set to 150
8/27/2012	9:58:22 AM	Helium valve closed
8/27/2012	9:58:22 AM	H2 valve closed
8/27/2012	9:58:22 AM	BCl3 valve closed
8/27/2012	9:58:22 AM	PH3 valve closed
8/27/2012	9:58:22 AM	SiCl4 pre valve closed
8/27/2012	9:58:22 AM	SiCl4 post valve closed
8/27/2012	9:58:22 AM	Bypass valve closed
8/27/2012	9:58:22 AM	Bubbler valve closed
8/27/2012	9:58:22 AM	Main Vac valve opened
8/27/2012	9:58:22 AM	Helium MFC set to  0.000000
8/27/2012	9:58:22 AM	H2 MFC set to  0.000000
8/27/2012	9:58:22 AM	BCl3 MFC set to  0.000000
8/27/2012	9:58:22 AM	PH3 MFC set to  0.000000
8/27/2012	9:58:22 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:58:22 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:58:22 AM	Tube furnace set to 150
8/27/2012	9:58:52 AM	H2 valve closed
8/27/2012	9:58:52 AM	BCl3 valve closed
8/27/2012	9:58:52 AM	PH3 valve closed
8/27/2012	9:58:52 AM	SiCl4 pre valve closed
8/27/2012	9:58:52 AM	SiCl4 post valve closed
8/27/2012	9:58:52 AM	Bypass valve closed
8/27/2012	9:58:52 AM	Bubbler valve closed
8/27/2012	9:58:52 AM	Helium valve opened
8/27/2012	9:58:52 AM	Main Vac valve opened
8/27/2012	9:58:52 AM	Helium MFC set to  20.000000
8/27/2012	9:58:53 AM	H2 MFC set to  0.000000
8/27/2012	9:58:53 AM	BCl3 MFC set to  0.000000
8/27/2012	9:58:53 AM	PH3 MFC set to  0.000000
8/27/2012	9:58:53 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:58:53 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:58:53 AM	Tube furnace set to 150
8/27/2012	9:59:23 AM	Helium valve closed
8/27/2012	9:59:23 AM	H2 valve closed
8/27/2012	9:59:23 AM	BCl3 valve closed
8/27/2012	9:59:23 AM	PH3 valve closed
8/27/2012	9:59:23 AM	SiCl4 pre valve closed
8/27/2012	9:59:23 AM	SiCl4 post valve closed
8/27/2012	9:59:23 AM	Bypass valve closed
8/27/2012	9:59:23 AM	Bubbler valve closed
8/27/2012	9:59:23 AM	Main Vac valve opened
8/27/2012	9:59:23 AM	Helium MFC set to  0.000000
8/27/2012	9:59:23 AM	H2 MFC set to  0.000000
8/27/2012	9:59:23 AM	BCl3 MFC set to  0.000000
8/27/2012	9:59:23 AM	PH3 MFC set to  0.000000
8/27/2012	9:59:23 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:59:23 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:59:23 AM	Tube furnace set to 150
8/27/2012	9:59:53 AM	H2 valve closed
8/27/2012	9:59:53 AM	BCl3 valve closed
8/27/2012	9:59:53 AM	PH3 valve closed
8/27/2012	9:59:53 AM	SiCl4 pre valve closed
8/27/2012	9:59:53 AM	SiCl4 post valve closed
8/27/2012	9:59:53 AM	Bypass valve closed
8/27/2012	9:59:53 AM	Bubbler valve closed
8/27/2012	9:59:53 AM	Helium valve opened
8/27/2012	9:59:53 AM	Main Vac valve opened
8/27/2012	9:59:53 AM	Helium MFC set to  20.000000
8/27/2012	9:59:53 AM	H2 MFC set to  0.000000
8/27/2012	9:59:53 AM	BCl3 MFC set to  0.000000
8/27/2012	9:59:53 AM	PH3 MFC set to  0.000000
8/27/2012	9:59:53 AM	SiCl4 MFC set to  0.000000
8/27/2012	9:59:53 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	9:59:53 AM	Tube furnace set to 150
8/27/2012	10:00:23 AM	Helium valve closed
8/27/2012	10:00:23 AM	H2 valve closed
8/27/2012	10:00:23 AM	BCl3 valve closed
8/27/2012	10:00:23 AM	PH3 valve closed
8/27/2012	10:00:23 AM	SiCl4 pre valve closed
8/27/2012	10:00:23 AM	SiCl4 post valve closed
8/27/2012	10:00:23 AM	Bypass valve closed
8/27/2012	10:00:23 AM	Bubbler valve closed
8/27/2012	10:00:23 AM	Main Vac valve opened
8/27/2012	10:00:23 AM	Helium MFC set to  0.000000
8/27/2012	10:00:23 AM	H2 MFC set to  0.000000
8/27/2012	10:00:23 AM	BCl3 MFC set to  0.000000
8/27/2012	10:00:23 AM	PH3 MFC set to  0.000000
8/27/2012	10:00:23 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:00:23 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:00:23 AM	Tube furnace set to 150
8/27/2012	10:00:53 AM	H2 valve closed
8/27/2012	10:00:53 AM	BCl3 valve closed
8/27/2012	10:00:53 AM	PH3 valve closed
8/27/2012	10:00:53 AM	SiCl4 pre valve closed
8/27/2012	10:00:53 AM	SiCl4 post valve closed
8/27/2012	10:00:53 AM	Bypass valve closed
8/27/2012	10:00:53 AM	Bubbler valve closed
8/27/2012	10:00:53 AM	Helium valve opened
8/27/2012	10:00:53 AM	Main Vac valve opened
8/27/2012	10:00:53 AM	Helium MFC set to  20.000000
8/27/2012	10:00:53 AM	H2 MFC set to  0.000000
8/27/2012	10:00:53 AM	BCl3 MFC set to  0.000000
8/27/2012	10:00:53 AM	PH3 MFC set to  0.000000
8/27/2012	10:00:54 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:00:54 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:00:54 AM	Tube furnace set to 150
8/27/2012	10:01:24 AM	Helium valve closed
8/27/2012	10:01:24 AM	H2 valve closed
8/27/2012	10:01:24 AM	BCl3 valve closed
8/27/2012	10:01:24 AM	PH3 valve closed
8/27/2012	10:01:24 AM	SiCl4 pre valve closed
8/27/2012	10:01:24 AM	SiCl4 post valve closed
8/27/2012	10:01:24 AM	Bypass valve closed
8/27/2012	10:01:24 AM	Bubbler valve closed
8/27/2012	10:01:24 AM	Main Vac valve opened
8/27/2012	10:01:24 AM	Helium MFC set to  0.000000
8/27/2012	10:01:24 AM	H2 MFC set to  0.000000
8/27/2012	10:01:24 AM	BCl3 MFC set to  0.000000
8/27/2012	10:01:24 AM	PH3 MFC set to  0.000000
8/27/2012	10:01:24 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:01:24 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:01:24 AM	Tube furnace set to 150
8/27/2012	10:01:54 AM	H2 valve closed
8/27/2012	10:01:54 AM	BCl3 valve closed
8/27/2012	10:01:54 AM	PH3 valve closed
8/27/2012	10:01:54 AM	SiCl4 pre valve closed
8/27/2012	10:01:54 AM	SiCl4 post valve closed
8/27/2012	10:01:54 AM	Bypass valve closed
8/27/2012	10:01:54 AM	Bubbler valve closed
8/27/2012	10:01:54 AM	Helium valve opened
8/27/2012	10:01:54 AM	Main Vac valve opened
8/27/2012	10:01:54 AM	Helium MFC set to  20.000000
8/27/2012	10:01:54 AM	H2 MFC set to  0.000000
8/27/2012	10:01:54 AM	BCl3 MFC set to  0.000000
8/27/2012	10:01:54 AM	PH3 MFC set to  0.000000
8/27/2012	10:01:54 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:01:54 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:01:54 AM	Tube furnace set to 150
8/27/2012	10:02:24 AM	Helium valve closed
8/27/2012	10:02:24 AM	H2 valve closed
8/27/2012	10:02:24 AM	BCl3 valve closed
8/27/2012	10:02:24 AM	PH3 valve closed
8/27/2012	10:02:24 AM	SiCl4 pre valve closed
8/27/2012	10:02:24 AM	SiCl4 post valve closed
8/27/2012	10:02:24 AM	Bypass valve closed
8/27/2012	10:02:24 AM	Bubbler valve closed
8/27/2012	10:02:24 AM	Main Vac valve opened
8/27/2012	10:02:24 AM	Helium MFC set to  0.000000
8/27/2012	10:02:24 AM	H2 MFC set to  0.000000
8/27/2012	10:02:24 AM	BCl3 MFC set to  0.000000
8/27/2012	10:02:24 AM	PH3 MFC set to  0.000000
8/27/2012	10:02:24 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:02:24 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:02:24 AM	Tube furnace set to 150
8/27/2012	10:02:54 AM	H2 valve closed
8/27/2012	10:02:54 AM	BCl3 valve closed
8/27/2012	10:02:54 AM	PH3 valve closed
8/27/2012	10:02:54 AM	SiCl4 pre valve closed
8/27/2012	10:02:54 AM	SiCl4 post valve closed
8/27/2012	10:02:54 AM	Bypass valve closed
8/27/2012	10:02:54 AM	Bubbler valve closed
8/27/2012	10:02:54 AM	Helium valve opened
8/27/2012	10:02:54 AM	Main Vac valve opened
8/27/2012	10:02:54 AM	Helium MFC set to  20.000000
8/27/2012	10:02:54 AM	H2 MFC set to  0.000000
8/27/2012	10:02:54 AM	BCl3 MFC set to  0.000000
8/27/2012	10:02:54 AM	PH3 MFC set to  0.000000
8/27/2012	10:02:54 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:02:54 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:02:55 AM	Tube furnace set to 150
8/27/2012	10:03:25 AM	Helium valve closed
8/27/2012	10:03:25 AM	H2 valve closed
8/27/2012	10:03:25 AM	BCl3 valve closed
8/27/2012	10:03:25 AM	PH3 valve closed
8/27/2012	10:03:25 AM	SiCl4 pre valve closed
8/27/2012	10:03:25 AM	SiCl4 post valve closed
8/27/2012	10:03:25 AM	Bypass valve closed
8/27/2012	10:03:25 AM	Bubbler valve closed
8/27/2012	10:03:25 AM	Main Vac valve opened
8/27/2012	10:03:25 AM	Helium MFC set to  0.000000
8/27/2012	10:03:25 AM	H2 MFC set to  0.000000
8/27/2012	10:03:25 AM	BCl3 MFC set to  0.000000
8/27/2012	10:03:25 AM	PH3 MFC set to  0.000000
8/27/2012	10:03:25 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:03:25 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:03:25 AM	Tube furnace set to 150
8/27/2012	10:03:55 AM	H2 valve closed
8/27/2012	10:03:55 AM	BCl3 valve closed
8/27/2012	10:03:55 AM	PH3 valve closed
8/27/2012	10:03:55 AM	SiCl4 pre valve closed
8/27/2012	10:03:55 AM	SiCl4 post valve closed
8/27/2012	10:03:55 AM	Bypass valve closed
8/27/2012	10:03:55 AM	Bubbler valve closed
8/27/2012	10:03:55 AM	Helium valve opened
8/27/2012	10:03:55 AM	Main Vac valve opened
8/27/2012	10:03:55 AM	Helium MFC set to  20.000000
8/27/2012	10:03:55 AM	H2 MFC set to  0.000000
8/27/2012	10:03:55 AM	BCl3 MFC set to  0.000000
8/27/2012	10:03:55 AM	PH3 MFC set to  0.000000
8/27/2012	10:03:55 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:03:55 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:03:55 AM	Tube furnace set to 150
8/27/2012	10:04:25 AM	Helium valve closed
8/27/2012	10:04:25 AM	H2 valve closed
8/27/2012	10:04:25 AM	BCl3 valve closed
8/27/2012	10:04:25 AM	PH3 valve closed
8/27/2012	10:04:25 AM	SiCl4 pre valve closed
8/27/2012	10:04:25 AM	SiCl4 post valve closed
8/27/2012	10:04:25 AM	Bypass valve closed
8/27/2012	10:04:25 AM	Bubbler valve closed
8/27/2012	10:04:25 AM	Main Vac valve opened
8/27/2012	10:04:25 AM	Helium MFC set to  0.000000
8/27/2012	10:04:25 AM	H2 MFC set to  0.000000
8/27/2012	10:04:25 AM	BCl3 MFC set to  0.000000
8/27/2012	10:04:25 AM	PH3 MFC set to  0.000000
8/27/2012	10:04:25 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:04:25 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:04:25 AM	Tube furnace set to 150
8/27/2012	10:04:55 AM	H2 valve closed
8/27/2012	10:04:55 AM	BCl3 valve closed
8/27/2012	10:04:55 AM	PH3 valve closed
8/27/2012	10:04:55 AM	SiCl4 pre valve closed
8/27/2012	10:04:55 AM	SiCl4 post valve closed
8/27/2012	10:04:55 AM	Bypass valve closed
8/27/2012	10:04:55 AM	Bubbler valve closed
8/27/2012	10:04:55 AM	Helium valve opened
8/27/2012	10:04:55 AM	Main Vac valve opened
8/27/2012	10:04:55 AM	Helium MFC set to  20.000000
8/27/2012	10:04:55 AM	H2 MFC set to  0.000000
8/27/2012	10:04:55 AM	BCl3 MFC set to  0.000000
8/27/2012	10:04:55 AM	PH3 MFC set to  0.000000
8/27/2012	10:04:55 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:04:55 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:04:56 AM	Tube furnace set to 150
8/27/2012	10:05:26 AM	Helium valve closed
8/27/2012	10:05:26 AM	H2 valve closed
8/27/2012	10:05:26 AM	BCl3 valve closed
8/27/2012	10:05:26 AM	PH3 valve closed
8/27/2012	10:05:26 AM	SiCl4 pre valve closed
8/27/2012	10:05:26 AM	SiCl4 post valve closed
8/27/2012	10:05:26 AM	Bypass valve closed
8/27/2012	10:05:26 AM	Bubbler valve closed
8/27/2012	10:05:26 AM	Main Vac valve opened
8/27/2012	10:05:26 AM	Helium MFC set to  0.000000
8/27/2012	10:05:26 AM	H2 MFC set to  0.000000
8/27/2012	10:05:26 AM	BCl3 MFC set to  0.000000
8/27/2012	10:05:26 AM	PH3 MFC set to  0.000000
8/27/2012	10:05:26 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:05:26 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:05:26 AM	Tube furnace set to 150
8/27/2012	10:05:56 AM	H2 valve closed
8/27/2012	10:05:56 AM	BCl3 valve closed
8/27/2012	10:05:56 AM	PH3 valve closed
8/27/2012	10:05:56 AM	SiCl4 pre valve closed
8/27/2012	10:05:56 AM	SiCl4 post valve closed
8/27/2012	10:05:56 AM	Bypass valve closed
8/27/2012	10:05:56 AM	Bubbler valve closed
8/27/2012	10:05:56 AM	Helium valve opened
8/27/2012	10:05:56 AM	Main Vac valve opened
8/27/2012	10:05:56 AM	Helium MFC set to  20.000000
8/27/2012	10:05:56 AM	H2 MFC set to  0.000000
8/27/2012	10:05:56 AM	BCl3 MFC set to  0.000000
8/27/2012	10:05:56 AM	PH3 MFC set to  0.000000
8/27/2012	10:05:56 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:05:56 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:05:56 AM	Tube furnace set to 150
8/27/2012	10:06:26 AM	Helium valve closed
8/27/2012	10:06:26 AM	H2 valve closed
8/27/2012	10:06:26 AM	BCl3 valve closed
8/27/2012	10:06:26 AM	PH3 valve closed
8/27/2012	10:06:26 AM	SiCl4 pre valve closed
8/27/2012	10:06:26 AM	SiCl4 post valve closed
8/27/2012	10:06:26 AM	Bypass valve closed
8/27/2012	10:06:26 AM	Bubbler valve closed
8/27/2012	10:06:26 AM	Main Vac valve opened
8/27/2012	10:06:26 AM	Helium MFC set to  0.000000
8/27/2012	10:06:26 AM	H2 MFC set to  0.000000
8/27/2012	10:06:26 AM	BCl3 MFC set to  0.000000
8/27/2012	10:06:26 AM	PH3 MFC set to  0.000000
8/27/2012	10:06:26 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:06:26 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:06:26 AM	Tube furnace set to 150
8/27/2012	10:06:56 AM	H2 valve closed
8/27/2012	10:06:56 AM	BCl3 valve closed
8/27/2012	10:06:56 AM	PH3 valve closed
8/27/2012	10:06:56 AM	SiCl4 pre valve closed
8/27/2012	10:06:56 AM	SiCl4 post valve closed
8/27/2012	10:06:56 AM	Bypass valve closed
8/27/2012	10:06:56 AM	Bubbler valve closed
8/27/2012	10:06:56 AM	Helium valve opened
8/27/2012	10:06:56 AM	Main Vac valve opened
8/27/2012	10:06:56 AM	Helium MFC set to  20.000000
8/27/2012	10:06:56 AM	H2 MFC set to  0.000000
8/27/2012	10:06:56 AM	BCl3 MFC set to  0.000000
8/27/2012	10:06:56 AM	PH3 MFC set to  0.000000
8/27/2012	10:06:56 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:06:56 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:06:57 AM	Tube furnace set to 150
8/27/2012	10:07:27 AM	Helium valve closed
8/27/2012	10:07:27 AM	H2 valve closed
8/27/2012	10:07:27 AM	BCl3 valve closed
8/27/2012	10:07:27 AM	PH3 valve closed
8/27/2012	10:07:27 AM	SiCl4 pre valve closed
8/27/2012	10:07:27 AM	SiCl4 post valve closed
8/27/2012	10:07:27 AM	Bypass valve closed
8/27/2012	10:07:27 AM	Bubbler valve closed
8/27/2012	10:07:27 AM	Main Vac valve opened
8/27/2012	10:07:27 AM	Helium MFC set to  0.000000
8/27/2012	10:07:27 AM	H2 MFC set to  0.000000
8/27/2012	10:07:27 AM	BCl3 MFC set to  0.000000
8/27/2012	10:07:27 AM	PH3 MFC set to  0.000000
8/27/2012	10:07:27 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:07:27 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:07:27 AM	Tube furnace set to 150
8/27/2012	10:07:28 AM	Run finished at 10:07 AM
8/27/2012	10:08:08 AM	Recipe started at 10:08 AM
8/27/2012	10:08:08 AM	Helium valve closed
8/27/2012	10:08:08 AM	H2 valve closed
8/27/2012	10:08:08 AM	BCl3 valve closed
8/27/2012	10:08:08 AM	PH3 valve closed
8/27/2012	10:08:08 AM	SiCl4 pre valve closed
8/27/2012	10:08:08 AM	SiCl4 post valve closed
8/27/2012	10:08:08 AM	Main Vac valve closed
8/27/2012	10:08:08 AM	Bypass valve closed
8/27/2012	10:08:08 AM	Bubbler valve closed
8/27/2012	10:08:08 AM	Helium MFC set to  0.000000
8/27/2012	10:08:08 AM	H2 MFC set to  0.000000
8/27/2012	10:08:08 AM	BCl3 MFC set to  0.000000
8/27/2012	10:08:08 AM	PH3 MFC set to  0.000000
8/27/2012	10:08:08 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:08:08 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:08:08 AM	Tube furnace set to 0
8/27/2012	10:08:11 AM	Helium valve closed
8/27/2012	10:08:11 AM	BCl3 valve closed
8/27/2012	10:08:11 AM	PH3 valve closed
8/27/2012	10:08:11 AM	SiCl4 pre valve closed
8/27/2012	10:08:11 AM	SiCl4 post valve closed
8/27/2012	10:08:11 AM	Main Vac valve closed
8/27/2012	10:08:11 AM	Bypass valve closed
8/27/2012	10:08:11 AM	Bubbler valve closed
8/27/2012	10:08:11 AM	H2 valve opened
8/27/2012	10:08:11 AM	Helium MFC set to  0.000000
8/27/2012	10:08:11 AM	H2 MFC set to  500.000000
8/27/2012	10:08:11 AM	BCl3 MFC set to  0.000000
8/27/2012	10:08:11 AM	PH3 MFC set to  0.000000
8/27/2012	10:08:11 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:08:11 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:08:11 AM	Tube furnace set to 0
8/27/2012	10:09:22 AM	Helium valve closed
8/27/2012	10:09:22 AM	BCl3 valve closed
8/27/2012	10:09:22 AM	PH3 valve closed
8/27/2012	10:09:22 AM	SiCl4 pre valve closed
8/27/2012	10:09:22 AM	SiCl4 post valve closed
8/27/2012	10:09:22 AM	Main Vac valve closed
8/27/2012	10:09:22 AM	Bypass valve closed
8/27/2012	10:09:22 AM	H2 valve opened
8/27/2012	10:09:22 AM	Bubbler valve opened
8/27/2012	10:09:22 AM	Helium MFC set to  0.000000
8/27/2012	10:09:22 AM	H2 MFC set to  500.000000
8/27/2012	10:09:22 AM	BCl3 MFC set to  0.000000
8/27/2012	10:09:22 AM	PH3 MFC set to  0.000000
8/27/2012	10:09:22 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:09:22 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:09:23 AM	Tube furnace set to 0
8/27/2012	10:09:24 AM	Helium valve closed
8/27/2012	10:09:24 AM	BCl3 valve closed
8/27/2012	10:09:24 AM	PH3 valve closed
8/27/2012	10:09:24 AM	SiCl4 pre valve closed
8/27/2012	10:09:24 AM	SiCl4 post valve closed
8/27/2012	10:09:24 AM	Main Vac valve closed
8/27/2012	10:09:24 AM	Bypass valve closed
8/27/2012	10:09:24 AM	H2 valve opened
8/27/2012	10:09:24 AM	Bubbler valve opened
8/27/2012	10:09:24 AM	Helium MFC set to  0.000000
8/27/2012	10:09:24 AM	H2 MFC set to  450.000000
8/27/2012	10:09:24 AM	BCl3 MFC set to  0.000000
8/27/2012	10:09:24 AM	PH3 MFC set to  0.000000
8/27/2012	10:09:24 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:09:24 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:09:24 AM	Tube furnace set to 1000
8/27/2012	10:34:24 AM	Helium valve closed
8/27/2012	10:34:24 AM	PH3 valve closed
8/27/2012	10:34:24 AM	Main Vac valve closed
8/27/2012	10:34:24 AM	Bypass valve closed
8/27/2012	10:34:24 AM	H2 valve opened
8/27/2012	10:34:24 AM	BCl3 valve opened
8/27/2012	10:34:24 AM	SiCl4 pre valve opened
8/27/2012	10:34:24 AM	SiCl4 post valve opened
8/27/2012	10:34:24 AM	Bubbler valve opened
8/27/2012	10:34:24 AM	Helium MFC set to  0.000000
8/27/2012	10:34:24 AM	H2 MFC set to  450.000000
8/27/2012	10:34:24 AM	BCl3 MFC set to  1.500000
8/27/2012	10:34:24 AM	PH3 MFC set to  0.000000
8/27/2012	10:34:24 AM	SiCl4 MFC set to  50.000000
8/27/2012	10:34:24 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:34:24 AM	Tube furnace set to 1000
8/27/2012	10:39:24 AM	Helium valve closed
8/27/2012	10:39:24 AM	BCl3 valve closed
8/27/2012	10:39:24 AM	PH3 valve closed
8/27/2012	10:39:24 AM	SiCl4 pre valve closed
8/27/2012	10:39:24 AM	SiCl4 post valve closed
8/27/2012	10:39:24 AM	Main Vac valve closed
8/27/2012	10:39:24 AM	Bypass valve closed
8/27/2012	10:39:24 AM	H2 valve opened
8/27/2012	10:39:24 AM	Bubbler valve opened
8/27/2012	10:39:24 AM	Helium MFC set to  0.000000
8/27/2012	10:39:24 AM	H2 MFC set to  500.000000
8/27/2012	10:39:24 AM	BCl3 MFC set to  0.000000
8/27/2012	10:39:24 AM	PH3 MFC set to  0.000000
8/27/2012	10:39:24 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:39:24 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:39:24 AM	Tube furnace set to 750
8/27/2012	10:44:24 AM	H2 valve closed
8/27/2012	10:44:24 AM	BCl3 valve closed
8/27/2012	10:44:24 AM	PH3 valve closed
8/27/2012	10:44:24 AM	SiCl4 pre valve closed
8/27/2012	10:44:25 AM	SiCl4 post valve closed
8/27/2012	10:44:25 AM	Main Vac valve closed
8/27/2012	10:44:25 AM	Bypass valve closed
8/27/2012	10:44:25 AM	Helium valve opened
8/27/2012	10:44:25 AM	Bubbler valve opened
8/27/2012	10:44:25 AM	Helium MFC set to  500.000000
8/27/2012	10:44:25 AM	H2 MFC set to  0.000000
8/27/2012	10:44:25 AM	BCl3 MFC set to  0.000000
8/27/2012	10:44:25 AM	PH3 MFC set to  0.000000
8/27/2012	10:44:25 AM	SiCl4 MFC set to  0.000000
8/27/2012	10:44:25 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	10:44:25 AM	Tube furnace set to 0
8/27/2012	11:04:13 AM	Helium valve closed
8/27/2012	11:04:13 AM	H2 valve closed
8/27/2012	11:04:13 AM	BCl3 valve closed
8/27/2012	11:04:13 AM	PH3 valve closed
8/27/2012	11:04:13 AM	SiCl4 pre valve closed
8/27/2012	11:04:13 AM	SiCl4 post valve closed
8/27/2012	11:04:13 AM	Main Vac valve closed
8/27/2012	11:04:13 AM	Bypass valve closed
8/27/2012	11:04:13 AM	Bubbler valve closed
8/27/2012	11:04:13 AM	Helium MFC set to  0.000000
8/27/2012	11:04:13 AM	H2 MFC set to  0.000000
8/27/2012	11:04:13 AM	BCl3 MFC set to  0.000000
8/27/2012	11:04:13 AM	PH3 MFC set to  0.000000
8/27/2012	11:04:13 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:04:13 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:04:13 AM	Tube furnace set to 0
8/27/2012	11:04:14 AM	Run finished at 11:04 AM
8/27/2012	11:08:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	11:08:24 AM	Recipe started at 11:08 AM
8/27/2012	11:08:24 AM	Helium valve closed
8/27/2012	11:08:24 AM	H2 valve closed
8/27/2012	11:08:24 AM	BCl3 valve closed
8/27/2012	11:08:24 AM	PH3 valve closed
8/27/2012	11:08:24 AM	SiCl4 pre valve closed
8/27/2012	11:08:24 AM	SiCl4 post valve closed
8/27/2012	11:08:24 AM	Main Vac valve closed
8/27/2012	11:08:24 AM	Bypass valve closed
8/27/2012	11:08:24 AM	Bubbler valve closed
8/27/2012	11:08:24 AM	Helium MFC set to  0.000000
8/27/2012	11:08:24 AM	H2 MFC set to  0.000000
8/27/2012	11:08:24 AM	BCl3 MFC set to  0.000000
8/27/2012	11:08:24 AM	PH3 MFC set to  0.000000
8/27/2012	11:08:24 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:08:24 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:08:25 AM	Tube furnace set to 0
8/27/2012	11:08:28 AM	H2 valve closed
8/27/2012	11:08:28 AM	BCl3 valve closed
8/27/2012	11:08:28 AM	PH3 valve closed
8/27/2012	11:08:28 AM	SiCl4 pre valve closed
8/27/2012	11:08:28 AM	SiCl4 post valve closed
8/27/2012	11:08:28 AM	Main Vac valve closed
8/27/2012	11:08:28 AM	Bypass valve closed
8/27/2012	11:08:28 AM	Bubbler valve closed
8/27/2012	11:08:28 AM	Helium valve opened
8/27/2012	11:08:28 AM	Helium MFC set to  500.000000
8/27/2012	11:08:28 AM	H2 MFC set to  0.000000
8/27/2012	11:08:28 AM	BCl3 MFC set to  0.000000
8/27/2012	11:08:28 AM	PH3 MFC set to  0.000000
8/27/2012	11:08:28 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:08:28 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:08:28 AM	Tube furnace set to 0
8/27/2012	11:08:30 AM	Helium valve closed
8/27/2012	11:08:30 AM	H2 valve closed
8/27/2012	11:08:30 AM	BCl3 valve closed
8/27/2012	11:08:30 AM	PH3 valve closed
8/27/2012	11:08:30 AM	SiCl4 pre valve closed
8/27/2012	11:08:30 AM	SiCl4 post valve closed
8/27/2012	11:08:30 AM	Main Vac valve closed
8/27/2012	11:08:30 AM	Bypass valve closed
8/27/2012	11:08:30 AM	Bubbler valve closed
8/27/2012	11:08:30 AM	Helium MFC set to  0.000000
8/27/2012	11:08:30 AM	H2 MFC set to  0.000000
8/27/2012	11:08:30 AM	BCl3 MFC set to  0.000000
8/27/2012	11:08:30 AM	PH3 MFC set to  0.000000
8/27/2012	11:08:30 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:08:30 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:08:30 AM	Tube furnace set to 0
8/27/2012	11:08:31 AM	Run finished at 11:08 AM
8/27/2012	11:08:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	11:11:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	11:11:28 AM	Recipe started at 11:11 AM
8/27/2012	11:11:28 AM	Helium valve closed
8/27/2012	11:11:28 AM	H2 valve closed
8/27/2012	11:11:28 AM	BCl3 valve closed
8/27/2012	11:11:28 AM	PH3 valve closed
8/27/2012	11:11:28 AM	SiCl4 pre valve closed
8/27/2012	11:11:28 AM	SiCl4 post valve closed
8/27/2012	11:11:28 AM	Main Vac valve closed
8/27/2012	11:11:28 AM	Bubbler valve closed
8/27/2012	11:11:28 AM	Bypass valve opened
8/27/2012	11:11:28 AM	Helium MFC set to  0.000000
8/27/2012	11:11:28 AM	H2 MFC set to  0.000000
8/27/2012	11:11:28 AM	BCl3 MFC set to  0.000000
8/27/2012	11:11:28 AM	PH3 MFC set to  0.000000
8/27/2012	11:11:28 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:11:28 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:11:28 AM	Tube furnace set to 0
8/27/2012	11:12:36 AM	Helium valve closed
8/27/2012	11:12:36 AM	H2 valve closed
8/27/2012	11:12:36 AM	BCl3 valve closed
8/27/2012	11:12:36 AM	PH3 valve closed
8/27/2012	11:12:36 AM	SiCl4 pre valve closed
8/27/2012	11:12:36 AM	SiCl4 post valve closed
8/27/2012	11:12:36 AM	Main Vac valve closed
8/27/2012	11:12:36 AM	Bubbler valve closed
8/27/2012	11:12:36 AM	Bypass valve opened
8/27/2012	11:12:36 AM	Helium MFC set to  0.000000
8/27/2012	11:12:36 AM	H2 MFC set to  0.000000
8/27/2012	11:12:36 AM	BCl3 MFC set to  0.000000
8/27/2012	11:12:36 AM	PH3 MFC set to  0.000000
8/27/2012	11:12:36 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:12:36 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:12:36 AM	Tube furnace set to 0
8/27/2012	11:13:36 AM	Helium valve closed
8/27/2012	11:13:36 AM	H2 valve closed
8/27/2012	11:13:36 AM	BCl3 valve closed
8/27/2012	11:13:36 AM	PH3 valve closed
8/27/2012	11:13:36 AM	SiCl4 pre valve closed
8/27/2012	11:13:36 AM	SiCl4 post valve closed
8/27/2012	11:13:36 AM	Bypass valve closed
8/27/2012	11:13:36 AM	Bubbler valve closed
8/27/2012	11:13:36 AM	Main Vac valve opened
8/27/2012	11:13:36 AM	Helium MFC set to  0.000000
8/27/2012	11:13:36 AM	H2 MFC set to  0.000000
8/27/2012	11:13:36 AM	BCl3 MFC set to  0.000000
8/27/2012	11:13:36 AM	PH3 MFC set to  0.000000
8/27/2012	11:13:36 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:13:36 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:13:36 AM	Tube furnace set to 0
8/27/2012	11:13:37 AM	Run finished at 11:13 AM
8/27/2012	11:13:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	11:37:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/27/2012	11:37:17 AM	Recipe started at 11:37 AM
8/27/2012	11:37:17 AM	Helium valve closed
8/27/2012	11:37:17 AM	H2 valve closed
8/27/2012	11:37:17 AM	BCl3 valve closed
8/27/2012	11:37:17 AM	PH3 valve closed
8/27/2012	11:37:17 AM	SiCl4 pre valve closed
8/27/2012	11:37:17 AM	SiCl4 post valve closed
8/27/2012	11:37:17 AM	Main Vac valve closed
8/27/2012	11:37:17 AM	Bubbler valve closed
8/27/2012	11:37:17 AM	Bypass valve opened
8/27/2012	11:37:17 AM	Helium MFC set to  0.000000
8/27/2012	11:37:17 AM	H2 MFC set to  0.000000
8/27/2012	11:37:17 AM	BCl3 MFC set to  0.000000
8/27/2012	11:37:17 AM	PH3 MFC set to  0.000000
8/27/2012	11:37:17 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:37:17 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:37:17 AM	Tube furnace set to 0
8/27/2012	11:37:18 AM	Helium valve closed
8/27/2012	11:37:18 AM	H2 valve closed
8/27/2012	11:37:18 AM	BCl3 valve closed
8/27/2012	11:37:18 AM	PH3 valve closed
8/27/2012	11:37:18 AM	SiCl4 pre valve closed
8/27/2012	11:37:18 AM	SiCl4 post valve closed
8/27/2012	11:37:18 AM	Main Vac valve closed
8/27/2012	11:37:18 AM	Bubbler valve closed
8/27/2012	11:37:18 AM	Bypass valve opened
8/27/2012	11:37:18 AM	Helium MFC set to  0.000000
8/27/2012	11:37:18 AM	H2 MFC set to  0.000000
8/27/2012	11:37:18 AM	BCl3 MFC set to  0.000000
8/27/2012	11:37:18 AM	PH3 MFC set to  0.000000
8/27/2012	11:37:18 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:37:18 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:37:18 AM	Tube furnace set to 0
8/27/2012	11:37:19 AM	Helium valve closed
8/27/2012	11:37:19 AM	H2 valve closed
8/27/2012	11:37:19 AM	BCl3 valve closed
8/27/2012	11:37:19 AM	PH3 valve closed
8/27/2012	11:37:19 AM	SiCl4 pre valve closed
8/27/2012	11:37:19 AM	SiCl4 post valve closed
8/27/2012	11:37:19 AM	Bypass valve closed
8/27/2012	11:37:19 AM	Bubbler valve closed
8/27/2012	11:37:19 AM	Main Vac valve opened
8/27/2012	11:37:19 AM	Helium MFC set to  0.000000
8/27/2012	11:37:19 AM	H2 MFC set to  0.000000
8/27/2012	11:37:19 AM	BCl3 MFC set to  0.000000
8/27/2012	11:37:19 AM	PH3 MFC set to  0.000000
8/27/2012	11:37:19 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:37:19 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:37:19 AM	Tube furnace set to 0
8/27/2012	11:37:49 AM	H2 valve closed
8/27/2012	11:37:49 AM	BCl3 valve closed
8/27/2012	11:37:49 AM	PH3 valve closed
8/27/2012	11:37:49 AM	SiCl4 pre valve closed
8/27/2012	11:37:49 AM	SiCl4 post valve closed
8/27/2012	11:37:49 AM	Bypass valve closed
8/27/2012	11:37:49 AM	Bubbler valve closed
8/27/2012	11:37:49 AM	Helium valve opened
8/27/2012	11:37:49 AM	Main Vac valve opened
8/27/2012	11:37:49 AM	Helium MFC set to  20.000000
8/27/2012	11:37:49 AM	H2 MFC set to  0.000000
8/27/2012	11:37:49 AM	BCl3 MFC set to  0.000000
8/27/2012	11:37:49 AM	PH3 MFC set to  0.000000
8/27/2012	11:37:49 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:37:49 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:37:49 AM	Tube furnace set to 0
8/27/2012	11:38:19 AM	Helium valve closed
8/27/2012	11:38:19 AM	H2 valve closed
8/27/2012	11:38:19 AM	BCl3 valve closed
8/27/2012	11:38:19 AM	PH3 valve closed
8/27/2012	11:38:19 AM	SiCl4 pre valve closed
8/27/2012	11:38:19 AM	SiCl4 post valve closed
8/27/2012	11:38:19 AM	Bypass valve closed
8/27/2012	11:38:19 AM	Bubbler valve closed
8/27/2012	11:38:19 AM	Main Vac valve opened
8/27/2012	11:38:19 AM	Helium MFC set to  0.000000
8/27/2012	11:38:19 AM	H2 MFC set to  0.000000
8/27/2012	11:38:19 AM	BCl3 MFC set to  0.000000
8/27/2012	11:38:19 AM	PH3 MFC set to  0.000000
8/27/2012	11:38:19 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:38:19 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:38:19 AM	Tube furnace set to 0
8/27/2012	11:38:49 AM	H2 valve closed
8/27/2012	11:38:49 AM	BCl3 valve closed
8/27/2012	11:38:49 AM	PH3 valve closed
8/27/2012	11:38:49 AM	SiCl4 pre valve closed
8/27/2012	11:38:49 AM	SiCl4 post valve closed
8/27/2012	11:38:49 AM	Bypass valve closed
8/27/2012	11:38:49 AM	Bubbler valve closed
8/27/2012	11:38:50 AM	Helium valve opened
8/27/2012	11:38:50 AM	Main Vac valve opened
8/27/2012	11:38:50 AM	Helium MFC set to  20.000000
8/27/2012	11:38:50 AM	H2 MFC set to  0.000000
8/27/2012	11:38:50 AM	BCl3 MFC set to  0.000000
8/27/2012	11:38:50 AM	PH3 MFC set to  0.000000
8/27/2012	11:38:50 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:38:50 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:38:50 AM	Tube furnace set to 0
8/27/2012	11:39:20 AM	Helium valve closed
8/27/2012	11:39:20 AM	H2 valve closed
8/27/2012	11:39:20 AM	BCl3 valve closed
8/27/2012	11:39:20 AM	PH3 valve closed
8/27/2012	11:39:20 AM	SiCl4 pre valve closed
8/27/2012	11:39:20 AM	SiCl4 post valve closed
8/27/2012	11:39:20 AM	Bypass valve closed
8/27/2012	11:39:20 AM	Bubbler valve closed
8/27/2012	11:39:20 AM	Main Vac valve opened
8/27/2012	11:39:20 AM	Helium MFC set to  0.000000
8/27/2012	11:39:20 AM	H2 MFC set to  0.000000
8/27/2012	11:39:20 AM	BCl3 MFC set to  0.000000
8/27/2012	11:39:20 AM	PH3 MFC set to  0.000000
8/27/2012	11:39:20 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:39:20 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:39:20 AM	Tube furnace set to 0
8/27/2012	11:39:50 AM	H2 valve closed
8/27/2012	11:39:50 AM	BCl3 valve closed
8/27/2012	11:39:50 AM	PH3 valve closed
8/27/2012	11:39:50 AM	SiCl4 pre valve closed
8/27/2012	11:39:50 AM	SiCl4 post valve closed
8/27/2012	11:39:50 AM	Bypass valve closed
8/27/2012	11:39:50 AM	Bubbler valve closed
8/27/2012	11:39:50 AM	Helium valve opened
8/27/2012	11:39:50 AM	Main Vac valve opened
8/27/2012	11:39:50 AM	Helium MFC set to  20.000000
8/27/2012	11:39:50 AM	H2 MFC set to  0.000000
8/27/2012	11:39:50 AM	BCl3 MFC set to  0.000000
8/27/2012	11:39:50 AM	PH3 MFC set to  0.000000
8/27/2012	11:39:50 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:39:50 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:39:50 AM	Tube furnace set to 0
8/27/2012	11:40:20 AM	Helium valve closed
8/27/2012	11:40:20 AM	H2 valve closed
8/27/2012	11:40:20 AM	BCl3 valve closed
8/27/2012	11:40:20 AM	PH3 valve closed
8/27/2012	11:40:20 AM	SiCl4 pre valve closed
8/27/2012	11:40:20 AM	SiCl4 post valve closed
8/27/2012	11:40:20 AM	Bypass valve closed
8/27/2012	11:40:20 AM	Bubbler valve closed
8/27/2012	11:40:20 AM	Main Vac valve opened
8/27/2012	11:40:20 AM	Helium MFC set to  0.000000
8/27/2012	11:40:20 AM	H2 MFC set to  0.000000
8/27/2012	11:40:20 AM	BCl3 MFC set to  0.000000
8/27/2012	11:40:20 AM	PH3 MFC set to  0.000000
8/27/2012	11:40:20 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:40:20 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:40:20 AM	Tube furnace set to 0
8/27/2012	11:40:50 AM	H2 valve closed
8/27/2012	11:40:50 AM	BCl3 valve closed
8/27/2012	11:40:50 AM	PH3 valve closed
8/27/2012	11:40:50 AM	SiCl4 pre valve closed
8/27/2012	11:40:50 AM	SiCl4 post valve closed
8/27/2012	11:40:50 AM	Bypass valve closed
8/27/2012	11:40:50 AM	Bubbler valve closed
8/27/2012	11:40:51 AM	Helium valve opened
8/27/2012	11:40:51 AM	Main Vac valve opened
8/27/2012	11:40:51 AM	Helium MFC set to  20.000000
8/27/2012	11:40:51 AM	H2 MFC set to  0.000000
8/27/2012	11:40:51 AM	BCl3 MFC set to  0.000000
8/27/2012	11:40:51 AM	PH3 MFC set to  0.000000
8/27/2012	11:40:51 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:40:51 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:40:51 AM	Tube furnace set to 0
8/27/2012	11:41:21 AM	Helium valve closed
8/27/2012	11:41:21 AM	H2 valve closed
8/27/2012	11:41:21 AM	BCl3 valve closed
8/27/2012	11:41:21 AM	PH3 valve closed
8/27/2012	11:41:21 AM	SiCl4 pre valve closed
8/27/2012	11:41:21 AM	SiCl4 post valve closed
8/27/2012	11:41:21 AM	Bypass valve closed
8/27/2012	11:41:21 AM	Bubbler valve closed
8/27/2012	11:41:21 AM	Main Vac valve opened
8/27/2012	11:41:21 AM	Helium MFC set to  0.000000
8/27/2012	11:41:21 AM	H2 MFC set to  0.000000
8/27/2012	11:41:21 AM	BCl3 MFC set to  0.000000
8/27/2012	11:41:21 AM	PH3 MFC set to  0.000000
8/27/2012	11:41:21 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:41:21 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:41:21 AM	Tube furnace set to 0
8/27/2012	11:41:51 AM	H2 valve closed
8/27/2012	11:41:51 AM	BCl3 valve closed
8/27/2012	11:41:51 AM	PH3 valve closed
8/27/2012	11:41:51 AM	SiCl4 pre valve closed
8/27/2012	11:41:51 AM	SiCl4 post valve closed
8/27/2012	11:41:51 AM	Bypass valve closed
8/27/2012	11:41:51 AM	Bubbler valve closed
8/27/2012	11:41:51 AM	Helium valve opened
8/27/2012	11:41:51 AM	Main Vac valve opened
8/27/2012	11:41:51 AM	Helium MFC set to  20.000000
8/27/2012	11:41:51 AM	H2 MFC set to  0.000000
8/27/2012	11:41:51 AM	BCl3 MFC set to  0.000000
8/27/2012	11:41:51 AM	PH3 MFC set to  0.000000
8/27/2012	11:41:51 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:41:51 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:41:51 AM	Tube furnace set to 0
8/27/2012	11:42:21 AM	Helium valve closed
8/27/2012	11:42:21 AM	H2 valve closed
8/27/2012	11:42:21 AM	BCl3 valve closed
8/27/2012	11:42:21 AM	PH3 valve closed
8/27/2012	11:42:21 AM	SiCl4 pre valve closed
8/27/2012	11:42:21 AM	SiCl4 post valve closed
8/27/2012	11:42:21 AM	Bypass valve closed
8/27/2012	11:42:21 AM	Bubbler valve closed
8/27/2012	11:42:21 AM	Main Vac valve opened
8/27/2012	11:42:21 AM	Helium MFC set to  0.000000
8/27/2012	11:42:21 AM	H2 MFC set to  0.000000
8/27/2012	11:42:21 AM	BCl3 MFC set to  0.000000
8/27/2012	11:42:21 AM	PH3 MFC set to  0.000000
8/27/2012	11:42:21 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:42:21 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:42:21 AM	Tube furnace set to 0
8/27/2012	11:42:51 AM	H2 valve closed
8/27/2012	11:42:51 AM	BCl3 valve closed
8/27/2012	11:42:51 AM	PH3 valve closed
8/27/2012	11:42:51 AM	SiCl4 pre valve closed
8/27/2012	11:42:51 AM	SiCl4 post valve closed
8/27/2012	11:42:51 AM	Bypass valve closed
8/27/2012	11:42:51 AM	Bubbler valve closed
8/27/2012	11:42:51 AM	Helium valve opened
8/27/2012	11:42:51 AM	Main Vac valve opened
8/27/2012	11:42:52 AM	Helium MFC set to  20.000000
8/27/2012	11:42:52 AM	H2 MFC set to  0.000000
8/27/2012	11:42:52 AM	BCl3 MFC set to  0.000000
8/27/2012	11:42:52 AM	PH3 MFC set to  0.000000
8/27/2012	11:42:52 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:42:52 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:42:52 AM	Tube furnace set to 0
8/27/2012	11:43:22 AM	Helium valve closed
8/27/2012	11:43:22 AM	H2 valve closed
8/27/2012	11:43:22 AM	BCl3 valve closed
8/27/2012	11:43:22 AM	PH3 valve closed
8/27/2012	11:43:22 AM	SiCl4 pre valve closed
8/27/2012	11:43:22 AM	SiCl4 post valve closed
8/27/2012	11:43:22 AM	Bypass valve closed
8/27/2012	11:43:22 AM	Bubbler valve closed
8/27/2012	11:43:22 AM	Main Vac valve opened
8/27/2012	11:43:22 AM	Helium MFC set to  0.000000
8/27/2012	11:43:22 AM	H2 MFC set to  0.000000
8/27/2012	11:43:22 AM	BCl3 MFC set to  0.000000
8/27/2012	11:43:22 AM	PH3 MFC set to  0.000000
8/27/2012	11:43:22 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:43:22 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:43:22 AM	Tube furnace set to 0
8/27/2012	11:43:52 AM	H2 valve closed
8/27/2012	11:43:52 AM	BCl3 valve closed
8/27/2012	11:43:52 AM	PH3 valve closed
8/27/2012	11:43:52 AM	SiCl4 pre valve closed
8/27/2012	11:43:52 AM	SiCl4 post valve closed
8/27/2012	11:43:52 AM	Bypass valve closed
8/27/2012	11:43:52 AM	Bubbler valve closed
8/27/2012	11:43:52 AM	Helium valve opened
8/27/2012	11:43:52 AM	Main Vac valve opened
8/27/2012	11:43:52 AM	Helium MFC set to  20.000000
8/27/2012	11:43:52 AM	H2 MFC set to  0.000000
8/27/2012	11:43:52 AM	BCl3 MFC set to  0.000000
8/27/2012	11:43:52 AM	PH3 MFC set to  0.000000
8/27/2012	11:43:52 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:43:52 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:43:52 AM	Tube furnace set to 0
8/27/2012	11:44:22 AM	Helium valve closed
8/27/2012	11:44:22 AM	H2 valve closed
8/27/2012	11:44:22 AM	BCl3 valve closed
8/27/2012	11:44:22 AM	PH3 valve closed
8/27/2012	11:44:22 AM	SiCl4 pre valve closed
8/27/2012	11:44:22 AM	SiCl4 post valve closed
8/27/2012	11:44:22 AM	Bypass valve closed
8/27/2012	11:44:22 AM	Bubbler valve closed
8/27/2012	11:44:22 AM	Main Vac valve opened
8/27/2012	11:44:22 AM	Helium MFC set to  0.000000
8/27/2012	11:44:22 AM	H2 MFC set to  0.000000
8/27/2012	11:44:22 AM	BCl3 MFC set to  0.000000
8/27/2012	11:44:22 AM	PH3 MFC set to  0.000000
8/27/2012	11:44:22 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:44:22 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:44:22 AM	Tube furnace set to 0
8/27/2012	11:44:52 AM	H2 valve closed
8/27/2012	11:44:52 AM	BCl3 valve closed
8/27/2012	11:44:52 AM	PH3 valve closed
8/27/2012	11:44:52 AM	SiCl4 pre valve closed
8/27/2012	11:44:52 AM	SiCl4 post valve closed
8/27/2012	11:44:52 AM	Bypass valve closed
8/27/2012	11:44:52 AM	Bubbler valve closed
8/27/2012	11:44:52 AM	Helium valve opened
8/27/2012	11:44:52 AM	Main Vac valve opened
8/27/2012	11:44:52 AM	Helium MFC set to  20.000000
8/27/2012	11:44:53 AM	H2 MFC set to  0.000000
8/27/2012	11:44:53 AM	BCl3 MFC set to  0.000000
8/27/2012	11:44:53 AM	PH3 MFC set to  0.000000
8/27/2012	11:44:53 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:44:53 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:44:53 AM	Tube furnace set to 0
8/27/2012	11:45:23 AM	Helium valve closed
8/27/2012	11:45:23 AM	H2 valve closed
8/27/2012	11:45:23 AM	BCl3 valve closed
8/27/2012	11:45:23 AM	PH3 valve closed
8/27/2012	11:45:23 AM	SiCl4 pre valve closed
8/27/2012	11:45:23 AM	SiCl4 post valve closed
8/27/2012	11:45:23 AM	Bypass valve closed
8/27/2012	11:45:23 AM	Bubbler valve closed
8/27/2012	11:45:23 AM	Main Vac valve opened
8/27/2012	11:45:23 AM	Helium MFC set to  0.000000
8/27/2012	11:45:23 AM	H2 MFC set to  0.000000
8/27/2012	11:45:23 AM	BCl3 MFC set to  0.000000
8/27/2012	11:45:23 AM	PH3 MFC set to  0.000000
8/27/2012	11:45:23 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:45:23 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:45:23 AM	Tube furnace set to 0
8/27/2012	11:45:53 AM	H2 valve closed
8/27/2012	11:45:53 AM	BCl3 valve closed
8/27/2012	11:45:53 AM	PH3 valve closed
8/27/2012	11:45:53 AM	SiCl4 pre valve closed
8/27/2012	11:45:53 AM	SiCl4 post valve closed
8/27/2012	11:45:53 AM	Bypass valve closed
8/27/2012	11:45:53 AM	Bubbler valve closed
8/27/2012	11:45:53 AM	Helium valve opened
8/27/2012	11:45:53 AM	Main Vac valve opened
8/27/2012	11:45:53 AM	Helium MFC set to  20.000000
8/27/2012	11:45:53 AM	H2 MFC set to  0.000000
8/27/2012	11:45:53 AM	BCl3 MFC set to  0.000000
8/27/2012	11:45:53 AM	PH3 MFC set to  0.000000
8/27/2012	11:45:53 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:45:53 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:45:53 AM	Tube furnace set to 0
8/27/2012	11:46:23 AM	Helium valve closed
8/27/2012	11:46:23 AM	H2 valve closed
8/27/2012	11:46:23 AM	BCl3 valve closed
8/27/2012	11:46:23 AM	PH3 valve closed
8/27/2012	11:46:23 AM	SiCl4 pre valve closed
8/27/2012	11:46:23 AM	SiCl4 post valve closed
8/27/2012	11:46:23 AM	Bypass valve closed
8/27/2012	11:46:23 AM	Bubbler valve closed
8/27/2012	11:46:23 AM	Main Vac valve opened
8/27/2012	11:46:23 AM	Helium MFC set to  0.000000
8/27/2012	11:46:23 AM	H2 MFC set to  0.000000
8/27/2012	11:46:23 AM	BCl3 MFC set to  0.000000
8/27/2012	11:46:23 AM	PH3 MFC set to  0.000000
8/27/2012	11:46:23 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:46:23 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:46:23 AM	Tube furnace set to 0
8/27/2012	11:46:53 AM	H2 valve closed
8/27/2012	11:46:53 AM	BCl3 valve closed
8/27/2012	11:46:53 AM	PH3 valve closed
8/27/2012	11:46:53 AM	SiCl4 pre valve closed
8/27/2012	11:46:53 AM	SiCl4 post valve closed
8/27/2012	11:46:53 AM	Bypass valve closed
8/27/2012	11:46:53 AM	Bubbler valve closed
8/27/2012	11:46:53 AM	Helium valve opened
8/27/2012	11:46:53 AM	Main Vac valve opened
8/27/2012	11:46:53 AM	Helium MFC set to  20.000000
8/27/2012	11:46:54 AM	H2 MFC set to  0.000000
8/27/2012	11:46:54 AM	BCl3 MFC set to  0.000000
8/27/2012	11:46:54 AM	PH3 MFC set to  0.000000
8/27/2012	11:46:54 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:46:54 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:46:54 AM	Tube furnace set to 0
8/27/2012	11:47:24 AM	Helium valve closed
8/27/2012	11:47:24 AM	H2 valve closed
8/27/2012	11:47:24 AM	BCl3 valve closed
8/27/2012	11:47:24 AM	PH3 valve closed
8/27/2012	11:47:24 AM	SiCl4 pre valve closed
8/27/2012	11:47:24 AM	SiCl4 post valve closed
8/27/2012	11:47:24 AM	Bypass valve closed
8/27/2012	11:47:24 AM	Bubbler valve closed
8/27/2012	11:47:24 AM	Main Vac valve opened
8/27/2012	11:47:24 AM	Helium MFC set to  0.000000
8/27/2012	11:47:24 AM	H2 MFC set to  0.000000
8/27/2012	11:47:24 AM	BCl3 MFC set to  0.000000
8/27/2012	11:47:24 AM	PH3 MFC set to  0.000000
8/27/2012	11:47:24 AM	SiCl4 MFC set to  0.000000
8/27/2012	11:47:24 AM	Bypass solenoid MFC set to  0.000000
8/27/2012	11:47:24 AM	Tube furnace set to 0
8/27/2012	11:47:25 AM	Run finished at 11:47 AM
8/27/2012	11:47:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/27/2012	11:48:04 AM	Main Vac valve closed
8/27/2012	11:48:15 AM	Main Vac valve opened
8/27/2012	12:55:02 PM	Main Vac valve closed
8/27/2012	12:55:17 PM	Main Vac valve opened
8/27/2012	12:55:57 PM	Recipe started at 12:55 PM
8/27/2012	12:55:57 PM	Helium valve closed
8/27/2012	12:55:57 PM	H2 valve closed
8/27/2012	12:55:57 PM	BCl3 valve closed
8/27/2012	12:55:57 PM	PH3 valve closed
8/27/2012	12:55:57 PM	SiCl4 pre valve closed
8/27/2012	12:55:57 PM	SiCl4 post valve closed
8/27/2012	12:55:57 PM	Main Vac valve closed
8/27/2012	12:55:57 PM	Bypass valve closed
8/27/2012	12:55:57 PM	Bubbler valve closed
8/27/2012	12:55:57 PM	Helium MFC set to  0.000000
8/27/2012	12:55:57 PM	H2 MFC set to  0.000000
8/27/2012	12:55:57 PM	BCl3 MFC set to  0.000000
8/27/2012	12:55:57 PM	PH3 MFC set to  0.000000
8/27/2012	12:55:57 PM	SiCl4 MFC set to  0.000000
8/27/2012	12:55:57 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:55:57 PM	Tube furnace set to 0
8/27/2012	12:56:00 PM	Helium valve closed
8/27/2012	12:56:00 PM	BCl3 valve closed
8/27/2012	12:56:00 PM	PH3 valve closed
8/27/2012	12:56:00 PM	SiCl4 pre valve closed
8/27/2012	12:56:00 PM	SiCl4 post valve closed
8/27/2012	12:56:00 PM	Main Vac valve closed
8/27/2012	12:56:00 PM	Bypass valve closed
8/27/2012	12:56:00 PM	Bubbler valve closed
8/27/2012	12:56:00 PM	H2 valve opened
8/27/2012	12:56:00 PM	Helium MFC set to  0.000000
8/27/2012	12:56:00 PM	H2 MFC set to  500.000000
8/27/2012	12:56:00 PM	BCl3 MFC set to  0.000000
8/27/2012	12:56:00 PM	PH3 MFC set to  0.000000
8/27/2012	12:56:00 PM	SiCl4 MFC set to  0.000000
8/27/2012	12:56:00 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:56:00 PM	Tube furnace set to 0
8/27/2012	12:57:13 PM	Helium valve closed
8/27/2012	12:57:13 PM	BCl3 valve closed
8/27/2012	12:57:13 PM	PH3 valve closed
8/27/2012	12:57:13 PM	SiCl4 pre valve closed
8/27/2012	12:57:13 PM	SiCl4 post valve closed
8/27/2012	12:57:13 PM	Main Vac valve closed
8/27/2012	12:57:13 PM	Bypass valve closed
8/27/2012	12:57:13 PM	H2 valve opened
8/27/2012	12:57:13 PM	Bubbler valve opened
8/27/2012	12:57:13 PM	Helium MFC set to  0.000000
8/27/2012	12:57:13 PM	H2 MFC set to  500.000000
8/27/2012	12:57:13 PM	BCl3 MFC set to  0.000000
8/27/2012	12:57:13 PM	PH3 MFC set to  0.000000
8/27/2012	12:57:13 PM	SiCl4 MFC set to  0.000000
8/27/2012	12:57:13 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:57:13 PM	Tube furnace set to 0
8/27/2012	12:57:14 PM	Helium valve closed
8/27/2012	12:57:14 PM	BCl3 valve closed
8/27/2012	12:57:14 PM	PH3 valve closed
8/27/2012	12:57:14 PM	SiCl4 pre valve closed
8/27/2012	12:57:14 PM	SiCl4 post valve closed
8/27/2012	12:57:14 PM	Main Vac valve closed
8/27/2012	12:57:14 PM	Bypass valve closed
8/27/2012	12:57:14 PM	H2 valve opened
8/27/2012	12:57:14 PM	Bubbler valve opened
8/27/2012	12:57:14 PM	Helium MFC set to  0.000000
8/27/2012	12:57:14 PM	H2 MFC set to  450.000000
8/27/2012	12:57:14 PM	BCl3 MFC set to  0.000000
8/27/2012	12:57:14 PM	PH3 MFC set to  0.000000
8/27/2012	12:57:14 PM	SiCl4 MFC set to  0.000000
8/27/2012	12:57:14 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	12:57:14 PM	Tube furnace set to 1000
8/27/2012	1:22:14 PM	Helium valve closed
8/27/2012	1:22:14 PM	PH3 valve closed
8/27/2012	1:22:14 PM	Main Vac valve closed
8/27/2012	1:22:14 PM	Bypass valve closed
8/27/2012	1:22:14 PM	H2 valve opened
8/27/2012	1:22:14 PM	BCl3 valve opened
8/27/2012	1:22:14 PM	SiCl4 pre valve opened
8/27/2012	1:22:14 PM	SiCl4 post valve opened
8/27/2012	1:22:14 PM	Bubbler valve opened
8/27/2012	1:22:14 PM	Helium MFC set to  0.000000
8/27/2012	1:22:14 PM	H2 MFC set to  450.000000
8/27/2012	1:22:14 PM	BCl3 MFC set to  1.500000
8/27/2012	1:22:15 PM	PH3 MFC set to  0.000000
8/27/2012	1:22:15 PM	SiCl4 MFC set to  50.000000
8/27/2012	1:22:15 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	1:22:15 PM	Tube furnace set to 1000
8/27/2012	1:27:15 PM	Helium valve closed
8/27/2012	1:27:15 PM	BCl3 valve closed
8/27/2012	1:27:15 PM	PH3 valve closed
8/27/2012	1:27:15 PM	SiCl4 pre valve closed
8/27/2012	1:27:15 PM	SiCl4 post valve closed
8/27/2012	1:27:15 PM	Main Vac valve closed
8/27/2012	1:27:15 PM	Bypass valve closed
8/27/2012	1:27:15 PM	H2 valve opened
8/27/2012	1:27:15 PM	Bubbler valve opened
8/27/2012	1:27:15 PM	Helium MFC set to  0.000000
8/27/2012	1:27:15 PM	H2 MFC set to  500.000000
8/27/2012	1:27:15 PM	BCl3 MFC set to  0.000000
8/27/2012	1:27:15 PM	PH3 MFC set to  0.000000
8/27/2012	1:27:15 PM	SiCl4 MFC set to  0.000000
8/27/2012	1:27:15 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	1:27:15 PM	Tube furnace set to 750
8/27/2012	1:32:15 PM	H2 valve closed
8/27/2012	1:32:15 PM	BCl3 valve closed
8/27/2012	1:32:15 PM	PH3 valve closed
8/27/2012	1:32:15 PM	SiCl4 pre valve closed
8/27/2012	1:32:15 PM	SiCl4 post valve closed
8/27/2012	1:32:15 PM	Main Vac valve closed
8/27/2012	1:32:15 PM	Bypass valve closed
8/27/2012	1:32:15 PM	Helium valve opened
8/27/2012	1:32:15 PM	Bubbler valve opened
8/27/2012	1:32:15 PM	Helium MFC set to  500.000000
8/27/2012	1:32:15 PM	H2 MFC set to  0.000000
8/27/2012	1:32:15 PM	BCl3 MFC set to  0.000000
8/27/2012	1:32:15 PM	PH3 MFC set to  0.000000
8/27/2012	1:32:15 PM	SiCl4 MFC set to  0.000000
8/27/2012	1:32:15 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	1:32:15 PM	Tube furnace set to 0
8/27/2012	1:52:15 PM	Helium valve closed
8/27/2012	1:52:15 PM	H2 valve closed
8/27/2012	1:52:15 PM	BCl3 valve closed
8/27/2012	1:52:15 PM	PH3 valve closed
8/27/2012	1:52:15 PM	SiCl4 pre valve closed
8/27/2012	1:52:15 PM	SiCl4 post valve closed
8/27/2012	1:52:15 PM	Main Vac valve closed
8/27/2012	1:52:15 PM	Bypass valve closed
8/27/2012	1:52:15 PM	Bubbler valve closed
8/27/2012	1:52:15 PM	Helium MFC set to  0.000000
8/27/2012	1:52:15 PM	H2 MFC set to  0.000000
8/27/2012	1:52:15 PM	BCl3 MFC set to  0.000000
8/27/2012	1:52:15 PM	PH3 MFC set to  0.000000
8/27/2012	1:52:15 PM	SiCl4 MFC set to  0.000000
8/27/2012	1:52:15 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	1:52:15 PM	Tube furnace set to 0
8/27/2012	1:52:16 PM	Run finished at 1:52 PM
8/27/2012	2:21:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	2:22:00 PM	Recipe started at 2:21 PM
8/27/2012	2:22:00 PM	Helium valve closed
8/27/2012	2:22:00 PM	H2 valve closed
8/27/2012	2:22:00 PM	BCl3 valve closed
8/27/2012	2:22:00 PM	PH3 valve closed
8/27/2012	2:22:00 PM	SiCl4 pre valve closed
8/27/2012	2:22:00 PM	SiCl4 post valve closed
8/27/2012	2:22:00 PM	Main Vac valve closed
8/27/2012	2:22:00 PM	Bypass valve closed
8/27/2012	2:22:00 PM	Bubbler valve closed
8/27/2012	2:22:00 PM	Helium MFC set to  0.000000
8/27/2012	2:22:00 PM	H2 MFC set to  0.000000
8/27/2012	2:22:00 PM	BCl3 MFC set to  0.000000
8/27/2012	2:22:00 PM	PH3 MFC set to  0.000000
8/27/2012	2:22:00 PM	SiCl4 MFC set to  0.000000
8/27/2012	2:22:00 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	2:22:00 PM	Tube furnace set to 0
8/27/2012	2:22:03 PM	H2 valve closed
8/27/2012	2:22:03 PM	BCl3 valve closed
8/27/2012	2:22:03 PM	PH3 valve closed
8/27/2012	2:22:03 PM	SiCl4 pre valve closed
8/27/2012	2:22:03 PM	SiCl4 post valve closed
8/27/2012	2:22:03 PM	Main Vac valve closed
8/27/2012	2:22:03 PM	Bypass valve closed
8/27/2012	2:22:03 PM	Bubbler valve closed
8/27/2012	2:22:03 PM	Helium valve opened
8/27/2012	2:22:03 PM	Helium MFC set to  500.000000
8/27/2012	2:22:03 PM	H2 MFC set to  0.000000
8/27/2012	2:22:03 PM	BCl3 MFC set to  0.000000
8/27/2012	2:22:03 PM	PH3 MFC set to  0.000000
8/27/2012	2:22:03 PM	SiCl4 MFC set to  0.000000
8/27/2012	2:22:03 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	2:22:03 PM	Tube furnace set to 0
8/27/2012	2:22:10 PM	Helium valve closed
8/27/2012	2:22:10 PM	H2 valve closed
8/27/2012	2:22:10 PM	BCl3 valve closed
8/27/2012	2:22:10 PM	PH3 valve closed
8/27/2012	2:22:10 PM	SiCl4 pre valve closed
8/27/2012	2:22:10 PM	SiCl4 post valve closed
8/27/2012	2:22:10 PM	Main Vac valve closed
8/27/2012	2:22:10 PM	Bypass valve closed
8/27/2012	2:22:10 PM	Bubbler valve closed
8/27/2012	2:22:10 PM	Helium MFC set to  0.000000
8/27/2012	2:22:10 PM	H2 MFC set to  0.000000
8/27/2012	2:22:10 PM	BCl3 MFC set to  0.000000
8/27/2012	2:22:10 PM	PH3 MFC set to  0.000000
8/27/2012	2:22:10 PM	SiCl4 MFC set to  0.000000
8/27/2012	2:22:11 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	2:22:11 PM	Tube furnace set to 0
8/27/2012	2:22:12 PM	Run finished at 2:22 PM
8/27/2012	2:22:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	2:26:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	2:26:41 PM	Recipe started at 2:26 PM
8/27/2012	2:26:41 PM	Helium valve closed
8/27/2012	2:26:41 PM	H2 valve closed
8/27/2012	2:26:41 PM	BCl3 valve closed
8/27/2012	2:26:41 PM	PH3 valve closed
8/27/2012	2:26:41 PM	SiCl4 pre valve closed
8/27/2012	2:26:41 PM	SiCl4 post valve closed
8/27/2012	2:26:41 PM	Main Vac valve closed
8/27/2012	2:26:41 PM	Bubbler valve closed
8/27/2012	2:26:41 PM	Bypass valve opened
8/27/2012	2:26:41 PM	Helium MFC set to  0.000000
8/27/2012	2:26:41 PM	H2 MFC set to  0.000000
8/27/2012	2:26:41 PM	BCl3 MFC set to  0.000000
8/27/2012	2:26:41 PM	PH3 MFC set to  0.000000
8/27/2012	2:26:41 PM	SiCl4 MFC set to  0.000000
8/27/2012	2:26:41 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	2:26:41 PM	Tube furnace set to 0
8/27/2012	2:27:57 PM	Helium valve closed
8/27/2012	2:27:57 PM	H2 valve closed
8/27/2012	2:27:57 PM	BCl3 valve closed
8/27/2012	2:27:57 PM	PH3 valve closed
8/27/2012	2:27:57 PM	SiCl4 pre valve closed
8/27/2012	2:27:57 PM	SiCl4 post valve closed
8/27/2012	2:27:57 PM	Main Vac valve closed
8/27/2012	2:27:57 PM	Bubbler valve closed
8/27/2012	2:27:57 PM	Bypass valve opened
8/27/2012	2:27:57 PM	Helium MFC set to  0.000000
8/27/2012	2:27:57 PM	H2 MFC set to  0.000000
8/27/2012	2:27:57 PM	BCl3 MFC set to  0.000000
8/27/2012	2:27:57 PM	PH3 MFC set to  0.000000
8/27/2012	2:27:57 PM	SiCl4 MFC set to  0.000000
8/27/2012	2:27:57 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	2:27:57 PM	Tube furnace set to 0
8/27/2012	2:28:57 PM	Helium valve closed
8/27/2012	2:28:57 PM	H2 valve closed
8/27/2012	2:28:58 PM	BCl3 valve closed
8/27/2012	2:28:58 PM	PH3 valve closed
8/27/2012	2:28:58 PM	SiCl4 pre valve closed
8/27/2012	2:28:58 PM	SiCl4 post valve closed
8/27/2012	2:28:58 PM	Bypass valve closed
8/27/2012	2:28:58 PM	Bubbler valve closed
8/27/2012	2:28:58 PM	Main Vac valve opened
8/27/2012	2:28:58 PM	Helium MFC set to  0.000000
8/27/2012	2:28:58 PM	H2 MFC set to  0.000000
8/27/2012	2:28:58 PM	BCl3 MFC set to  0.000000
8/27/2012	2:28:58 PM	PH3 MFC set to  0.000000
8/27/2012	2:28:58 PM	SiCl4 MFC set to  0.000000
8/27/2012	2:28:58 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	2:28:58 PM	Tube furnace set to 0
8/27/2012	2:28:59 PM	Run finished at 2:28 PM
8/27/2012	2:28:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	3:19:54 PM	Recipe started at 3:19 PM
8/27/2012	3:19:54 PM	Helium valve closed
8/27/2012	3:19:54 PM	H2 valve closed
8/27/2012	3:19:54 PM	BCl3 valve closed
8/27/2012	3:19:54 PM	PH3 valve closed
8/27/2012	3:19:54 PM	SiCl4 pre valve closed
8/27/2012	3:19:54 PM	SiCl4 post valve closed
8/27/2012	3:19:54 PM	Bypass valve closed
8/27/2012	3:19:54 PM	Bubbler valve closed
8/27/2012	3:19:54 PM	Main Vac valve opened
8/27/2012	3:19:54 PM	Helium MFC set to  0.000000
8/27/2012	3:19:54 PM	H2 MFC set to  0.000000
8/27/2012	3:19:54 PM	BCl3 MFC set to  0.000000
8/27/2012	3:19:54 PM	PH3 MFC set to  0.000000
8/27/2012	3:19:54 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:19:54 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:19:54 PM	Tube furnace set to 150
8/27/2012	3:20:24 PM	H2 valve closed
8/27/2012	3:20:24 PM	BCl3 valve closed
8/27/2012	3:20:24 PM	PH3 valve closed
8/27/2012	3:20:24 PM	SiCl4 pre valve closed
8/27/2012	3:20:24 PM	SiCl4 post valve closed
8/27/2012	3:20:24 PM	Bypass valve closed
8/27/2012	3:20:24 PM	Bubbler valve closed
8/27/2012	3:20:24 PM	Helium valve opened
8/27/2012	3:20:24 PM	Main Vac valve opened
8/27/2012	3:20:24 PM	Helium MFC set to  20.000000
8/27/2012	3:20:24 PM	H2 MFC set to  0.000000
8/27/2012	3:20:24 PM	BCl3 MFC set to  0.000000
8/27/2012	3:20:24 PM	PH3 MFC set to  0.000000
8/27/2012	3:20:24 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:20:24 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:20:25 PM	Tube furnace set to 150
8/27/2012	3:20:55 PM	Helium valve closed
8/27/2012	3:20:55 PM	H2 valve closed
8/27/2012	3:20:55 PM	BCl3 valve closed
8/27/2012	3:20:55 PM	PH3 valve closed
8/27/2012	3:20:55 PM	SiCl4 pre valve closed
8/27/2012	3:20:55 PM	SiCl4 post valve closed
8/27/2012	3:20:55 PM	Bypass valve closed
8/27/2012	3:20:55 PM	Bubbler valve closed
8/27/2012	3:20:55 PM	Main Vac valve opened
8/27/2012	3:20:55 PM	Helium MFC set to  0.000000
8/27/2012	3:20:55 PM	H2 MFC set to  0.000000
8/27/2012	3:20:55 PM	BCl3 MFC set to  0.000000
8/27/2012	3:20:55 PM	PH3 MFC set to  0.000000
8/27/2012	3:20:55 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:20:55 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:20:55 PM	Tube furnace set to 150
8/27/2012	3:21:25 PM	H2 valve closed
8/27/2012	3:21:25 PM	BCl3 valve closed
8/27/2012	3:21:25 PM	PH3 valve closed
8/27/2012	3:21:25 PM	SiCl4 pre valve closed
8/27/2012	3:21:25 PM	SiCl4 post valve closed
8/27/2012	3:21:25 PM	Bypass valve closed
8/27/2012	3:21:25 PM	Bubbler valve closed
8/27/2012	3:21:25 PM	Helium valve opened
8/27/2012	3:21:25 PM	Main Vac valve opened
8/27/2012	3:21:25 PM	Helium MFC set to  20.000000
8/27/2012	3:21:25 PM	H2 MFC set to  0.000000
8/27/2012	3:21:25 PM	BCl3 MFC set to  0.000000
8/27/2012	3:21:25 PM	PH3 MFC set to  0.000000
8/27/2012	3:21:25 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:21:25 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:21:25 PM	Tube furnace set to 150
8/27/2012	3:21:55 PM	Helium valve closed
8/27/2012	3:21:55 PM	H2 valve closed
8/27/2012	3:21:55 PM	BCl3 valve closed
8/27/2012	3:21:55 PM	PH3 valve closed
8/27/2012	3:21:55 PM	SiCl4 pre valve closed
8/27/2012	3:21:55 PM	SiCl4 post valve closed
8/27/2012	3:21:55 PM	Bypass valve closed
8/27/2012	3:21:55 PM	Bubbler valve closed
8/27/2012	3:21:55 PM	Main Vac valve opened
8/27/2012	3:21:55 PM	Helium MFC set to  0.000000
8/27/2012	3:21:55 PM	H2 MFC set to  0.000000
8/27/2012	3:21:55 PM	BCl3 MFC set to  0.000000
8/27/2012	3:21:55 PM	PH3 MFC set to  0.000000
8/27/2012	3:21:55 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:21:55 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:21:55 PM	Tube furnace set to 150
8/27/2012	3:22:25 PM	H2 valve closed
8/27/2012	3:22:25 PM	BCl3 valve closed
8/27/2012	3:22:25 PM	PH3 valve closed
8/27/2012	3:22:25 PM	SiCl4 pre valve closed
8/27/2012	3:22:25 PM	SiCl4 post valve closed
8/27/2012	3:22:25 PM	Bypass valve closed
8/27/2012	3:22:25 PM	Bubbler valve closed
8/27/2012	3:22:25 PM	Helium valve opened
8/27/2012	3:22:25 PM	Main Vac valve opened
8/27/2012	3:22:25 PM	Helium MFC set to  20.000000
8/27/2012	3:22:25 PM	H2 MFC set to  0.000000
8/27/2012	3:22:25 PM	BCl3 MFC set to  0.000000
8/27/2012	3:22:25 PM	PH3 MFC set to  0.000000
8/27/2012	3:22:25 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:22:25 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:22:25 PM	Tube furnace set to 150
8/27/2012	3:22:56 PM	Helium valve closed
8/27/2012	3:22:56 PM	H2 valve closed
8/27/2012	3:22:56 PM	BCl3 valve closed
8/27/2012	3:22:56 PM	PH3 valve closed
8/27/2012	3:22:56 PM	SiCl4 pre valve closed
8/27/2012	3:22:56 PM	SiCl4 post valve closed
8/27/2012	3:22:56 PM	Bypass valve closed
8/27/2012	3:22:56 PM	Bubbler valve closed
8/27/2012	3:22:56 PM	Main Vac valve opened
8/27/2012	3:22:56 PM	Helium MFC set to  0.000000
8/27/2012	3:22:56 PM	H2 MFC set to  0.000000
8/27/2012	3:22:56 PM	BCl3 MFC set to  0.000000
8/27/2012	3:22:56 PM	PH3 MFC set to  0.000000
8/27/2012	3:22:56 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:22:56 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:22:56 PM	Tube furnace set to 150
8/27/2012	3:23:26 PM	H2 valve closed
8/27/2012	3:23:26 PM	BCl3 valve closed
8/27/2012	3:23:26 PM	PH3 valve closed
8/27/2012	3:23:26 PM	SiCl4 pre valve closed
8/27/2012	3:23:26 PM	SiCl4 post valve closed
8/27/2012	3:23:26 PM	Bypass valve closed
8/27/2012	3:23:26 PM	Bubbler valve closed
8/27/2012	3:23:26 PM	Helium valve opened
8/27/2012	3:23:26 PM	Main Vac valve opened
8/27/2012	3:23:26 PM	Helium MFC set to  20.000000
8/27/2012	3:23:26 PM	H2 MFC set to  0.000000
8/27/2012	3:23:26 PM	BCl3 MFC set to  0.000000
8/27/2012	3:23:26 PM	PH3 MFC set to  0.000000
8/27/2012	3:23:26 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:23:26 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:23:26 PM	Tube furnace set to 150
8/27/2012	3:23:56 PM	Helium valve closed
8/27/2012	3:23:56 PM	H2 valve closed
8/27/2012	3:23:56 PM	BCl3 valve closed
8/27/2012	3:23:56 PM	PH3 valve closed
8/27/2012	3:23:56 PM	SiCl4 pre valve closed
8/27/2012	3:23:56 PM	SiCl4 post valve closed
8/27/2012	3:23:56 PM	Bypass valve closed
8/27/2012	3:23:56 PM	Bubbler valve closed
8/27/2012	3:23:56 PM	Main Vac valve opened
8/27/2012	3:23:56 PM	Helium MFC set to  0.000000
8/27/2012	3:23:56 PM	H2 MFC set to  0.000000
8/27/2012	3:23:56 PM	BCl3 MFC set to  0.000000
8/27/2012	3:23:56 PM	PH3 MFC set to  0.000000
8/27/2012	3:23:56 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:23:56 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:23:56 PM	Tube furnace set to 150
8/27/2012	3:24:26 PM	H2 valve closed
8/27/2012	3:24:26 PM	BCl3 valve closed
8/27/2012	3:24:26 PM	PH3 valve closed
8/27/2012	3:24:26 PM	SiCl4 pre valve closed
8/27/2012	3:24:26 PM	SiCl4 post valve closed
8/27/2012	3:24:26 PM	Bypass valve closed
8/27/2012	3:24:26 PM	Bubbler valve closed
8/27/2012	3:24:26 PM	Helium valve opened
8/27/2012	3:24:26 PM	Main Vac valve opened
8/27/2012	3:24:26 PM	Helium MFC set to  20.000000
8/27/2012	3:24:26 PM	H2 MFC set to  0.000000
8/27/2012	3:24:26 PM	BCl3 MFC set to  0.000000
8/27/2012	3:24:26 PM	PH3 MFC set to  0.000000
8/27/2012	3:24:26 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:24:26 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:24:26 PM	Tube furnace set to 150
8/27/2012	3:24:57 PM	Helium valve closed
8/27/2012	3:24:57 PM	H2 valve closed
8/27/2012	3:24:57 PM	BCl3 valve closed
8/27/2012	3:24:57 PM	PH3 valve closed
8/27/2012	3:24:57 PM	SiCl4 pre valve closed
8/27/2012	3:24:57 PM	SiCl4 post valve closed
8/27/2012	3:24:57 PM	Bypass valve closed
8/27/2012	3:24:57 PM	Bubbler valve closed
8/27/2012	3:24:57 PM	Main Vac valve opened
8/27/2012	3:24:57 PM	Helium MFC set to  0.000000
8/27/2012	3:24:57 PM	H2 MFC set to  0.000000
8/27/2012	3:24:57 PM	BCl3 MFC set to  0.000000
8/27/2012	3:24:57 PM	PH3 MFC set to  0.000000
8/27/2012	3:24:57 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:24:57 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:24:57 PM	Tube furnace set to 150
8/27/2012	3:25:27 PM	H2 valve closed
8/27/2012	3:25:27 PM	BCl3 valve closed
8/27/2012	3:25:27 PM	PH3 valve closed
8/27/2012	3:25:27 PM	SiCl4 pre valve closed
8/27/2012	3:25:27 PM	SiCl4 post valve closed
8/27/2012	3:25:27 PM	Bypass valve closed
8/27/2012	3:25:27 PM	Bubbler valve closed
8/27/2012	3:25:27 PM	Helium valve opened
8/27/2012	3:25:27 PM	Main Vac valve opened
8/27/2012	3:25:27 PM	Helium MFC set to  20.000000
8/27/2012	3:25:27 PM	H2 MFC set to  0.000000
8/27/2012	3:25:27 PM	BCl3 MFC set to  0.000000
8/27/2012	3:25:27 PM	PH3 MFC set to  0.000000
8/27/2012	3:25:27 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:25:27 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:25:27 PM	Tube furnace set to 150
8/27/2012	3:25:57 PM	Helium valve closed
8/27/2012	3:25:57 PM	H2 valve closed
8/27/2012	3:25:57 PM	BCl3 valve closed
8/27/2012	3:25:57 PM	PH3 valve closed
8/27/2012	3:25:57 PM	SiCl4 pre valve closed
8/27/2012	3:25:57 PM	SiCl4 post valve closed
8/27/2012	3:25:57 PM	Bypass valve closed
8/27/2012	3:25:57 PM	Bubbler valve closed
8/27/2012	3:25:57 PM	Main Vac valve opened
8/27/2012	3:25:57 PM	Helium MFC set to  0.000000
8/27/2012	3:25:57 PM	H2 MFC set to  0.000000
8/27/2012	3:25:57 PM	BCl3 MFC set to  0.000000
8/27/2012	3:25:57 PM	PH3 MFC set to  0.000000
8/27/2012	3:25:57 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:25:57 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:25:57 PM	Tube furnace set to 150
8/27/2012	3:26:27 PM	H2 valve closed
8/27/2012	3:26:27 PM	BCl3 valve closed
8/27/2012	3:26:27 PM	PH3 valve closed
8/27/2012	3:26:27 PM	SiCl4 pre valve closed
8/27/2012	3:26:27 PM	SiCl4 post valve closed
8/27/2012	3:26:27 PM	Bypass valve closed
8/27/2012	3:26:27 PM	Bubbler valve closed
8/27/2012	3:26:27 PM	Helium valve opened
8/27/2012	3:26:27 PM	Main Vac valve opened
8/27/2012	3:26:27 PM	Helium MFC set to  20.000000
8/27/2012	3:26:27 PM	H2 MFC set to  0.000000
8/27/2012	3:26:27 PM	BCl3 MFC set to  0.000000
8/27/2012	3:26:27 PM	PH3 MFC set to  0.000000
8/27/2012	3:26:27 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:26:27 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:26:27 PM	Tube furnace set to 150
8/27/2012	3:26:57 PM	Helium valve closed
8/27/2012	3:26:57 PM	H2 valve closed
8/27/2012	3:26:57 PM	BCl3 valve closed
8/27/2012	3:26:58 PM	PH3 valve closed
8/27/2012	3:26:58 PM	SiCl4 pre valve closed
8/27/2012	3:26:58 PM	SiCl4 post valve closed
8/27/2012	3:26:58 PM	Bypass valve closed
8/27/2012	3:26:58 PM	Bubbler valve closed
8/27/2012	3:26:58 PM	Main Vac valve opened
8/27/2012	3:26:58 PM	Helium MFC set to  0.000000
8/27/2012	3:26:58 PM	H2 MFC set to  0.000000
8/27/2012	3:26:58 PM	BCl3 MFC set to  0.000000
8/27/2012	3:26:58 PM	PH3 MFC set to  0.000000
8/27/2012	3:26:58 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:26:58 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:26:58 PM	Tube furnace set to 150
8/27/2012	3:27:28 PM	H2 valve closed
8/27/2012	3:27:28 PM	BCl3 valve closed
8/27/2012	3:27:28 PM	PH3 valve closed
8/27/2012	3:27:28 PM	SiCl4 pre valve closed
8/27/2012	3:27:28 PM	SiCl4 post valve closed
8/27/2012	3:27:28 PM	Bypass valve closed
8/27/2012	3:27:28 PM	Bubbler valve closed
8/27/2012	3:27:28 PM	Helium valve opened
8/27/2012	3:27:28 PM	Main Vac valve opened
8/27/2012	3:27:28 PM	Helium MFC set to  20.000000
8/27/2012	3:27:28 PM	H2 MFC set to  0.000000
8/27/2012	3:27:28 PM	BCl3 MFC set to  0.000000
8/27/2012	3:27:28 PM	PH3 MFC set to  0.000000
8/27/2012	3:27:28 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:27:28 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:27:28 PM	Tube furnace set to 150
8/27/2012	3:27:58 PM	Helium valve closed
8/27/2012	3:27:58 PM	H2 valve closed
8/27/2012	3:27:58 PM	BCl3 valve closed
8/27/2012	3:27:58 PM	PH3 valve closed
8/27/2012	3:27:58 PM	SiCl4 pre valve closed
8/27/2012	3:27:58 PM	SiCl4 post valve closed
8/27/2012	3:27:58 PM	Bypass valve closed
8/27/2012	3:27:58 PM	Bubbler valve closed
8/27/2012	3:27:58 PM	Main Vac valve opened
8/27/2012	3:27:58 PM	Helium MFC set to  0.000000
8/27/2012	3:27:58 PM	H2 MFC set to  0.000000
8/27/2012	3:27:58 PM	BCl3 MFC set to  0.000000
8/27/2012	3:27:58 PM	PH3 MFC set to  0.000000
8/27/2012	3:27:58 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:27:58 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:27:58 PM	Tube furnace set to 150
8/27/2012	3:28:28 PM	H2 valve closed
8/27/2012	3:28:28 PM	BCl3 valve closed
8/27/2012	3:28:28 PM	PH3 valve closed
8/27/2012	3:28:28 PM	SiCl4 pre valve closed
8/27/2012	3:28:28 PM	SiCl4 post valve closed
8/27/2012	3:28:28 PM	Bypass valve closed
8/27/2012	3:28:28 PM	Bubbler valve closed
8/27/2012	3:28:28 PM	Helium valve opened
8/27/2012	3:28:28 PM	Main Vac valve opened
8/27/2012	3:28:28 PM	Helium MFC set to  20.000000
8/27/2012	3:28:28 PM	H2 MFC set to  0.000000
8/27/2012	3:28:28 PM	BCl3 MFC set to  0.000000
8/27/2012	3:28:28 PM	PH3 MFC set to  0.000000
8/27/2012	3:28:28 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:28:28 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:28:28 PM	Tube furnace set to 150
8/27/2012	3:28:58 PM	Helium valve closed
8/27/2012	3:28:58 PM	H2 valve closed
8/27/2012	3:28:58 PM	BCl3 valve closed
8/27/2012	3:28:58 PM	PH3 valve closed
8/27/2012	3:28:58 PM	SiCl4 pre valve closed
8/27/2012	3:28:58 PM	SiCl4 post valve closed
8/27/2012	3:28:58 PM	Bypass valve closed
8/27/2012	3:28:59 PM	Bubbler valve closed
8/27/2012	3:28:59 PM	Main Vac valve opened
8/27/2012	3:28:59 PM	Helium MFC set to  0.000000
8/27/2012	3:28:59 PM	H2 MFC set to  0.000000
8/27/2012	3:28:59 PM	BCl3 MFC set to  0.000000
8/27/2012	3:28:59 PM	PH3 MFC set to  0.000000
8/27/2012	3:28:59 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:28:59 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:28:59 PM	Tube furnace set to 150
8/27/2012	3:29:29 PM	H2 valve closed
8/27/2012	3:29:29 PM	BCl3 valve closed
8/27/2012	3:29:29 PM	PH3 valve closed
8/27/2012	3:29:29 PM	SiCl4 pre valve closed
8/27/2012	3:29:29 PM	SiCl4 post valve closed
8/27/2012	3:29:29 PM	Bypass valve closed
8/27/2012	3:29:29 PM	Bubbler valve closed
8/27/2012	3:29:29 PM	Helium valve opened
8/27/2012	3:29:29 PM	Main Vac valve opened
8/27/2012	3:29:29 PM	Helium MFC set to  20.000000
8/27/2012	3:29:29 PM	H2 MFC set to  0.000000
8/27/2012	3:29:29 PM	BCl3 MFC set to  0.000000
8/27/2012	3:29:29 PM	PH3 MFC set to  0.000000
8/27/2012	3:29:29 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:29:29 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:29:29 PM	Tube furnace set to 150
8/27/2012	3:29:59 PM	Helium valve closed
8/27/2012	3:29:59 PM	H2 valve closed
8/27/2012	3:29:59 PM	BCl3 valve closed
8/27/2012	3:29:59 PM	PH3 valve closed
8/27/2012	3:29:59 PM	SiCl4 pre valve closed
8/27/2012	3:29:59 PM	SiCl4 post valve closed
8/27/2012	3:29:59 PM	Bypass valve closed
8/27/2012	3:29:59 PM	Bubbler valve closed
8/27/2012	3:29:59 PM	Main Vac valve opened
8/27/2012	3:29:59 PM	Helium MFC set to  0.000000
8/27/2012	3:29:59 PM	H2 MFC set to  0.000000
8/27/2012	3:29:59 PM	BCl3 MFC set to  0.000000
8/27/2012	3:29:59 PM	PH3 MFC set to  0.000000
8/27/2012	3:29:59 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:29:59 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:29:59 PM	Tube furnace set to 150
8/27/2012	3:30:00 PM	Run finished at 3:30 PM
8/27/2012	3:31:12 PM	Main Vac valve closed
8/27/2012	3:31:23 PM	Main Vac valve opened
8/27/2012	3:31:43 PM	Recipe started at 3:31 PM
8/27/2012	3:31:43 PM	Helium valve closed
8/27/2012	3:31:43 PM	H2 valve closed
8/27/2012	3:31:43 PM	BCl3 valve closed
8/27/2012	3:31:43 PM	PH3 valve closed
8/27/2012	3:31:43 PM	SiCl4 pre valve closed
8/27/2012	3:31:43 PM	SiCl4 post valve closed
8/27/2012	3:31:43 PM	Bypass valve closed
8/27/2012	3:31:43 PM	Bubbler valve closed
8/27/2012	3:31:43 PM	Main Vac valve opened
8/27/2012	3:31:43 PM	Helium MFC set to  0.000000
8/27/2012	3:31:43 PM	H2 MFC set to  0.000000
8/27/2012	3:31:43 PM	BCl3 MFC set to  0.000000
8/27/2012	3:31:43 PM	PH3 MFC set to  0.000000
8/27/2012	3:31:43 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:31:43 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:31:43 PM	Tube furnace set to 150
8/27/2012	3:31:46 PM	H2 valve closed
8/27/2012	3:31:46 PM	BCl3 valve closed
8/27/2012	3:31:46 PM	PH3 valve closed
8/27/2012	3:31:46 PM	SiCl4 pre valve closed
8/27/2012	3:31:46 PM	SiCl4 post valve closed
8/27/2012	3:31:46 PM	Bypass valve closed
8/27/2012	3:31:46 PM	Bubbler valve closed
8/27/2012	3:31:46 PM	Helium valve opened
8/27/2012	3:31:46 PM	Main Vac valve opened
8/27/2012	3:31:46 PM	Helium MFC set to  20.000000
8/27/2012	3:31:46 PM	H2 MFC set to  0.000000
8/27/2012	3:31:46 PM	BCl3 MFC set to  0.000000
8/27/2012	3:31:46 PM	PH3 MFC set to  0.000000
8/27/2012	3:31:46 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:31:46 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:31:46 PM	Tube furnace set to 150
8/27/2012	3:32:16 PM	Helium valve closed
8/27/2012	3:32:16 PM	H2 valve closed
8/27/2012	3:32:16 PM	BCl3 valve closed
8/27/2012	3:32:16 PM	PH3 valve closed
8/27/2012	3:32:16 PM	SiCl4 pre valve closed
8/27/2012	3:32:16 PM	SiCl4 post valve closed
8/27/2012	3:32:16 PM	Bypass valve closed
8/27/2012	3:32:16 PM	Bubbler valve closed
8/27/2012	3:32:16 PM	Main Vac valve opened
8/27/2012	3:32:16 PM	Helium MFC set to  0.000000
8/27/2012	3:32:16 PM	H2 MFC set to  0.000000
8/27/2012	3:32:16 PM	BCl3 MFC set to  0.000000
8/27/2012	3:32:16 PM	PH3 MFC set to  0.000000
8/27/2012	3:32:16 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:32:16 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:32:16 PM	Tube furnace set to 150
8/27/2012	3:32:46 PM	H2 valve closed
8/27/2012	3:32:46 PM	BCl3 valve closed
8/27/2012	3:32:46 PM	PH3 valve closed
8/27/2012	3:32:46 PM	SiCl4 pre valve closed
8/27/2012	3:32:46 PM	SiCl4 post valve closed
8/27/2012	3:32:46 PM	Bypass valve closed
8/27/2012	3:32:46 PM	Bubbler valve closed
8/27/2012	3:32:46 PM	Helium valve opened
8/27/2012	3:32:46 PM	Main Vac valve opened
8/27/2012	3:32:46 PM	Helium MFC set to  20.000000
8/27/2012	3:32:46 PM	H2 MFC set to  0.000000
8/27/2012	3:32:46 PM	BCl3 MFC set to  0.000000
8/27/2012	3:32:46 PM	PH3 MFC set to  0.000000
8/27/2012	3:32:46 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:32:46 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:32:46 PM	Tube furnace set to 150
8/27/2012	3:33:16 PM	Helium valve closed
8/27/2012	3:33:16 PM	H2 valve closed
8/27/2012	3:33:16 PM	BCl3 valve closed
8/27/2012	3:33:16 PM	PH3 valve closed
8/27/2012	3:33:16 PM	SiCl4 pre valve closed
8/27/2012	3:33:16 PM	SiCl4 post valve closed
8/27/2012	3:33:16 PM	Bypass valve closed
8/27/2012	3:33:16 PM	Bubbler valve closed
8/27/2012	3:33:16 PM	Main Vac valve opened
8/27/2012	3:33:16 PM	Helium MFC set to  0.000000
8/27/2012	3:33:16 PM	H2 MFC set to  0.000000
8/27/2012	3:33:16 PM	BCl3 MFC set to  0.000000
8/27/2012	3:33:16 PM	PH3 MFC set to  0.000000
8/27/2012	3:33:16 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:33:16 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:33:16 PM	Tube furnace set to 150
8/27/2012	3:33:47 PM	H2 valve closed
8/27/2012	3:33:47 PM	BCl3 valve closed
8/27/2012	3:33:47 PM	PH3 valve closed
8/27/2012	3:33:47 PM	SiCl4 pre valve closed
8/27/2012	3:33:47 PM	SiCl4 post valve closed
8/27/2012	3:33:47 PM	Bypass valve closed
8/27/2012	3:33:47 PM	Bubbler valve closed
8/27/2012	3:33:47 PM	Helium valve opened
8/27/2012	3:33:47 PM	Main Vac valve opened
8/27/2012	3:33:47 PM	Helium MFC set to  20.000000
8/27/2012	3:33:47 PM	H2 MFC set to  0.000000
8/27/2012	3:33:47 PM	BCl3 MFC set to  0.000000
8/27/2012	3:33:47 PM	PH3 MFC set to  0.000000
8/27/2012	3:33:47 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:33:47 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:33:47 PM	Tube furnace set to 150
8/27/2012	3:34:17 PM	Helium valve closed
8/27/2012	3:34:17 PM	H2 valve closed
8/27/2012	3:34:17 PM	BCl3 valve closed
8/27/2012	3:34:17 PM	PH3 valve closed
8/27/2012	3:34:17 PM	SiCl4 pre valve closed
8/27/2012	3:34:17 PM	SiCl4 post valve closed
8/27/2012	3:34:17 PM	Bypass valve closed
8/27/2012	3:34:17 PM	Bubbler valve closed
8/27/2012	3:34:17 PM	Main Vac valve opened
8/27/2012	3:34:17 PM	Helium MFC set to  0.000000
8/27/2012	3:34:17 PM	H2 MFC set to  0.000000
8/27/2012	3:34:17 PM	BCl3 MFC set to  0.000000
8/27/2012	3:34:17 PM	PH3 MFC set to  0.000000
8/27/2012	3:34:17 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:34:17 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:34:17 PM	Tube furnace set to 150
8/27/2012	3:34:47 PM	H2 valve closed
8/27/2012	3:34:47 PM	BCl3 valve closed
8/27/2012	3:34:47 PM	PH3 valve closed
8/27/2012	3:34:47 PM	SiCl4 pre valve closed
8/27/2012	3:34:47 PM	SiCl4 post valve closed
8/27/2012	3:34:47 PM	Bypass valve closed
8/27/2012	3:34:47 PM	Bubbler valve closed
8/27/2012	3:34:47 PM	Helium valve opened
8/27/2012	3:34:47 PM	Main Vac valve opened
8/27/2012	3:34:47 PM	Helium MFC set to  20.000000
8/27/2012	3:34:47 PM	H2 MFC set to  0.000000
8/27/2012	3:34:47 PM	BCl3 MFC set to  0.000000
8/27/2012	3:34:47 PM	PH3 MFC set to  0.000000
8/27/2012	3:34:47 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:34:47 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:34:47 PM	Tube furnace set to 150
8/27/2012	3:35:17 PM	Helium valve closed
8/27/2012	3:35:17 PM	H2 valve closed
8/27/2012	3:35:17 PM	BCl3 valve closed
8/27/2012	3:35:17 PM	PH3 valve closed
8/27/2012	3:35:17 PM	SiCl4 pre valve closed
8/27/2012	3:35:17 PM	SiCl4 post valve closed
8/27/2012	3:35:17 PM	Bypass valve closed
8/27/2012	3:35:17 PM	Bubbler valve closed
8/27/2012	3:35:17 PM	Main Vac valve opened
8/27/2012	3:35:17 PM	Helium MFC set to  0.000000
8/27/2012	3:35:17 PM	H2 MFC set to  0.000000
8/27/2012	3:35:17 PM	BCl3 MFC set to  0.000000
8/27/2012	3:35:17 PM	PH3 MFC set to  0.000000
8/27/2012	3:35:17 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:35:17 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:35:17 PM	Tube furnace set to 150
8/27/2012	3:35:48 PM	H2 valve closed
8/27/2012	3:35:48 PM	BCl3 valve closed
8/27/2012	3:35:48 PM	PH3 valve closed
8/27/2012	3:35:48 PM	SiCl4 pre valve closed
8/27/2012	3:35:48 PM	SiCl4 post valve closed
8/27/2012	3:35:48 PM	Bypass valve closed
8/27/2012	3:35:48 PM	Bubbler valve closed
8/27/2012	3:35:48 PM	Helium valve opened
8/27/2012	3:35:48 PM	Main Vac valve opened
8/27/2012	3:35:48 PM	Helium MFC set to  20.000000
8/27/2012	3:35:48 PM	H2 MFC set to  0.000000
8/27/2012	3:35:48 PM	BCl3 MFC set to  0.000000
8/27/2012	3:35:48 PM	PH3 MFC set to  0.000000
8/27/2012	3:35:48 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:35:48 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:35:48 PM	Tube furnace set to 150
8/27/2012	3:36:18 PM	Helium valve closed
8/27/2012	3:36:18 PM	H2 valve closed
8/27/2012	3:36:18 PM	BCl3 valve closed
8/27/2012	3:36:18 PM	PH3 valve closed
8/27/2012	3:36:18 PM	SiCl4 pre valve closed
8/27/2012	3:36:18 PM	SiCl4 post valve closed
8/27/2012	3:36:18 PM	Bypass valve closed
8/27/2012	3:36:18 PM	Bubbler valve closed
8/27/2012	3:36:18 PM	Main Vac valve opened
8/27/2012	3:36:18 PM	Helium MFC set to  0.000000
8/27/2012	3:36:18 PM	H2 MFC set to  0.000000
8/27/2012	3:36:18 PM	BCl3 MFC set to  0.000000
8/27/2012	3:36:18 PM	PH3 MFC set to  0.000000
8/27/2012	3:36:18 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:36:18 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:36:18 PM	Tube furnace set to 150
8/27/2012	3:36:48 PM	H2 valve closed
8/27/2012	3:36:48 PM	BCl3 valve closed
8/27/2012	3:36:48 PM	PH3 valve closed
8/27/2012	3:36:48 PM	SiCl4 pre valve closed
8/27/2012	3:36:48 PM	SiCl4 post valve closed
8/27/2012	3:36:48 PM	Bypass valve closed
8/27/2012	3:36:48 PM	Bubbler valve closed
8/27/2012	3:36:48 PM	Helium valve opened
8/27/2012	3:36:48 PM	Main Vac valve opened
8/27/2012	3:36:48 PM	Helium MFC set to  20.000000
8/27/2012	3:36:48 PM	H2 MFC set to  0.000000
8/27/2012	3:36:48 PM	BCl3 MFC set to  0.000000
8/27/2012	3:36:48 PM	PH3 MFC set to  0.000000
8/27/2012	3:36:48 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:36:48 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:36:48 PM	Tube furnace set to 150
8/27/2012	3:37:18 PM	Helium valve closed
8/27/2012	3:37:18 PM	H2 valve closed
8/27/2012	3:37:18 PM	BCl3 valve closed
8/27/2012	3:37:18 PM	PH3 valve closed
8/27/2012	3:37:18 PM	SiCl4 pre valve closed
8/27/2012	3:37:18 PM	SiCl4 post valve closed
8/27/2012	3:37:18 PM	Bypass valve closed
8/27/2012	3:37:18 PM	Bubbler valve closed
8/27/2012	3:37:18 PM	Main Vac valve opened
8/27/2012	3:37:18 PM	Helium MFC set to  0.000000
8/27/2012	3:37:18 PM	H2 MFC set to  0.000000
8/27/2012	3:37:18 PM	BCl3 MFC set to  0.000000
8/27/2012	3:37:18 PM	PH3 MFC set to  0.000000
8/27/2012	3:37:18 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:37:18 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:37:18 PM	Tube furnace set to 150
8/27/2012	3:37:48 PM	H2 valve closed
8/27/2012	3:37:48 PM	BCl3 valve closed
8/27/2012	3:37:49 PM	PH3 valve closed
8/27/2012	3:37:49 PM	SiCl4 pre valve closed
8/27/2012	3:37:49 PM	SiCl4 post valve closed
8/27/2012	3:37:49 PM	Bypass valve closed
8/27/2012	3:37:49 PM	Bubbler valve closed
8/27/2012	3:37:49 PM	Helium valve opened
8/27/2012	3:37:49 PM	Main Vac valve opened
8/27/2012	3:37:49 PM	Helium MFC set to  20.000000
8/27/2012	3:37:49 PM	H2 MFC set to  0.000000
8/27/2012	3:37:49 PM	BCl3 MFC set to  0.000000
8/27/2012	3:37:49 PM	PH3 MFC set to  0.000000
8/27/2012	3:37:49 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:37:49 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:37:49 PM	Tube furnace set to 150
8/27/2012	3:38:19 PM	Helium valve closed
8/27/2012	3:38:19 PM	H2 valve closed
8/27/2012	3:38:19 PM	BCl3 valve closed
8/27/2012	3:38:19 PM	PH3 valve closed
8/27/2012	3:38:19 PM	SiCl4 pre valve closed
8/27/2012	3:38:19 PM	SiCl4 post valve closed
8/27/2012	3:38:19 PM	Bypass valve closed
8/27/2012	3:38:19 PM	Bubbler valve closed
8/27/2012	3:38:19 PM	Main Vac valve opened
8/27/2012	3:38:19 PM	Helium MFC set to  0.000000
8/27/2012	3:38:19 PM	H2 MFC set to  0.000000
8/27/2012	3:38:19 PM	BCl3 MFC set to  0.000000
8/27/2012	3:38:19 PM	PH3 MFC set to  0.000000
8/27/2012	3:38:19 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:38:19 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:38:19 PM	Tube furnace set to 150
8/27/2012	3:38:49 PM	H2 valve closed
8/27/2012	3:38:49 PM	BCl3 valve closed
8/27/2012	3:38:49 PM	PH3 valve closed
8/27/2012	3:38:49 PM	SiCl4 pre valve closed
8/27/2012	3:38:49 PM	SiCl4 post valve closed
8/27/2012	3:38:49 PM	Bypass valve closed
8/27/2012	3:38:49 PM	Bubbler valve closed
8/27/2012	3:38:49 PM	Helium valve opened
8/27/2012	3:38:49 PM	Main Vac valve opened
8/27/2012	3:38:49 PM	Helium MFC set to  20.000000
8/27/2012	3:38:49 PM	H2 MFC set to  0.000000
8/27/2012	3:38:49 PM	BCl3 MFC set to  0.000000
8/27/2012	3:38:49 PM	PH3 MFC set to  0.000000
8/27/2012	3:38:49 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:38:49 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:38:49 PM	Tube furnace set to 150
8/27/2012	3:39:19 PM	Helium valve closed
8/27/2012	3:39:19 PM	H2 valve closed
8/27/2012	3:39:19 PM	BCl3 valve closed
8/27/2012	3:39:19 PM	PH3 valve closed
8/27/2012	3:39:19 PM	SiCl4 pre valve closed
8/27/2012	3:39:19 PM	SiCl4 post valve closed
8/27/2012	3:39:19 PM	Bypass valve closed
8/27/2012	3:39:19 PM	Bubbler valve closed
8/27/2012	3:39:19 PM	Main Vac valve opened
8/27/2012	3:39:19 PM	Helium MFC set to  0.000000
8/27/2012	3:39:19 PM	H2 MFC set to  0.000000
8/27/2012	3:39:19 PM	BCl3 MFC set to  0.000000
8/27/2012	3:39:19 PM	PH3 MFC set to  0.000000
8/27/2012	3:39:19 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:39:19 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:39:19 PM	Tube furnace set to 150
8/27/2012	3:39:49 PM	H2 valve closed
8/27/2012	3:39:50 PM	BCl3 valve closed
8/27/2012	3:39:50 PM	PH3 valve closed
8/27/2012	3:39:50 PM	SiCl4 pre valve closed
8/27/2012	3:39:50 PM	SiCl4 post valve closed
8/27/2012	3:39:50 PM	Bypass valve closed
8/27/2012	3:39:50 PM	Bubbler valve closed
8/27/2012	3:39:50 PM	Helium valve opened
8/27/2012	3:39:50 PM	Main Vac valve opened
8/27/2012	3:39:50 PM	Helium MFC set to  20.000000
8/27/2012	3:39:50 PM	H2 MFC set to  0.000000
8/27/2012	3:39:50 PM	BCl3 MFC set to  0.000000
8/27/2012	3:39:50 PM	PH3 MFC set to  0.000000
8/27/2012	3:39:50 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:39:50 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:39:50 PM	Tube furnace set to 150
8/27/2012	3:40:20 PM	Helium valve closed
8/27/2012	3:40:20 PM	H2 valve closed
8/27/2012	3:40:20 PM	BCl3 valve closed
8/27/2012	3:40:20 PM	PH3 valve closed
8/27/2012	3:40:20 PM	SiCl4 pre valve closed
8/27/2012	3:40:20 PM	SiCl4 post valve closed
8/27/2012	3:40:20 PM	Bypass valve closed
8/27/2012	3:40:20 PM	Bubbler valve closed
8/27/2012	3:40:20 PM	Main Vac valve opened
8/27/2012	3:40:20 PM	Helium MFC set to  0.000000
8/27/2012	3:40:20 PM	H2 MFC set to  0.000000
8/27/2012	3:40:20 PM	BCl3 MFC set to  0.000000
8/27/2012	3:40:20 PM	PH3 MFC set to  0.000000
8/27/2012	3:40:20 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:40:20 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:40:20 PM	Tube furnace set to 150
8/27/2012	3:40:50 PM	H2 valve closed
8/27/2012	3:40:50 PM	BCl3 valve closed
8/27/2012	3:40:50 PM	PH3 valve closed
8/27/2012	3:40:50 PM	SiCl4 pre valve closed
8/27/2012	3:40:50 PM	SiCl4 post valve closed
8/27/2012	3:40:50 PM	Bypass valve closed
8/27/2012	3:40:50 PM	Bubbler valve closed
8/27/2012	3:40:50 PM	Helium valve opened
8/27/2012	3:40:50 PM	Main Vac valve opened
8/27/2012	3:40:50 PM	Helium MFC set to  20.000000
8/27/2012	3:40:50 PM	H2 MFC set to  0.000000
8/27/2012	3:40:50 PM	BCl3 MFC set to  0.000000
8/27/2012	3:40:50 PM	PH3 MFC set to  0.000000
8/27/2012	3:40:50 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:40:50 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:40:50 PM	Tube furnace set to 150
8/27/2012	3:41:20 PM	Helium valve closed
8/27/2012	3:41:20 PM	H2 valve closed
8/27/2012	3:41:20 PM	BCl3 valve closed
8/27/2012	3:41:20 PM	PH3 valve closed
8/27/2012	3:41:20 PM	SiCl4 pre valve closed
8/27/2012	3:41:20 PM	SiCl4 post valve closed
8/27/2012	3:41:20 PM	Bypass valve closed
8/27/2012	3:41:20 PM	Bubbler valve closed
8/27/2012	3:41:20 PM	Main Vac valve opened
8/27/2012	3:41:20 PM	Helium MFC set to  0.000000
8/27/2012	3:41:20 PM	H2 MFC set to  0.000000
8/27/2012	3:41:20 PM	BCl3 MFC set to  0.000000
8/27/2012	3:41:20 PM	PH3 MFC set to  0.000000
8/27/2012	3:41:20 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:41:20 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:41:20 PM	Tube furnace set to 150
8/27/2012	3:41:21 PM	Run finished at 3:41 PM
8/27/2012	3:41:48 PM	Main Vac valve closed
8/27/2012	3:42:02 PM	Main Vac valve opened
8/27/2012	3:42:16 PM	Recipe started at 3:42 PM
8/27/2012	3:42:16 PM	Helium valve closed
8/27/2012	3:42:16 PM	H2 valve closed
8/27/2012	3:42:16 PM	BCl3 valve closed
8/27/2012	3:42:16 PM	PH3 valve closed
8/27/2012	3:42:16 PM	SiCl4 pre valve closed
8/27/2012	3:42:16 PM	SiCl4 post valve closed
8/27/2012	3:42:16 PM	Bypass valve closed
8/27/2012	3:42:16 PM	Bubbler valve closed
8/27/2012	3:42:16 PM	Main Vac valve opened
8/27/2012	3:42:16 PM	Helium MFC set to  0.000000
8/27/2012	3:42:16 PM	H2 MFC set to  0.000000
8/27/2012	3:42:16 PM	BCl3 MFC set to  0.000000
8/27/2012	3:42:16 PM	PH3 MFC set to  0.000000
8/27/2012	3:42:16 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:42:16 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:42:16 PM	Tube furnace set to 150
8/27/2012	3:42:20 PM	H2 valve closed
8/27/2012	3:42:20 PM	BCl3 valve closed
8/27/2012	3:42:20 PM	PH3 valve closed
8/27/2012	3:42:20 PM	SiCl4 pre valve closed
8/27/2012	3:42:20 PM	SiCl4 post valve closed
8/27/2012	3:42:20 PM	Bypass valve closed
8/27/2012	3:42:20 PM	Bubbler valve closed
8/27/2012	3:42:20 PM	Helium valve opened
8/27/2012	3:42:20 PM	Main Vac valve opened
8/27/2012	3:42:20 PM	Helium MFC set to  20.000000
8/27/2012	3:42:20 PM	H2 MFC set to  0.000000
8/27/2012	3:42:20 PM	BCl3 MFC set to  0.000000
8/27/2012	3:42:20 PM	PH3 MFC set to  0.000000
8/27/2012	3:42:20 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:42:20 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:42:20 PM	Tube furnace set to 150
8/27/2012	3:42:50 PM	Helium valve closed
8/27/2012	3:42:50 PM	H2 valve closed
8/27/2012	3:42:50 PM	BCl3 valve closed
8/27/2012	3:42:50 PM	PH3 valve closed
8/27/2012	3:42:50 PM	SiCl4 pre valve closed
8/27/2012	3:42:50 PM	SiCl4 post valve closed
8/27/2012	3:42:50 PM	Bypass valve closed
8/27/2012	3:42:50 PM	Bubbler valve closed
8/27/2012	3:42:50 PM	Main Vac valve opened
8/27/2012	3:42:50 PM	Helium MFC set to  0.000000
8/27/2012	3:42:50 PM	H2 MFC set to  0.000000
8/27/2012	3:42:50 PM	BCl3 MFC set to  0.000000
8/27/2012	3:42:50 PM	PH3 MFC set to  0.000000
8/27/2012	3:42:50 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:42:50 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:42:50 PM	Tube furnace set to 150
8/27/2012	3:43:20 PM	H2 valve closed
8/27/2012	3:43:20 PM	BCl3 valve closed
8/27/2012	3:43:20 PM	PH3 valve closed
8/27/2012	3:43:20 PM	SiCl4 pre valve closed
8/27/2012	3:43:20 PM	SiCl4 post valve closed
8/27/2012	3:43:20 PM	Bypass valve closed
8/27/2012	3:43:20 PM	Bubbler valve closed
8/27/2012	3:43:20 PM	Helium valve opened
8/27/2012	3:43:20 PM	Main Vac valve opened
8/27/2012	3:43:20 PM	Helium MFC set to  20.000000
8/27/2012	3:43:20 PM	H2 MFC set to  0.000000
8/27/2012	3:43:20 PM	BCl3 MFC set to  0.000000
8/27/2012	3:43:20 PM	PH3 MFC set to  0.000000
8/27/2012	3:43:20 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:43:20 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:43:20 PM	Tube furnace set to 150
8/27/2012	3:43:50 PM	Helium valve closed
8/27/2012	3:43:50 PM	H2 valve closed
8/27/2012	3:43:50 PM	BCl3 valve closed
8/27/2012	3:43:50 PM	PH3 valve closed
8/27/2012	3:43:50 PM	SiCl4 pre valve closed
8/27/2012	3:43:50 PM	SiCl4 post valve closed
8/27/2012	3:43:50 PM	Bypass valve closed
8/27/2012	3:43:50 PM	Bubbler valve closed
8/27/2012	3:43:51 PM	Main Vac valve opened
8/27/2012	3:43:51 PM	Helium MFC set to  0.000000
8/27/2012	3:43:51 PM	H2 MFC set to  0.000000
8/27/2012	3:43:51 PM	BCl3 MFC set to  0.000000
8/27/2012	3:43:51 PM	PH3 MFC set to  0.000000
8/27/2012	3:43:51 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:43:51 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:43:51 PM	Tube furnace set to 150
8/27/2012	3:44:21 PM	H2 valve closed
8/27/2012	3:44:21 PM	BCl3 valve closed
8/27/2012	3:44:21 PM	PH3 valve closed
8/27/2012	3:44:21 PM	SiCl4 pre valve closed
8/27/2012	3:44:21 PM	SiCl4 post valve closed
8/27/2012	3:44:21 PM	Bypass valve closed
8/27/2012	3:44:21 PM	Bubbler valve closed
8/27/2012	3:44:21 PM	Helium valve opened
8/27/2012	3:44:21 PM	Main Vac valve opened
8/27/2012	3:44:21 PM	Helium MFC set to  20.000000
8/27/2012	3:44:21 PM	H2 MFC set to  0.000000
8/27/2012	3:44:21 PM	BCl3 MFC set to  0.000000
8/27/2012	3:44:21 PM	PH3 MFC set to  0.000000
8/27/2012	3:44:21 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:44:21 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:44:21 PM	Tube furnace set to 150
8/27/2012	3:44:51 PM	Helium valve closed
8/27/2012	3:44:51 PM	H2 valve closed
8/27/2012	3:44:51 PM	BCl3 valve closed
8/27/2012	3:44:51 PM	PH3 valve closed
8/27/2012	3:44:51 PM	SiCl4 pre valve closed
8/27/2012	3:44:51 PM	SiCl4 post valve closed
8/27/2012	3:44:51 PM	Bypass valve closed
8/27/2012	3:44:51 PM	Bubbler valve closed
8/27/2012	3:44:51 PM	Main Vac valve opened
8/27/2012	3:44:51 PM	Helium MFC set to  0.000000
8/27/2012	3:44:51 PM	H2 MFC set to  0.000000
8/27/2012	3:44:51 PM	BCl3 MFC set to  0.000000
8/27/2012	3:44:51 PM	PH3 MFC set to  0.000000
8/27/2012	3:44:51 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:44:51 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:44:51 PM	Tube furnace set to 150
8/27/2012	3:45:21 PM	H2 valve closed
8/27/2012	3:45:21 PM	BCl3 valve closed
8/27/2012	3:45:21 PM	PH3 valve closed
8/27/2012	3:45:21 PM	SiCl4 pre valve closed
8/27/2012	3:45:21 PM	SiCl4 post valve closed
8/27/2012	3:45:21 PM	Bypass valve closed
8/27/2012	3:45:21 PM	Bubbler valve closed
8/27/2012	3:45:21 PM	Helium valve opened
8/27/2012	3:45:21 PM	Main Vac valve opened
8/27/2012	3:45:21 PM	Helium MFC set to  20.000000
8/27/2012	3:45:21 PM	H2 MFC set to  0.000000
8/27/2012	3:45:21 PM	BCl3 MFC set to  0.000000
8/27/2012	3:45:21 PM	PH3 MFC set to  0.000000
8/27/2012	3:45:21 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:45:21 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:45:21 PM	Tube furnace set to 150
8/27/2012	3:45:51 PM	Helium valve closed
8/27/2012	3:45:51 PM	H2 valve closed
8/27/2012	3:45:51 PM	BCl3 valve closed
8/27/2012	3:45:51 PM	PH3 valve closed
8/27/2012	3:45:51 PM	SiCl4 pre valve closed
8/27/2012	3:45:51 PM	SiCl4 post valve closed
8/27/2012	3:45:51 PM	Bypass valve closed
8/27/2012	3:45:51 PM	Bubbler valve closed
8/27/2012	3:45:51 PM	Main Vac valve opened
8/27/2012	3:45:52 PM	Helium MFC set to  0.000000
8/27/2012	3:45:52 PM	H2 MFC set to  0.000000
8/27/2012	3:45:52 PM	BCl3 MFC set to  0.000000
8/27/2012	3:45:52 PM	PH3 MFC set to  0.000000
8/27/2012	3:45:52 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:45:52 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:45:52 PM	Tube furnace set to 150
8/27/2012	3:46:22 PM	H2 valve closed
8/27/2012	3:46:22 PM	BCl3 valve closed
8/27/2012	3:46:22 PM	PH3 valve closed
8/27/2012	3:46:22 PM	SiCl4 pre valve closed
8/27/2012	3:46:22 PM	SiCl4 post valve closed
8/27/2012	3:46:22 PM	Bypass valve closed
8/27/2012	3:46:22 PM	Bubbler valve closed
8/27/2012	3:46:22 PM	Helium valve opened
8/27/2012	3:46:22 PM	Main Vac valve opened
8/27/2012	3:46:22 PM	Helium MFC set to  20.000000
8/27/2012	3:46:22 PM	H2 MFC set to  0.000000
8/27/2012	3:46:22 PM	BCl3 MFC set to  0.000000
8/27/2012	3:46:22 PM	PH3 MFC set to  0.000000
8/27/2012	3:46:22 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:46:22 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:46:22 PM	Tube furnace set to 150
8/27/2012	3:46:52 PM	Helium valve closed
8/27/2012	3:46:52 PM	H2 valve closed
8/27/2012	3:46:52 PM	BCl3 valve closed
8/27/2012	3:46:52 PM	PH3 valve closed
8/27/2012	3:46:52 PM	SiCl4 pre valve closed
8/27/2012	3:46:52 PM	SiCl4 post valve closed
8/27/2012	3:46:52 PM	Bypass valve closed
8/27/2012	3:46:52 PM	Bubbler valve closed
8/27/2012	3:46:52 PM	Main Vac valve opened
8/27/2012	3:46:52 PM	Helium MFC set to  0.000000
8/27/2012	3:46:52 PM	H2 MFC set to  0.000000
8/27/2012	3:46:52 PM	BCl3 MFC set to  0.000000
8/27/2012	3:46:52 PM	PH3 MFC set to  0.000000
8/27/2012	3:46:52 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:46:52 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:46:52 PM	Tube furnace set to 150
8/27/2012	3:47:22 PM	H2 valve closed
8/27/2012	3:47:22 PM	BCl3 valve closed
8/27/2012	3:47:22 PM	PH3 valve closed
8/27/2012	3:47:22 PM	SiCl4 pre valve closed
8/27/2012	3:47:22 PM	SiCl4 post valve closed
8/27/2012	3:47:22 PM	Bypass valve closed
8/27/2012	3:47:22 PM	Bubbler valve closed
8/27/2012	3:47:22 PM	Helium valve opened
8/27/2012	3:47:22 PM	Main Vac valve opened
8/27/2012	3:47:22 PM	Helium MFC set to  20.000000
8/27/2012	3:47:22 PM	H2 MFC set to  0.000000
8/27/2012	3:47:22 PM	BCl3 MFC set to  0.000000
8/27/2012	3:47:22 PM	PH3 MFC set to  0.000000
8/27/2012	3:47:22 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:47:22 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:47:22 PM	Tube furnace set to 150
8/27/2012	3:47:52 PM	Helium valve closed
8/27/2012	3:47:52 PM	H2 valve closed
8/27/2012	3:47:52 PM	BCl3 valve closed
8/27/2012	3:47:52 PM	PH3 valve closed
8/27/2012	3:47:52 PM	SiCl4 pre valve closed
8/27/2012	3:47:52 PM	SiCl4 post valve closed
8/27/2012	3:47:52 PM	Bypass valve closed
8/27/2012	3:47:52 PM	Bubbler valve closed
8/27/2012	3:47:52 PM	Main Vac valve opened
8/27/2012	3:47:52 PM	Helium MFC set to  0.000000
8/27/2012	3:47:53 PM	H2 MFC set to  0.000000
8/27/2012	3:47:53 PM	BCl3 MFC set to  0.000000
8/27/2012	3:47:53 PM	PH3 MFC set to  0.000000
8/27/2012	3:47:53 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:47:53 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:47:53 PM	Tube furnace set to 150
8/27/2012	3:48:23 PM	H2 valve closed
8/27/2012	3:48:23 PM	BCl3 valve closed
8/27/2012	3:48:23 PM	PH3 valve closed
8/27/2012	3:48:23 PM	SiCl4 pre valve closed
8/27/2012	3:48:23 PM	SiCl4 post valve closed
8/27/2012	3:48:23 PM	Bypass valve closed
8/27/2012	3:48:23 PM	Bubbler valve closed
8/27/2012	3:48:23 PM	Helium valve opened
8/27/2012	3:48:23 PM	Main Vac valve opened
8/27/2012	3:48:23 PM	Helium MFC set to  20.000000
8/27/2012	3:48:23 PM	H2 MFC set to  0.000000
8/27/2012	3:48:23 PM	BCl3 MFC set to  0.000000
8/27/2012	3:48:23 PM	PH3 MFC set to  0.000000
8/27/2012	3:48:23 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:48:23 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:48:23 PM	Tube furnace set to 150
8/27/2012	3:48:53 PM	Helium valve closed
8/27/2012	3:48:53 PM	H2 valve closed
8/27/2012	3:48:53 PM	BCl3 valve closed
8/27/2012	3:48:53 PM	PH3 valve closed
8/27/2012	3:48:53 PM	SiCl4 pre valve closed
8/27/2012	3:48:53 PM	SiCl4 post valve closed
8/27/2012	3:48:53 PM	Bypass valve closed
8/27/2012	3:48:53 PM	Bubbler valve closed
8/27/2012	3:48:53 PM	Main Vac valve opened
8/27/2012	3:48:53 PM	Helium MFC set to  0.000000
8/27/2012	3:48:53 PM	H2 MFC set to  0.000000
8/27/2012	3:48:53 PM	BCl3 MFC set to  0.000000
8/27/2012	3:48:53 PM	PH3 MFC set to  0.000000
8/27/2012	3:48:53 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:48:53 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:48:53 PM	Tube furnace set to 150
8/27/2012	3:49:23 PM	H2 valve closed
8/27/2012	3:49:23 PM	BCl3 valve closed
8/27/2012	3:49:23 PM	PH3 valve closed
8/27/2012	3:49:23 PM	SiCl4 pre valve closed
8/27/2012	3:49:23 PM	SiCl4 post valve closed
8/27/2012	3:49:23 PM	Bypass valve closed
8/27/2012	3:49:23 PM	Bubbler valve closed
8/27/2012	3:49:23 PM	Helium valve opened
8/27/2012	3:49:23 PM	Main Vac valve opened
8/27/2012	3:49:23 PM	Helium MFC set to  20.000000
8/27/2012	3:49:23 PM	H2 MFC set to  0.000000
8/27/2012	3:49:23 PM	BCl3 MFC set to  0.000000
8/27/2012	3:49:23 PM	PH3 MFC set to  0.000000
8/27/2012	3:49:23 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:49:23 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:49:23 PM	Tube furnace set to 150
8/27/2012	3:49:53 PM	Helium valve closed
8/27/2012	3:49:53 PM	H2 valve closed
8/27/2012	3:49:53 PM	BCl3 valve closed
8/27/2012	3:49:53 PM	PH3 valve closed
8/27/2012	3:49:53 PM	SiCl4 pre valve closed
8/27/2012	3:49:53 PM	SiCl4 post valve closed
8/27/2012	3:49:53 PM	Bypass valve closed
8/27/2012	3:49:53 PM	Bubbler valve closed
8/27/2012	3:49:53 PM	Main Vac valve opened
8/27/2012	3:49:53 PM	Helium MFC set to  0.000000
8/27/2012	3:49:53 PM	H2 MFC set to  0.000000
8/27/2012	3:49:54 PM	BCl3 MFC set to  0.000000
8/27/2012	3:49:54 PM	PH3 MFC set to  0.000000
8/27/2012	3:49:54 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:49:54 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:49:54 PM	Tube furnace set to 150
8/27/2012	3:50:24 PM	H2 valve closed
8/27/2012	3:50:24 PM	BCl3 valve closed
8/27/2012	3:50:24 PM	PH3 valve closed
8/27/2012	3:50:24 PM	SiCl4 pre valve closed
8/27/2012	3:50:24 PM	SiCl4 post valve closed
8/27/2012	3:50:24 PM	Bypass valve closed
8/27/2012	3:50:24 PM	Bubbler valve closed
8/27/2012	3:50:24 PM	Helium valve opened
8/27/2012	3:50:24 PM	Main Vac valve opened
8/27/2012	3:50:24 PM	Helium MFC set to  20.000000
8/27/2012	3:50:24 PM	H2 MFC set to  0.000000
8/27/2012	3:50:24 PM	BCl3 MFC set to  0.000000
8/27/2012	3:50:24 PM	PH3 MFC set to  0.000000
8/27/2012	3:50:24 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:50:24 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:50:24 PM	Tube furnace set to 150
8/27/2012	3:50:54 PM	Helium valve closed
8/27/2012	3:50:54 PM	H2 valve closed
8/27/2012	3:50:54 PM	BCl3 valve closed
8/27/2012	3:50:54 PM	PH3 valve closed
8/27/2012	3:50:54 PM	SiCl4 pre valve closed
8/27/2012	3:50:54 PM	SiCl4 post valve closed
8/27/2012	3:50:54 PM	Bypass valve closed
8/27/2012	3:50:54 PM	Bubbler valve closed
8/27/2012	3:50:54 PM	Main Vac valve opened
8/27/2012	3:50:54 PM	Helium MFC set to  0.000000
8/27/2012	3:50:54 PM	H2 MFC set to  0.000000
8/27/2012	3:50:54 PM	BCl3 MFC set to  0.000000
8/27/2012	3:50:54 PM	PH3 MFC set to  0.000000
8/27/2012	3:50:54 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:50:54 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:50:54 PM	Tube furnace set to 150
8/27/2012	3:51:24 PM	H2 valve closed
8/27/2012	3:51:24 PM	BCl3 valve closed
8/27/2012	3:51:24 PM	PH3 valve closed
8/27/2012	3:51:24 PM	SiCl4 pre valve closed
8/27/2012	3:51:24 PM	SiCl4 post valve closed
8/27/2012	3:51:24 PM	Bypass valve closed
8/27/2012	3:51:24 PM	Bubbler valve closed
8/27/2012	3:51:24 PM	Helium valve opened
8/27/2012	3:51:24 PM	Main Vac valve opened
8/27/2012	3:51:24 PM	Helium MFC set to  20.000000
8/27/2012	3:51:24 PM	H2 MFC set to  0.000000
8/27/2012	3:51:24 PM	BCl3 MFC set to  0.000000
8/27/2012	3:51:24 PM	PH3 MFC set to  0.000000
8/27/2012	3:51:24 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:51:24 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:51:24 PM	Tube furnace set to 150
8/27/2012	3:51:54 PM	Helium valve closed
8/27/2012	3:51:54 PM	H2 valve closed
8/27/2012	3:51:54 PM	BCl3 valve closed
8/27/2012	3:51:54 PM	PH3 valve closed
8/27/2012	3:51:54 PM	SiCl4 pre valve closed
8/27/2012	3:51:54 PM	SiCl4 post valve closed
8/27/2012	3:51:54 PM	Bypass valve closed
8/27/2012	3:51:54 PM	Bubbler valve closed
8/27/2012	3:51:54 PM	Main Vac valve opened
8/27/2012	3:51:54 PM	Helium MFC set to  0.000000
8/27/2012	3:51:54 PM	H2 MFC set to  0.000000
8/27/2012	3:51:55 PM	BCl3 MFC set to  0.000000
8/27/2012	3:51:55 PM	PH3 MFC set to  0.000000
8/27/2012	3:51:55 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:51:55 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:51:55 PM	Tube furnace set to 150
8/27/2012	3:51:56 PM	Run finished at 3:51 PM
8/27/2012	3:53:50 PM	Main Vac valve closed
8/27/2012	3:54:03 PM	Main Vac valve opened
8/27/2012	3:55:09 PM	Recipe started at 3:55 PM
8/27/2012	3:55:09 PM	Helium valve closed
8/27/2012	3:55:09 PM	H2 valve closed
8/27/2012	3:55:09 PM	BCl3 valve closed
8/27/2012	3:55:09 PM	PH3 valve closed
8/27/2012	3:55:09 PM	SiCl4 pre valve closed
8/27/2012	3:55:09 PM	SiCl4 post valve closed
8/27/2012	3:55:09 PM	Main Vac valve closed
8/27/2012	3:55:09 PM	Bypass valve closed
8/27/2012	3:55:09 PM	Bubbler valve closed
8/27/2012	3:55:09 PM	Helium MFC set to  0.000000
8/27/2012	3:55:09 PM	H2 MFC set to  0.000000
8/27/2012	3:55:09 PM	BCl3 MFC set to  0.000000
8/27/2012	3:55:09 PM	PH3 MFC set to  0.000000
8/27/2012	3:55:09 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:55:09 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:55:10 PM	Tube furnace set to 0
8/27/2012	3:55:13 PM	Helium valve closed
8/27/2012	3:55:13 PM	BCl3 valve closed
8/27/2012	3:55:13 PM	PH3 valve closed
8/27/2012	3:55:13 PM	SiCl4 pre valve closed
8/27/2012	3:55:13 PM	SiCl4 post valve closed
8/27/2012	3:55:13 PM	Main Vac valve closed
8/27/2012	3:55:13 PM	Bypass valve closed
8/27/2012	3:55:13 PM	Bubbler valve closed
8/27/2012	3:55:13 PM	H2 valve opened
8/27/2012	3:55:13 PM	Helium MFC set to  0.000000
8/27/2012	3:55:13 PM	H2 MFC set to  500.000000
8/27/2012	3:55:13 PM	BCl3 MFC set to  0.000000
8/27/2012	3:55:13 PM	PH3 MFC set to  0.000000
8/27/2012	3:55:13 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:55:13 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:55:13 PM	Tube furnace set to 0
8/27/2012	3:56:25 PM	Helium valve closed
8/27/2012	3:56:25 PM	BCl3 valve closed
8/27/2012	3:56:25 PM	PH3 valve closed
8/27/2012	3:56:25 PM	SiCl4 pre valve closed
8/27/2012	3:56:25 PM	SiCl4 post valve closed
8/27/2012	3:56:25 PM	Main Vac valve closed
8/27/2012	3:56:25 PM	Bypass valve closed
8/27/2012	3:56:25 PM	H2 valve opened
8/27/2012	3:56:25 PM	Bubbler valve opened
8/27/2012	3:56:25 PM	Helium MFC set to  0.000000
8/27/2012	3:56:25 PM	H2 MFC set to  500.000000
8/27/2012	3:56:25 PM	BCl3 MFC set to  0.000000
8/27/2012	3:56:25 PM	PH3 MFC set to  0.000000
8/27/2012	3:56:25 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:56:25 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:56:25 PM	Tube furnace set to 0
8/27/2012	3:56:26 PM	Helium valve closed
8/27/2012	3:56:26 PM	BCl3 valve closed
8/27/2012	3:56:26 PM	PH3 valve closed
8/27/2012	3:56:26 PM	SiCl4 pre valve closed
8/27/2012	3:56:26 PM	SiCl4 post valve closed
8/27/2012	3:56:26 PM	Main Vac valve closed
8/27/2012	3:56:26 PM	Bypass valve closed
8/27/2012	3:56:26 PM	H2 valve opened
8/27/2012	3:56:26 PM	Bubbler valve opened
8/27/2012	3:56:26 PM	Helium MFC set to  0.000000
8/27/2012	3:56:26 PM	H2 MFC set to  450.000000
8/27/2012	3:56:26 PM	BCl3 MFC set to  0.000000
8/27/2012	3:56:26 PM	PH3 MFC set to  0.000000
8/27/2012	3:56:26 PM	SiCl4 MFC set to  0.000000
8/27/2012	3:56:26 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	3:56:26 PM	Tube furnace set to 1000
8/27/2012	4:21:26 PM	Helium valve closed
8/27/2012	4:21:26 PM	PH3 valve closed
8/27/2012	4:21:26 PM	Main Vac valve closed
8/27/2012	4:21:26 PM	Bypass valve closed
8/27/2012	4:21:26 PM	H2 valve opened
8/27/2012	4:21:26 PM	BCl3 valve opened
8/27/2012	4:21:26 PM	SiCl4 pre valve opened
8/27/2012	4:21:26 PM	SiCl4 post valve opened
8/27/2012	4:21:26 PM	Bubbler valve opened
8/27/2012	4:21:26 PM	Helium MFC set to  0.000000
8/27/2012	4:21:26 PM	H2 MFC set to  450.000000
8/27/2012	4:21:26 PM	BCl3 MFC set to  1.500000
8/27/2012	4:21:26 PM	PH3 MFC set to  0.000000
8/27/2012	4:21:26 PM	SiCl4 MFC set to  50.000000
8/27/2012	4:21:26 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:21:27 PM	Tube furnace set to 1000
8/27/2012	4:26:27 PM	Helium valve closed
8/27/2012	4:26:27 PM	BCl3 valve closed
8/27/2012	4:26:27 PM	PH3 valve closed
8/27/2012	4:26:27 PM	SiCl4 pre valve closed
8/27/2012	4:26:27 PM	SiCl4 post valve closed
8/27/2012	4:26:27 PM	Main Vac valve closed
8/27/2012	4:26:27 PM	Bypass valve closed
8/27/2012	4:26:27 PM	H2 valve opened
8/27/2012	4:26:27 PM	Bubbler valve opened
8/27/2012	4:26:27 PM	Helium MFC set to  0.000000
8/27/2012	4:26:27 PM	H2 MFC set to  500.000000
8/27/2012	4:26:27 PM	BCl3 MFC set to  0.000000
8/27/2012	4:26:27 PM	PH3 MFC set to  0.000000
8/27/2012	4:26:27 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:26:27 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:26:27 PM	Tube furnace set to 750
8/27/2012	4:31:27 PM	H2 valve closed
8/27/2012	4:31:27 PM	BCl3 valve closed
8/27/2012	4:31:27 PM	PH3 valve closed
8/27/2012	4:31:27 PM	SiCl4 pre valve closed
8/27/2012	4:31:27 PM	SiCl4 post valve closed
8/27/2012	4:31:27 PM	Main Vac valve closed
8/27/2012	4:31:27 PM	Bypass valve closed
8/27/2012	4:31:27 PM	Helium valve opened
8/27/2012	4:31:27 PM	Bubbler valve opened
8/27/2012	4:31:27 PM	Helium MFC set to  500.000000
8/27/2012	4:31:27 PM	H2 MFC set to  0.000000
8/27/2012	4:31:27 PM	BCl3 MFC set to  0.000000
8/27/2012	4:31:27 PM	PH3 MFC set to  0.000000
8/27/2012	4:31:27 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:31:27 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:31:27 PM	Tube furnace set to 0
8/27/2012	4:47:35 PM	Helium valve closed
8/27/2012	4:47:35 PM	H2 valve closed
8/27/2012	4:47:35 PM	BCl3 valve closed
8/27/2012	4:47:35 PM	PH3 valve closed
8/27/2012	4:47:35 PM	SiCl4 pre valve closed
8/27/2012	4:47:35 PM	SiCl4 post valve closed
8/27/2012	4:47:35 PM	Main Vac valve closed
8/27/2012	4:47:35 PM	Bypass valve closed
8/27/2012	4:47:35 PM	Bubbler valve closed
8/27/2012	4:47:35 PM	Helium MFC set to  0.000000
8/27/2012	4:47:35 PM	H2 MFC set to  0.000000
8/27/2012	4:47:35 PM	BCl3 MFC set to  0.000000
8/27/2012	4:47:35 PM	PH3 MFC set to  0.000000
8/27/2012	4:47:35 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:47:35 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:47:35 PM	Tube furnace set to 0
8/27/2012	4:47:36 PM	Run finished at 4:47 PM
8/27/2012	4:47:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	4:47:44 PM	Recipe started at 4:47 PM
8/27/2012	4:47:44 PM	Helium valve closed
8/27/2012	4:47:44 PM	H2 valve closed
8/27/2012	4:47:44 PM	BCl3 valve closed
8/27/2012	4:47:44 PM	PH3 valve closed
8/27/2012	4:47:44 PM	SiCl4 pre valve closed
8/27/2012	4:47:44 PM	SiCl4 post valve closed
8/27/2012	4:47:44 PM	Main Vac valve closed
8/27/2012	4:47:44 PM	Bypass valve closed
8/27/2012	4:47:44 PM	Bubbler valve closed
8/27/2012	4:47:44 PM	Helium MFC set to  0.000000
8/27/2012	4:47:44 PM	H2 MFC set to  0.000000
8/27/2012	4:47:44 PM	BCl3 MFC set to  0.000000
8/27/2012	4:47:44 PM	PH3 MFC set to  0.000000
8/27/2012	4:47:44 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:47:44 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:47:44 PM	Tube furnace set to 0
8/27/2012	4:47:47 PM	H2 valve closed
8/27/2012	4:47:47 PM	BCl3 valve closed
8/27/2012	4:47:47 PM	PH3 valve closed
8/27/2012	4:47:47 PM	SiCl4 pre valve closed
8/27/2012	4:47:47 PM	SiCl4 post valve closed
8/27/2012	4:47:47 PM	Main Vac valve closed
8/27/2012	4:47:47 PM	Bypass valve closed
8/27/2012	4:47:47 PM	Bubbler valve closed
8/27/2012	4:47:47 PM	Helium valve opened
8/27/2012	4:47:47 PM	Helium MFC set to  500.000000
8/27/2012	4:47:47 PM	H2 MFC set to  0.000000
8/27/2012	4:47:47 PM	BCl3 MFC set to  0.000000
8/27/2012	4:47:47 PM	PH3 MFC set to  0.000000
8/27/2012	4:47:47 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:47:47 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:47:48 PM	Tube furnace set to 0
8/27/2012	4:47:48 PM	Helium valve closed
8/27/2012	4:47:48 PM	H2 valve closed
8/27/2012	4:47:48 PM	BCl3 valve closed
8/27/2012	4:47:48 PM	PH3 valve closed
8/27/2012	4:47:48 PM	SiCl4 pre valve closed
8/27/2012	4:47:48 PM	SiCl4 post valve closed
8/27/2012	4:47:48 PM	Main Vac valve closed
8/27/2012	4:47:48 PM	Bypass valve closed
8/27/2012	4:47:48 PM	Bubbler valve closed
8/27/2012	4:47:48 PM	Helium MFC set to  0.000000
8/27/2012	4:47:48 PM	H2 MFC set to  0.000000
8/27/2012	4:47:48 PM	BCl3 MFC set to  0.000000
8/27/2012	4:47:48 PM	PH3 MFC set to  0.000000
8/27/2012	4:47:48 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:47:48 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:47:48 PM	Tube furnace set to 0
8/27/2012	4:47:49 PM	Run finished at 4:47 PM
8/27/2012	4:47:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	4:50:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	4:50:11 PM	Recipe started at 4:50 PM
8/27/2012	4:50:11 PM	Helium valve closed
8/27/2012	4:50:11 PM	H2 valve closed
8/27/2012	4:50:11 PM	BCl3 valve closed
8/27/2012	4:50:11 PM	PH3 valve closed
8/27/2012	4:50:11 PM	SiCl4 pre valve closed
8/27/2012	4:50:11 PM	SiCl4 post valve closed
8/27/2012	4:50:11 PM	Main Vac valve closed
8/27/2012	4:50:11 PM	Bypass valve closed
8/27/2012	4:50:11 PM	Bubbler valve closed
8/27/2012	4:50:11 PM	Helium MFC set to  0.000000
8/27/2012	4:50:11 PM	H2 MFC set to  0.000000
8/27/2012	4:50:11 PM	BCl3 MFC set to  0.000000
8/27/2012	4:50:11 PM	PH3 MFC set to  0.000000
8/27/2012	4:50:11 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:50:11 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:50:12 PM	Tube furnace set to 0
8/27/2012	4:50:15 PM	H2 valve closed
8/27/2012	4:50:15 PM	BCl3 valve closed
8/27/2012	4:50:15 PM	PH3 valve closed
8/27/2012	4:50:15 PM	SiCl4 pre valve closed
8/27/2012	4:50:15 PM	SiCl4 post valve closed
8/27/2012	4:50:15 PM	Main Vac valve closed
8/27/2012	4:50:15 PM	Bypass valve closed
8/27/2012	4:50:15 PM	Bubbler valve closed
8/27/2012	4:50:15 PM	Helium valve opened
8/27/2012	4:50:15 PM	Helium MFC set to  500.000000
8/27/2012	4:50:15 PM	H2 MFC set to  0.000000
8/27/2012	4:50:15 PM	BCl3 MFC set to  0.000000
8/27/2012	4:50:15 PM	PH3 MFC set to  0.000000
8/27/2012	4:50:15 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:50:15 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:50:15 PM	Tube furnace set to 0
8/27/2012	4:50:15 PM	Helium valve closed
8/27/2012	4:50:15 PM	H2 valve closed
8/27/2012	4:50:15 PM	BCl3 valve closed
8/27/2012	4:50:15 PM	PH3 valve closed
8/27/2012	4:50:15 PM	SiCl4 pre valve closed
8/27/2012	4:50:15 PM	SiCl4 post valve closed
8/27/2012	4:50:15 PM	Main Vac valve closed
8/27/2012	4:50:15 PM	Bypass valve closed
8/27/2012	4:50:15 PM	Bubbler valve closed
8/27/2012	4:50:15 PM	Helium MFC set to  0.000000
8/27/2012	4:50:15 PM	H2 MFC set to  0.000000
8/27/2012	4:50:15 PM	BCl3 MFC set to  0.000000
8/27/2012	4:50:15 PM	PH3 MFC set to  0.000000
8/27/2012	4:50:15 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:50:15 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:50:15 PM	Tube furnace set to 0
8/27/2012	4:50:16 PM	Run finished at 4:50 PM
8/27/2012	4:50:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	4:53:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	4:53:55 PM	Recipe started at 4:53 PM
8/27/2012	4:53:56 PM	Helium valve closed
8/27/2012	4:53:56 PM	H2 valve closed
8/27/2012	4:53:56 PM	BCl3 valve closed
8/27/2012	4:53:56 PM	PH3 valve closed
8/27/2012	4:53:56 PM	SiCl4 pre valve closed
8/27/2012	4:53:56 PM	SiCl4 post valve closed
8/27/2012	4:53:56 PM	Main Vac valve closed
8/27/2012	4:53:56 PM	Bubbler valve closed
8/27/2012	4:53:56 PM	Bypass valve opened
8/27/2012	4:53:56 PM	Helium MFC set to  0.000000
8/27/2012	4:53:56 PM	H2 MFC set to  0.000000
8/27/2012	4:53:56 PM	BCl3 MFC set to  0.000000
8/27/2012	4:53:56 PM	PH3 MFC set to  0.000000
8/27/2012	4:53:56 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:53:56 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:53:56 PM	Tube furnace set to 0
8/27/2012	4:55:04 PM	Helium valve closed
8/27/2012	4:55:04 PM	H2 valve closed
8/27/2012	4:55:04 PM	BCl3 valve closed
8/27/2012	4:55:04 PM	PH3 valve closed
8/27/2012	4:55:04 PM	SiCl4 pre valve closed
8/27/2012	4:55:04 PM	SiCl4 post valve closed
8/27/2012	4:55:04 PM	Main Vac valve closed
8/27/2012	4:55:04 PM	Bubbler valve closed
8/27/2012	4:55:04 PM	Bypass valve opened
8/27/2012	4:55:04 PM	Helium MFC set to  0.000000
8/27/2012	4:55:04 PM	H2 MFC set to  0.000000
8/27/2012	4:55:04 PM	BCl3 MFC set to  0.000000
8/27/2012	4:55:04 PM	PH3 MFC set to  0.000000
8/27/2012	4:55:04 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:55:04 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:55:04 PM	Tube furnace set to 0
8/27/2012	4:56:04 PM	Helium valve closed
8/27/2012	4:56:04 PM	H2 valve closed
8/27/2012	4:56:04 PM	BCl3 valve closed
8/27/2012	4:56:04 PM	PH3 valve closed
8/27/2012	4:56:04 PM	SiCl4 pre valve closed
8/27/2012	4:56:04 PM	SiCl4 post valve closed
8/27/2012	4:56:04 PM	Bypass valve closed
8/27/2012	4:56:04 PM	Bubbler valve closed
8/27/2012	4:56:04 PM	Main Vac valve opened
8/27/2012	4:56:04 PM	Helium MFC set to  0.000000
8/27/2012	4:56:04 PM	H2 MFC set to  0.000000
8/27/2012	4:56:04 PM	BCl3 MFC set to  0.000000
8/27/2012	4:56:04 PM	PH3 MFC set to  0.000000
8/27/2012	4:56:04 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:56:04 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:56:04 PM	Tube furnace set to 0
8/27/2012	4:56:05 PM	Run finished at 4:56 PM
8/27/2012	4:56:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	4:58:10 PM	Recipe started at 4:58 PM
8/27/2012	4:58:10 PM	Helium valve closed
8/27/2012	4:58:10 PM	H2 valve closed
8/27/2012	4:58:10 PM	BCl3 valve closed
8/27/2012	4:58:10 PM	PH3 valve closed
8/27/2012	4:58:10 PM	SiCl4 pre valve closed
8/27/2012	4:58:10 PM	SiCl4 post valve closed
8/27/2012	4:58:10 PM	Bypass valve closed
8/27/2012	4:58:10 PM	Bubbler valve closed
8/27/2012	4:58:10 PM	Main Vac valve opened
8/27/2012	4:58:10 PM	Helium MFC set to  0.000000
8/27/2012	4:58:10 PM	H2 MFC set to  0.000000
8/27/2012	4:58:10 PM	BCl3 MFC set to  0.000000
8/27/2012	4:58:10 PM	PH3 MFC set to  0.000000
8/27/2012	4:58:10 PM	SiCl4 MFC set to  0.000000
8/27/2012	4:58:10 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	4:58:10 PM	Tube furnace set to 150
8/27/2012	6:58:10 PM	H2 valve closed
8/27/2012	6:58:10 PM	BCl3 valve closed
8/27/2012	6:58:10 PM	PH3 valve closed
8/27/2012	6:58:10 PM	SiCl4 pre valve closed
8/27/2012	6:58:10 PM	SiCl4 post valve closed
8/27/2012	6:58:10 PM	Bypass valve closed
8/27/2012	6:58:10 PM	Bubbler valve closed
8/27/2012	6:58:10 PM	Helium valve opened
8/27/2012	6:58:10 PM	Main Vac valve opened
8/27/2012	6:58:10 PM	Helium MFC set to  20.000000
8/27/2012	6:58:10 PM	H2 MFC set to  0.000000
8/27/2012	6:58:10 PM	BCl3 MFC set to  0.000000
8/27/2012	6:58:10 PM	PH3 MFC set to  0.000000
8/27/2012	6:58:10 PM	SiCl4 MFC set to  0.000000
8/27/2012	6:58:10 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	6:58:10 PM	Tube furnace set to 150
8/27/2012	6:58:40 PM	Helium valve closed
8/27/2012	6:58:40 PM	H2 valve closed
8/27/2012	6:58:40 PM	BCl3 valve closed
8/27/2012	6:58:40 PM	PH3 valve closed
8/27/2012	6:58:40 PM	SiCl4 pre valve closed
8/27/2012	6:58:40 PM	SiCl4 post valve closed
8/27/2012	6:58:40 PM	Bypass valve closed
8/27/2012	6:58:40 PM	Bubbler valve closed
8/27/2012	6:58:40 PM	Main Vac valve opened
8/27/2012	6:58:40 PM	Helium MFC set to  0.000000
8/27/2012	6:58:40 PM	H2 MFC set to  0.000000
8/27/2012	6:58:40 PM	BCl3 MFC set to  0.000000
8/27/2012	6:58:40 PM	PH3 MFC set to  0.000000
8/27/2012	6:58:40 PM	SiCl4 MFC set to  0.000000
8/27/2012	6:58:40 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	6:58:40 PM	Tube furnace set to 150
8/27/2012	6:59:10 PM	H2 valve closed
8/27/2012	6:59:10 PM	BCl3 valve closed
8/27/2012	6:59:10 PM	PH3 valve closed
8/27/2012	6:59:10 PM	SiCl4 pre valve closed
8/27/2012	6:59:10 PM	SiCl4 post valve closed
8/27/2012	6:59:10 PM	Bypass valve closed
8/27/2012	6:59:10 PM	Bubbler valve closed
8/27/2012	6:59:10 PM	Helium valve opened
8/27/2012	6:59:10 PM	Main Vac valve opened
8/27/2012	6:59:10 PM	Helium MFC set to  20.000000
8/27/2012	6:59:10 PM	H2 MFC set to  0.000000
8/27/2012	6:59:10 PM	BCl3 MFC set to  0.000000
8/27/2012	6:59:10 PM	PH3 MFC set to  0.000000
8/27/2012	6:59:10 PM	SiCl4 MFC set to  0.000000
8/27/2012	6:59:10 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	6:59:10 PM	Tube furnace set to 150
8/27/2012	6:59:41 PM	Helium valve closed
8/27/2012	6:59:41 PM	H2 valve closed
8/27/2012	6:59:41 PM	BCl3 valve closed
8/27/2012	6:59:41 PM	PH3 valve closed
8/27/2012	6:59:41 PM	SiCl4 pre valve closed
8/27/2012	6:59:41 PM	SiCl4 post valve closed
8/27/2012	6:59:41 PM	Bypass valve closed
8/27/2012	6:59:41 PM	Bubbler valve closed
8/27/2012	6:59:41 PM	Main Vac valve opened
8/27/2012	6:59:41 PM	Helium MFC set to  0.000000
8/27/2012	6:59:41 PM	H2 MFC set to  0.000000
8/27/2012	6:59:41 PM	BCl3 MFC set to  0.000000
8/27/2012	6:59:41 PM	PH3 MFC set to  0.000000
8/27/2012	6:59:41 PM	SiCl4 MFC set to  0.000000
8/27/2012	6:59:41 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	6:59:41 PM	Tube furnace set to 150
8/27/2012	7:00:11 PM	H2 valve closed
8/27/2012	7:00:11 PM	BCl3 valve closed
8/27/2012	7:00:11 PM	PH3 valve closed
8/27/2012	7:00:11 PM	SiCl4 pre valve closed
8/27/2012	7:00:11 PM	SiCl4 post valve closed
8/27/2012	7:00:11 PM	Bypass valve closed
8/27/2012	7:00:11 PM	Bubbler valve closed
8/27/2012	7:00:11 PM	Helium valve opened
8/27/2012	7:00:11 PM	Main Vac valve opened
8/27/2012	7:00:11 PM	Helium MFC set to  20.000000
8/27/2012	7:00:11 PM	H2 MFC set to  0.000000
8/27/2012	7:00:11 PM	BCl3 MFC set to  0.000000
8/27/2012	7:00:11 PM	PH3 MFC set to  0.000000
8/27/2012	7:00:11 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:00:11 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:00:11 PM	Tube furnace set to 150
8/27/2012	7:00:41 PM	Helium valve closed
8/27/2012	7:00:41 PM	H2 valve closed
8/27/2012	7:00:41 PM	BCl3 valve closed
8/27/2012	7:00:41 PM	PH3 valve closed
8/27/2012	7:00:41 PM	SiCl4 pre valve closed
8/27/2012	7:00:41 PM	SiCl4 post valve closed
8/27/2012	7:00:41 PM	Bypass valve closed
8/27/2012	7:00:41 PM	Bubbler valve closed
8/27/2012	7:00:41 PM	Main Vac valve opened
8/27/2012	7:00:41 PM	Helium MFC set to  0.000000
8/27/2012	7:00:41 PM	H2 MFC set to  0.000000
8/27/2012	7:00:41 PM	BCl3 MFC set to  0.000000
8/27/2012	7:00:41 PM	PH3 MFC set to  0.000000
8/27/2012	7:00:41 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:00:41 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:00:41 PM	Tube furnace set to 150
8/27/2012	7:01:11 PM	H2 valve closed
8/27/2012	7:01:11 PM	BCl3 valve closed
8/27/2012	7:01:11 PM	PH3 valve closed
8/27/2012	7:01:11 PM	SiCl4 pre valve closed
8/27/2012	7:01:11 PM	SiCl4 post valve closed
8/27/2012	7:01:11 PM	Bypass valve closed
8/27/2012	7:01:11 PM	Bubbler valve closed
8/27/2012	7:01:11 PM	Helium valve opened
8/27/2012	7:01:11 PM	Main Vac valve opened
8/27/2012	7:01:11 PM	Helium MFC set to  20.000000
8/27/2012	7:01:11 PM	H2 MFC set to  0.000000
8/27/2012	7:01:11 PM	BCl3 MFC set to  0.000000
8/27/2012	7:01:11 PM	PH3 MFC set to  0.000000
8/27/2012	7:01:11 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:01:11 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:01:11 PM	Tube furnace set to 150
8/27/2012	7:01:41 PM	Helium valve closed
8/27/2012	7:01:41 PM	H2 valve closed
8/27/2012	7:01:42 PM	BCl3 valve closed
8/27/2012	7:01:42 PM	PH3 valve closed
8/27/2012	7:01:42 PM	SiCl4 pre valve closed
8/27/2012	7:01:42 PM	SiCl4 post valve closed
8/27/2012	7:01:42 PM	Bypass valve closed
8/27/2012	7:01:42 PM	Bubbler valve closed
8/27/2012	7:01:42 PM	Main Vac valve opened
8/27/2012	7:01:42 PM	Helium MFC set to  0.000000
8/27/2012	7:01:42 PM	H2 MFC set to  0.000000
8/27/2012	7:01:42 PM	BCl3 MFC set to  0.000000
8/27/2012	7:01:42 PM	PH3 MFC set to  0.000000
8/27/2012	7:01:42 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:01:42 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:01:42 PM	Tube furnace set to 150
8/27/2012	7:02:12 PM	H2 valve closed
8/27/2012	7:02:12 PM	BCl3 valve closed
8/27/2012	7:02:12 PM	PH3 valve closed
8/27/2012	7:02:12 PM	SiCl4 pre valve closed
8/27/2012	7:02:12 PM	SiCl4 post valve closed
8/27/2012	7:02:12 PM	Bypass valve closed
8/27/2012	7:02:12 PM	Bubbler valve closed
8/27/2012	7:02:12 PM	Helium valve opened
8/27/2012	7:02:12 PM	Main Vac valve opened
8/27/2012	7:02:12 PM	Helium MFC set to  20.000000
8/27/2012	7:02:12 PM	H2 MFC set to  0.000000
8/27/2012	7:02:12 PM	BCl3 MFC set to  0.000000
8/27/2012	7:02:12 PM	PH3 MFC set to  0.000000
8/27/2012	7:02:12 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:02:12 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:02:12 PM	Tube furnace set to 150
8/27/2012	7:02:42 PM	Helium valve closed
8/27/2012	7:02:42 PM	H2 valve closed
8/27/2012	7:02:42 PM	BCl3 valve closed
8/27/2012	7:02:42 PM	PH3 valve closed
8/27/2012	7:02:42 PM	SiCl4 pre valve closed
8/27/2012	7:02:42 PM	SiCl4 post valve closed
8/27/2012	7:02:42 PM	Bypass valve closed
8/27/2012	7:02:42 PM	Bubbler valve closed
8/27/2012	7:02:42 PM	Main Vac valve opened
8/27/2012	7:02:42 PM	Helium MFC set to  0.000000
8/27/2012	7:02:42 PM	H2 MFC set to  0.000000
8/27/2012	7:02:42 PM	BCl3 MFC set to  0.000000
8/27/2012	7:02:42 PM	PH3 MFC set to  0.000000
8/27/2012	7:02:42 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:02:42 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:02:42 PM	Tube furnace set to 150
8/27/2012	7:03:12 PM	H2 valve closed
8/27/2012	7:03:12 PM	BCl3 valve closed
8/27/2012	7:03:12 PM	PH3 valve closed
8/27/2012	7:03:12 PM	SiCl4 pre valve closed
8/27/2012	7:03:12 PM	SiCl4 post valve closed
8/27/2012	7:03:12 PM	Bypass valve closed
8/27/2012	7:03:12 PM	Bubbler valve closed
8/27/2012	7:03:12 PM	Helium valve opened
8/27/2012	7:03:12 PM	Main Vac valve opened
8/27/2012	7:03:12 PM	Helium MFC set to  20.000000
8/27/2012	7:03:12 PM	H2 MFC set to  0.000000
8/27/2012	7:03:12 PM	BCl3 MFC set to  0.000000
8/27/2012	7:03:12 PM	PH3 MFC set to  0.000000
8/27/2012	7:03:12 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:03:12 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:03:12 PM	Tube furnace set to 150
8/27/2012	7:03:42 PM	Helium valve closed
8/27/2012	7:03:42 PM	H2 valve closed
8/27/2012	7:03:42 PM	BCl3 valve closed
8/27/2012	7:03:42 PM	PH3 valve closed
8/27/2012	7:03:42 PM	SiCl4 pre valve closed
8/27/2012	7:03:43 PM	SiCl4 post valve closed
8/27/2012	7:03:43 PM	Bypass valve closed
8/27/2012	7:03:43 PM	Bubbler valve closed
8/27/2012	7:03:43 PM	Main Vac valve opened
8/27/2012	7:03:43 PM	Helium MFC set to  0.000000
8/27/2012	7:03:43 PM	H2 MFC set to  0.000000
8/27/2012	7:03:43 PM	BCl3 MFC set to  0.000000
8/27/2012	7:03:43 PM	PH3 MFC set to  0.000000
8/27/2012	7:03:43 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:03:43 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:03:43 PM	Tube furnace set to 150
8/27/2012	7:04:13 PM	H2 valve closed
8/27/2012	7:04:13 PM	BCl3 valve closed
8/27/2012	7:04:13 PM	PH3 valve closed
8/27/2012	7:04:13 PM	SiCl4 pre valve closed
8/27/2012	7:04:13 PM	SiCl4 post valve closed
8/27/2012	7:04:13 PM	Bypass valve closed
8/27/2012	7:04:13 PM	Bubbler valve closed
8/27/2012	7:04:13 PM	Helium valve opened
8/27/2012	7:04:13 PM	Main Vac valve opened
8/27/2012	7:04:13 PM	Helium MFC set to  20.000000
8/27/2012	7:04:13 PM	H2 MFC set to  0.000000
8/27/2012	7:04:13 PM	BCl3 MFC set to  0.000000
8/27/2012	7:04:13 PM	PH3 MFC set to  0.000000
8/27/2012	7:04:13 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:04:13 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:04:13 PM	Tube furnace set to 150
8/27/2012	7:04:43 PM	Helium valve closed
8/27/2012	7:04:43 PM	H2 valve closed
8/27/2012	7:04:43 PM	BCl3 valve closed
8/27/2012	7:04:43 PM	PH3 valve closed
8/27/2012	7:04:43 PM	SiCl4 pre valve closed
8/27/2012	7:04:43 PM	SiCl4 post valve closed
8/27/2012	7:04:43 PM	Bypass valve closed
8/27/2012	7:04:43 PM	Bubbler valve closed
8/27/2012	7:04:43 PM	Main Vac valve opened
8/27/2012	7:04:43 PM	Helium MFC set to  0.000000
8/27/2012	7:04:43 PM	H2 MFC set to  0.000000
8/27/2012	7:04:43 PM	BCl3 MFC set to  0.000000
8/27/2012	7:04:43 PM	PH3 MFC set to  0.000000
8/27/2012	7:04:43 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:04:43 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:04:43 PM	Tube furnace set to 150
8/27/2012	7:05:13 PM	H2 valve closed
8/27/2012	7:05:13 PM	BCl3 valve closed
8/27/2012	7:05:13 PM	PH3 valve closed
8/27/2012	7:05:13 PM	SiCl4 pre valve closed
8/27/2012	7:05:13 PM	SiCl4 post valve closed
8/27/2012	7:05:13 PM	Bypass valve closed
8/27/2012	7:05:13 PM	Bubbler valve closed
8/27/2012	7:05:13 PM	Helium valve opened
8/27/2012	7:05:13 PM	Main Vac valve opened
8/27/2012	7:05:13 PM	Helium MFC set to  20.000000
8/27/2012	7:05:13 PM	H2 MFC set to  0.000000
8/27/2012	7:05:13 PM	BCl3 MFC set to  0.000000
8/27/2012	7:05:13 PM	PH3 MFC set to  0.000000
8/27/2012	7:05:13 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:05:13 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:05:13 PM	Tube furnace set to 150
8/27/2012	7:05:43 PM	Helium valve closed
8/27/2012	7:05:43 PM	H2 valve closed
8/27/2012	7:05:43 PM	BCl3 valve closed
8/27/2012	7:05:43 PM	PH3 valve closed
8/27/2012	7:05:43 PM	SiCl4 pre valve closed
8/27/2012	7:05:43 PM	SiCl4 post valve closed
8/27/2012	7:05:43 PM	Bypass valve closed
8/27/2012	7:05:43 PM	Bubbler valve closed
8/27/2012	7:05:43 PM	Main Vac valve opened
8/27/2012	7:05:44 PM	Helium MFC set to  0.000000
8/27/2012	7:05:44 PM	H2 MFC set to  0.000000
8/27/2012	7:05:44 PM	BCl3 MFC set to  0.000000
8/27/2012	7:05:44 PM	PH3 MFC set to  0.000000
8/27/2012	7:05:44 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:05:44 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:05:44 PM	Tube furnace set to 150
8/27/2012	7:06:14 PM	H2 valve closed
8/27/2012	7:06:14 PM	BCl3 valve closed
8/27/2012	7:06:14 PM	PH3 valve closed
8/27/2012	7:06:14 PM	SiCl4 pre valve closed
8/27/2012	7:06:14 PM	SiCl4 post valve closed
8/27/2012	7:06:14 PM	Bypass valve closed
8/27/2012	7:06:14 PM	Bubbler valve closed
8/27/2012	7:06:14 PM	Helium valve opened
8/27/2012	7:06:14 PM	Main Vac valve opened
8/27/2012	7:06:14 PM	Helium MFC set to  20.000000
8/27/2012	7:06:14 PM	H2 MFC set to  0.000000
8/27/2012	7:06:14 PM	BCl3 MFC set to  0.000000
8/27/2012	7:06:14 PM	PH3 MFC set to  0.000000
8/27/2012	7:06:14 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:06:14 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:06:14 PM	Tube furnace set to 150
8/27/2012	7:06:44 PM	Helium valve closed
8/27/2012	7:06:44 PM	H2 valve closed
8/27/2012	7:06:44 PM	BCl3 valve closed
8/27/2012	7:06:44 PM	PH3 valve closed
8/27/2012	7:06:44 PM	SiCl4 pre valve closed
8/27/2012	7:06:44 PM	SiCl4 post valve closed
8/27/2012	7:06:44 PM	Bypass valve closed
8/27/2012	7:06:44 PM	Bubbler valve closed
8/27/2012	7:06:44 PM	Main Vac valve opened
8/27/2012	7:06:44 PM	Helium MFC set to  0.000000
8/27/2012	7:06:44 PM	H2 MFC set to  0.000000
8/27/2012	7:06:44 PM	BCl3 MFC set to  0.000000
8/27/2012	7:06:44 PM	PH3 MFC set to  0.000000
8/27/2012	7:06:44 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:06:44 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:06:44 PM	Tube furnace set to 150
8/27/2012	7:07:14 PM	H2 valve closed
8/27/2012	7:07:14 PM	BCl3 valve closed
8/27/2012	7:07:14 PM	PH3 valve closed
8/27/2012	7:07:14 PM	SiCl4 pre valve closed
8/27/2012	7:07:14 PM	SiCl4 post valve closed
8/27/2012	7:07:14 PM	Bypass valve closed
8/27/2012	7:07:14 PM	Bubbler valve closed
8/27/2012	7:07:14 PM	Helium valve opened
8/27/2012	7:07:14 PM	Main Vac valve opened
8/27/2012	7:07:14 PM	Helium MFC set to  20.000000
8/27/2012	7:07:14 PM	H2 MFC set to  0.000000
8/27/2012	7:07:14 PM	BCl3 MFC set to  0.000000
8/27/2012	7:07:14 PM	PH3 MFC set to  0.000000
8/27/2012	7:07:14 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:07:14 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:07:14 PM	Tube furnace set to 150
8/27/2012	7:07:44 PM	Helium valve closed
8/27/2012	7:07:44 PM	H2 valve closed
8/27/2012	7:07:44 PM	BCl3 valve closed
8/27/2012	7:07:44 PM	PH3 valve closed
8/27/2012	7:07:44 PM	SiCl4 pre valve closed
8/27/2012	7:07:44 PM	SiCl4 post valve closed
8/27/2012	7:07:44 PM	Bypass valve closed
8/27/2012	7:07:44 PM	Bubbler valve closed
8/27/2012	7:07:44 PM	Main Vac valve opened
8/27/2012	7:07:44 PM	Helium MFC set to  0.000000
8/27/2012	7:07:44 PM	H2 MFC set to  0.000000
8/27/2012	7:07:44 PM	BCl3 MFC set to  0.000000
8/27/2012	7:07:45 PM	PH3 MFC set to  0.000000
8/27/2012	7:07:45 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:07:45 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:07:45 PM	Tube furnace set to 150
8/27/2012	7:07:46 PM	Run finished at 7:07 PM
8/27/2012	7:56:30 PM	Main Vac valve closed
8/27/2012	7:56:43 PM	Main Vac valve opened
8/27/2012	7:57:48 PM	Recipe started at 7:57 PM
8/27/2012	7:57:48 PM	Helium valve closed
8/27/2012	7:57:48 PM	H2 valve closed
8/27/2012	7:57:48 PM	BCl3 valve closed
8/27/2012	7:57:48 PM	PH3 valve closed
8/27/2012	7:57:48 PM	SiCl4 pre valve closed
8/27/2012	7:57:48 PM	SiCl4 post valve closed
8/27/2012	7:57:48 PM	Main Vac valve closed
8/27/2012	7:57:48 PM	Bypass valve closed
8/27/2012	7:57:48 PM	Bubbler valve closed
8/27/2012	7:57:48 PM	Helium MFC set to  0.000000
8/27/2012	7:57:48 PM	H2 MFC set to  0.000000
8/27/2012	7:57:48 PM	BCl3 MFC set to  0.000000
8/27/2012	7:57:48 PM	PH3 MFC set to  0.000000
8/27/2012	7:57:48 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:57:48 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:57:48 PM	Tube furnace set to 0
8/27/2012	7:57:51 PM	Helium valve closed
8/27/2012	7:57:51 PM	BCl3 valve closed
8/27/2012	7:57:51 PM	PH3 valve closed
8/27/2012	7:57:51 PM	SiCl4 pre valve closed
8/27/2012	7:57:51 PM	SiCl4 post valve closed
8/27/2012	7:57:51 PM	Main Vac valve closed
8/27/2012	7:57:51 PM	Bypass valve closed
8/27/2012	7:57:51 PM	Bubbler valve closed
8/27/2012	7:57:51 PM	H2 valve opened
8/27/2012	7:57:51 PM	Helium MFC set to  0.000000
8/27/2012	7:57:51 PM	H2 MFC set to  500.000000
8/27/2012	7:57:51 PM	BCl3 MFC set to  0.000000
8/27/2012	7:57:51 PM	PH3 MFC set to  0.000000
8/27/2012	7:57:51 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:57:51 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:57:52 PM	Tube furnace set to 0
8/27/2012	7:59:04 PM	Helium valve closed
8/27/2012	7:59:04 PM	BCl3 valve closed
8/27/2012	7:59:04 PM	PH3 valve closed
8/27/2012	7:59:04 PM	SiCl4 pre valve closed
8/27/2012	7:59:04 PM	SiCl4 post valve closed
8/27/2012	7:59:04 PM	Main Vac valve closed
8/27/2012	7:59:04 PM	Bypass valve closed
8/27/2012	7:59:04 PM	H2 valve opened
8/27/2012	7:59:04 PM	Bubbler valve opened
8/27/2012	7:59:04 PM	Helium MFC set to  0.000000
8/27/2012	7:59:04 PM	H2 MFC set to  500.000000
8/27/2012	7:59:04 PM	BCl3 MFC set to  0.000000
8/27/2012	7:59:04 PM	PH3 MFC set to  0.000000
8/27/2012	7:59:04 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:59:04 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:59:04 PM	Tube furnace set to 0
8/27/2012	7:59:05 PM	Helium valve closed
8/27/2012	7:59:05 PM	BCl3 valve closed
8/27/2012	7:59:05 PM	PH3 valve closed
8/27/2012	7:59:05 PM	SiCl4 pre valve closed
8/27/2012	7:59:05 PM	SiCl4 post valve closed
8/27/2012	7:59:05 PM	Main Vac valve closed
8/27/2012	7:59:05 PM	Bypass valve closed
8/27/2012	7:59:05 PM	H2 valve opened
8/27/2012	7:59:05 PM	Bubbler valve opened
8/27/2012	7:59:05 PM	Helium MFC set to  0.000000
8/27/2012	7:59:05 PM	H2 MFC set to  450.000000
8/27/2012	7:59:05 PM	BCl3 MFC set to  0.000000
8/27/2012	7:59:05 PM	PH3 MFC set to  0.000000
8/27/2012	7:59:05 PM	SiCl4 MFC set to  0.000000
8/27/2012	7:59:05 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	7:59:05 PM	Tube furnace set to 1000
8/27/2012	8:24:05 PM	Helium valve closed
8/27/2012	8:24:05 PM	PH3 valve closed
8/27/2012	8:24:05 PM	Main Vac valve closed
8/27/2012	8:24:05 PM	Bypass valve closed
8/27/2012	8:24:05 PM	H2 valve opened
8/27/2012	8:24:05 PM	BCl3 valve opened
8/27/2012	8:24:05 PM	SiCl4 pre valve opened
8/27/2012	8:24:05 PM	SiCl4 post valve opened
8/27/2012	8:24:05 PM	Bubbler valve opened
8/27/2012	8:24:05 PM	Helium MFC set to  0.000000
8/27/2012	8:24:05 PM	H2 MFC set to  450.000000
8/27/2012	8:24:05 PM	BCl3 MFC set to  1.500000
8/27/2012	8:24:05 PM	PH3 MFC set to  0.000000
8/27/2012	8:24:05 PM	SiCl4 MFC set to  50.000000
8/27/2012	8:24:05 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:24:05 PM	Tube furnace set to 1000
8/27/2012	8:29:05 PM	Helium valve closed
8/27/2012	8:29:05 PM	BCl3 valve closed
8/27/2012	8:29:05 PM	PH3 valve closed
8/27/2012	8:29:05 PM	SiCl4 pre valve closed
8/27/2012	8:29:05 PM	SiCl4 post valve closed
8/27/2012	8:29:05 PM	Main Vac valve closed
8/27/2012	8:29:05 PM	Bypass valve closed
8/27/2012	8:29:05 PM	H2 valve opened
8/27/2012	8:29:05 PM	Bubbler valve opened
8/27/2012	8:29:05 PM	Helium MFC set to  0.000000
8/27/2012	8:29:05 PM	H2 MFC set to  500.000000
8/27/2012	8:29:05 PM	BCl3 MFC set to  0.000000
8/27/2012	8:29:05 PM	PH3 MFC set to  0.000000
8/27/2012	8:29:05 PM	SiCl4 MFC set to  0.000000
8/27/2012	8:29:05 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:29:06 PM	Tube furnace set to 750
8/27/2012	8:34:06 PM	H2 valve closed
8/27/2012	8:34:06 PM	BCl3 valve closed
8/27/2012	8:34:06 PM	PH3 valve closed
8/27/2012	8:34:06 PM	SiCl4 pre valve closed
8/27/2012	8:34:06 PM	SiCl4 post valve closed
8/27/2012	8:34:06 PM	Main Vac valve closed
8/27/2012	8:34:06 PM	Bypass valve closed
8/27/2012	8:34:06 PM	Helium valve opened
8/27/2012	8:34:06 PM	Bubbler valve opened
8/27/2012	8:34:06 PM	Helium MFC set to  500.000000
8/27/2012	8:34:06 PM	H2 MFC set to  0.000000
8/27/2012	8:34:06 PM	BCl3 MFC set to  0.000000
8/27/2012	8:34:06 PM	PH3 MFC set to  0.000000
8/27/2012	8:34:06 PM	SiCl4 MFC set to  0.000000
8/27/2012	8:34:06 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:34:06 PM	Tube furnace set to 0
8/27/2012	8:49:01 PM	Helium valve closed
8/27/2012	8:49:01 PM	H2 valve closed
8/27/2012	8:49:01 PM	BCl3 valve closed
8/27/2012	8:49:01 PM	PH3 valve closed
8/27/2012	8:49:01 PM	SiCl4 pre valve closed
8/27/2012	8:49:01 PM	SiCl4 post valve closed
8/27/2012	8:49:01 PM	Main Vac valve closed
8/27/2012	8:49:01 PM	Bypass valve closed
8/27/2012	8:49:01 PM	Bubbler valve closed
8/27/2012	8:49:01 PM	Helium MFC set to  0.000000
8/27/2012	8:49:01 PM	H2 MFC set to  0.000000
8/27/2012	8:49:01 PM	BCl3 MFC set to  0.000000
8/27/2012	8:49:01 PM	PH3 MFC set to  0.000000
8/27/2012	8:49:01 PM	SiCl4 MFC set to  0.000000
8/27/2012	8:49:01 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:49:01 PM	Tube furnace set to 0
8/27/2012	8:49:02 PM	Run finished at 8:49 PM
8/27/2012	8:49:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	8:49:05 PM	Recipe started at 8:49 PM
8/27/2012	8:49:05 PM	Helium valve closed
8/27/2012	8:49:05 PM	H2 valve closed
8/27/2012	8:49:05 PM	BCl3 valve closed
8/27/2012	8:49:05 PM	PH3 valve closed
8/27/2012	8:49:05 PM	SiCl4 pre valve closed
8/27/2012	8:49:05 PM	SiCl4 post valve closed
8/27/2012	8:49:05 PM	Main Vac valve closed
8/27/2012	8:49:05 PM	Bypass valve closed
8/27/2012	8:49:05 PM	Bubbler valve closed
8/27/2012	8:49:05 PM	Helium MFC set to  0.000000
8/27/2012	8:49:05 PM	H2 MFC set to  0.000000
8/27/2012	8:49:05 PM	BCl3 MFC set to  0.000000
8/27/2012	8:49:05 PM	PH3 MFC set to  0.000000
8/27/2012	8:49:05 PM	SiCl4 MFC set to  0.000000
8/27/2012	8:49:05 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:49:05 PM	Tube furnace set to 0
8/27/2012	8:49:08 PM	H2 valve closed
8/27/2012	8:49:08 PM	BCl3 valve closed
8/27/2012	8:49:08 PM	PH3 valve closed
8/27/2012	8:49:08 PM	SiCl4 pre valve closed
8/27/2012	8:49:08 PM	SiCl4 post valve closed
8/27/2012	8:49:08 PM	Main Vac valve closed
8/27/2012	8:49:08 PM	Bypass valve closed
8/27/2012	8:49:08 PM	Bubbler valve closed
8/27/2012	8:49:08 PM	Helium valve opened
8/27/2012	8:49:08 PM	Helium MFC set to  500.000000
8/27/2012	8:49:08 PM	H2 MFC set to  0.000000
8/27/2012	8:49:08 PM	BCl3 MFC set to  0.000000
8/27/2012	8:49:08 PM	PH3 MFC set to  0.000000
8/27/2012	8:49:08 PM	SiCl4 MFC set to  0.000000
8/27/2012	8:49:08 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:49:08 PM	Tube furnace set to 0
8/27/2012	8:49:09 PM	Helium valve closed
8/27/2012	8:49:09 PM	H2 valve closed
8/27/2012	8:49:09 PM	BCl3 valve closed
8/27/2012	8:49:09 PM	PH3 valve closed
8/27/2012	8:49:09 PM	SiCl4 pre valve closed
8/27/2012	8:49:09 PM	SiCl4 post valve closed
8/27/2012	8:49:09 PM	Main Vac valve closed
8/27/2012	8:49:09 PM	Bypass valve closed
8/27/2012	8:49:09 PM	Bubbler valve closed
8/27/2012	8:49:09 PM	Helium MFC set to  0.000000
8/27/2012	8:49:09 PM	H2 MFC set to  0.000000
8/27/2012	8:49:09 PM	BCl3 MFC set to  0.000000
8/27/2012	8:49:09 PM	PH3 MFC set to  0.000000
8/27/2012	8:49:09 PM	SiCl4 MFC set to  0.000000
8/27/2012	8:49:09 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:49:09 PM	Tube furnace set to 0
8/27/2012	8:49:10 PM	Run finished at 8:49 PM
8/27/2012	8:49:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2012	8:54:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2012	8:54:23 PM	Recipe started at 8:54 PM
8/27/2012	8:54:23 PM	Helium valve closed
8/27/2012	8:54:23 PM	H2 valve closed
8/27/2012	8:54:23 PM	BCl3 valve closed
8/27/2012	8:54:23 PM	PH3 valve closed
8/27/2012	8:54:23 PM	SiCl4 pre valve closed
8/27/2012	8:54:23 PM	SiCl4 post valve closed
8/27/2012	8:54:23 PM	Main Vac valve closed
8/27/2012	8:54:23 PM	Bubbler valve closed
8/27/2012	8:54:23 PM	Bypass valve opened
8/27/2012	8:54:23 PM	Helium MFC set to  0.000000
8/27/2012	8:54:23 PM	H2 MFC set to  0.000000
8/27/2012	8:54:23 PM	BCl3 MFC set to  0.000000
8/27/2012	8:54:23 PM	PH3 MFC set to  0.000000
8/27/2012	8:54:23 PM	SiCl4 MFC set to  0.000000
8/27/2012	8:54:23 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:54:23 PM	Tube furnace set to 0
8/27/2012	8:55:37 PM	Helium valve closed
8/27/2012	8:55:37 PM	H2 valve closed
8/27/2012	8:55:37 PM	BCl3 valve closed
8/27/2012	8:55:37 PM	PH3 valve closed
8/27/2012	8:55:37 PM	SiCl4 pre valve closed
8/27/2012	8:55:37 PM	SiCl4 post valve closed
8/27/2012	8:55:37 PM	Main Vac valve closed
8/27/2012	8:55:37 PM	Bubbler valve closed
8/27/2012	8:55:37 PM	Bypass valve opened
8/27/2012	8:55:37 PM	Helium MFC set to  0.000000
8/27/2012	8:55:37 PM	H2 MFC set to  0.000000
8/27/2012	8:55:37 PM	BCl3 MFC set to  0.000000
8/27/2012	8:55:37 PM	PH3 MFC set to  0.000000
8/27/2012	8:55:37 PM	SiCl4 MFC set to  0.000000
8/27/2012	8:55:37 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:55:37 PM	Tube furnace set to 0
8/27/2012	8:56:37 PM	Helium valve closed
8/27/2012	8:56:37 PM	H2 valve closed
8/27/2012	8:56:37 PM	BCl3 valve closed
8/27/2012	8:56:37 PM	PH3 valve closed
8/27/2012	8:56:37 PM	SiCl4 pre valve closed
8/27/2012	8:56:37 PM	SiCl4 post valve closed
8/27/2012	8:56:37 PM	Bypass valve closed
8/27/2012	8:56:37 PM	Bubbler valve closed
8/27/2012	8:56:37 PM	Main Vac valve opened
8/27/2012	8:56:37 PM	Helium MFC set to  0.000000
8/27/2012	8:56:37 PM	H2 MFC set to  0.000000
8/27/2012	8:56:37 PM	BCl3 MFC set to  0.000000
8/27/2012	8:56:37 PM	PH3 MFC set to  0.000000
8/27/2012	8:56:37 PM	SiCl4 MFC set to  0.000000
8/27/2012	8:56:37 PM	Bypass solenoid MFC set to  0.000000
8/27/2012	8:56:37 PM	Tube furnace set to 0
8/27/2012	8:56:38 PM	Run finished at 8:56 PM
8/27/2012	8:56:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
